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Class Information
Number: 438/704
Name: Semiconductor device manufacturing: process > Chemical etching > Having liquid and vapor etching steps
Description: Processes having a liquid (i.e., wet) chemical etching step and a gaseous (i.e., dry) chemical etching step.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7041605 |
Semiconductor contact structure and method of forming the same |
May. 9, 2006 |
| 7037849 |
Process for patterning high-k dielectric material |
May. 2, 2006 |
| 7037842 |
Method and apparatus for dissolving a gas into a liquid for single wet wafer processing |
May. 2, 2006 |
| 7033848 |
Light emitting device and method of manufacturing the same |
Apr. 25, 2006 |
| 7030025 |
Method of manufacturing flotox type eeprom |
Apr. 18, 2006 |
| 7030024 |
Dual-gate structure and method of fabricating integrated circuits having dual-gate structures |
Apr. 18, 2006 |
| 7021320 |
Method of removing a via fence |
Apr. 4, 2006 |
| 7022610 |
Wet cleaning method to eliminate copper corrosion |
Apr. 4, 2006 |
| 7022570 |
Methods of forming hemispherical grained silicon on a template on a semiconductor work object |
Apr. 4, 2006 |
| 7022612 |
Method of removing etch residues |
Apr. 4, 2006 |
| 7018936 |
Ion implant lithography method of processing a semiconductor substrate |
Mar. 28, 2006 |
| 7018552 |
Method of manufacturing electronic device |
Mar. 28, 2006 |
| 7001784 |
Method to control spacer width |
Feb. 21, 2006 |
| 6998277 |
Method of planarizing spin-on material layer and manufacturing photoresist layer |
Feb. 14, 2006 |
| 6998347 |
Method of reworking layers over substrate |
Feb. 14, 2006 |
| 6979653 |
Semiconductor fabrication methods and apparatus |
Dec. 27, 2005 |
| 6969684 |
Method of making a planarized semiconductor structure |
Nov. 29, 2005 |
| 6967167 |
Silicon dioxide removing method |
Nov. 22, 2005 |
| 6949457 |
Barrier enhancement |
Sep. 27, 2005 |
| 6946359 |
Method for fabricating trench isolations with high aspect ratio |
Sep. 20, 2005 |
| 6946399 |
Cleaning system method and apparatus for the manufacture of integrated cicuits |
Sep. 20, 2005 |
| 6939807 |
Apparatus for manufacturing semiconductor devices with a moveable shield |
Sep. 6, 2005 |
| 6927171 |
Piezoresistive device and manufacturing processes of this device |
Aug. 9, 2005 |
| 6921719 |
Method of preparing whole semiconductor wafer for analysis |
Jul. 26, 2005 |
| 6921695 |
Etching method for forming a square cornered polysilicon wordline electrode |
Jul. 26, 2005 |
| 6913701 |
Method for fabricating integrated LC/ESI device using SMILE, latent masking, and delayed LOCOS techniques |
Jul. 5, 2005 |
| 6911395 |
Method of making borderless contacts in an integrated circuit |
Jun. 28, 2005 |
| 6908839 |
Method of producing an imaging device |
Jun. 21, 2005 |
| 6902980 |
Method of fabricating a high performance MOSFET device featuring formation of an elevated source/drain region |
Jun. 7, 2005 |
| 6900135 |
Buffer station for wafer backside cleaning and inspection |
May. 31, 2005 |
| 6884726 |
Method for handling a thin silicon wafer |
Apr. 26, 2005 |
| 6884722 |
Method of fabricating a narrow polysilicon line |
Apr. 26, 2005 |
| 6884729 |
Global planarization method |
Apr. 26, 2005 |
| 6881675 |
Method and system for reducing wafer edge tungsten residue utilizing a spin etch |
Apr. 19, 2005 |
| 6878627 |
Semiconductor device with cobalt silicide contacts and method of making the same |
Apr. 12, 2005 |
| 6872663 |
Method for reworking a multi-layer photoresist following an underlayer development |
Mar. 29, 2005 |
| 6867143 |
Method for etching a semiconductor substrate using germanium hard mask |
Mar. 15, 2005 |
| 6864179 |
Semiconductor memory device having COB structure and method of fabricating the same |
Mar. 8, 2005 |
| 6858537 |
Process for smoothing a rough surface on a substrate by dry etching |
Feb. 22, 2005 |
| 6852646 |
Method for forming a dielectric film |
Feb. 8, 2005 |
| 6852635 |
Method for bottomless deposition of barrier layers in integrated circuit metallization schemes |
Feb. 8, 2005 |
| 6852634 |
Low cost method of providing a semiconductor device having a high channel density |
Feb. 8, 2005 |
| 6852592 |
Methods for fabricating semiconductor devices |
Feb. 8, 2005 |
| 6849550 |
Method for manufacturing semiconductor device |
Feb. 1, 2005 |
| 6846750 |
High precision pattern forming method of manufacturing a semiconductor device |
Jan. 25, 2005 |
| 6841431 |
Method for reducing the contact resistance |
Jan. 11, 2005 |
| 6838325 |
Method of forming a self-aligned, selectively etched, double recess high electron mobility transistor |
Jan. 4, 2005 |
| 6838385 |
Method for manufacturing electric capacitance type acceleration sensor |
Jan. 4, 2005 |
| 6838384 |
Thin-film patterning method, manufacturing method of thin-film device and manufacturing method of thin-film magnetic head |
Jan. 4, 2005 |
| 6835617 |
Methods of forming hemispherical grained silicon on a template on a semiconductor work object |
Dec. 28, 2004 |
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