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Class Information
Number: 438/704
Name: Semiconductor device manufacturing: process > Chemical etching > Having liquid and vapor etching steps
Description: Processes having a liquid (i.e., wet) chemical etching step and a gaseous (i.e., dry) chemical etching step.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8709265 (4927 Apr. 29, 2014
8709949 System and method for removing oxide from a sensor clip assembly Apr. 29, 2014
8703620 Methods for PFET fabrication using APM solutions Apr. 22, 2014
8691611 Method for creating a micromechanical membrane structure and MEMS component Apr. 8, 2014
8673676 Surface processing method of silicon substrate for solar cell, and manufacturing method of solar cell Mar. 18, 2014
8668777 Process for treating a semiconductor wafer Mar. 11, 2014
8663488 Apparatus for processing substrate and method of doing the same Mar. 4, 2014
8664092 Method for cleaning silicon wafer, and method for producing epitaxial wafer using the cleaning method Mar. 4, 2014
8658532 Method and material for forming a double exposure lithography pattern Feb. 25, 2014
8658543 Methods for pFET fabrication using APM solutions Feb. 25, 2014
8642476 Method for manufacturing silicon carbide semiconductor device Feb. 4, 2014
8633114 Methods for manufacturing high dielectric constant films Jan. 21, 2014
8629063 Forming features on a substrate having varying feature densities Jan. 14, 2014
8609491 Method for fabricating semiconductor device with buried bit lines Dec. 17, 2013
8598039 Barrier layer removal method and apparatus Dec. 3, 2013
8592888 Field effect transistor for sensing deformation Nov. 26, 2013
8575035 Methods of forming varying depth trenches in semiconductor devices Nov. 5, 2013
8563437 Method for treating group III nitride semiconductor Oct. 22, 2013
8551837 Methods of fabricating high-K metal gate devices Oct. 8, 2013
8551875 Pattern forming method Oct. 8, 2013
8546218 Method for fabricating semiconductor device with buried word line Oct. 1, 2013
8536062 Chemical removal of oxide layer from chip pads Sep. 17, 2013
8530327 Nitride shallow trench isolation (STI) structures and methods for forming the same Sep. 10, 2013
8530356 Method of BARC removal in semiconductor device manufacturing Sep. 10, 2013
8524604 Method for forming fine pattern of semiconductor device Sep. 3, 2013
8524607 Anisotropically conductive member and method of manufacture Sep. 3, 2013
8524520 Method for producing a structure comprising a mobile element by means of a heterogeneous sacrificial layer Sep. 3, 2013
8518824 Self aligning via patterning Aug. 27, 2013
8492186 Method for producing group III nitride semiconductor layer, group III nitride semiconductor light-emitting device, and lamp Jul. 23, 2013
8481431 Method for opening one-side contact region of vertical transistor and method for fabricating one-side junction region using the same Jul. 9, 2013
8476166 Manufacturing method of semiconductor device Jul. 2, 2013
8445307 Monolithic IC and MEMS microfabrication process May. 21, 2013
8445388 Methods of forming semiconductor devices and devices formed using such methods May. 21, 2013
8426315 Method of manufacturing semiconductor device Apr. 23, 2013
8420543 Method for treating the dislocation in a GaN-containing semiconductor layer Apr. 16, 2013
8372752 Method for fabricating ultra-fine nanowire Feb. 12, 2013
8372751 Method for fabricating side contact in semiconductor device Feb. 12, 2013
8361855 Method for fabricating a gate structure Jan. 29, 2013
8334212 Method of manufacturing a semiconductor device Dec. 18, 2012
8334213 Bottom electrode etching process in MRAM cell Dec. 18, 2012
8331012 Electrophoretic display device and method for fabricating spacer for electrophoretic display device Dec. 11, 2012
8324108 Increasing robustness of a dual stress liner approach in a semiconductor device by applying a wet chemistry Dec. 4, 2012
8324004 Method for manufacturing of light emitting device using GaN series III-V group nitride semiconductor material Dec. 4, 2012
8298943 Self aligning via patterning Oct. 30, 2012
8293128 Apparatus for processing substrate and method of doing the same Oct. 23, 2012
8278194 Method for fabricating semiconductor devices and a semiconductor device made therefrom Oct. 2, 2012
8278187 Method for reprocessing semiconductor substrate by stepwise etching with at least two etching treatments Oct. 2, 2012
8263497 High-yield method of exposing and contacting through-silicon vias Sep. 11, 2012
8258056 Method and material for forming a double exposure lithography pattern Sep. 4, 2012
8241982 Semiconductor device manufacturing method Aug. 14, 2012

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