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Class Information
Number: 438/704
Name: Semiconductor device manufacturing: process > Chemical etching > Having liquid and vapor etching steps
Description: Processes having a liquid (i.e., wet) chemical etching step and a gaseous (i.e., dry) chemical etching step.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7365021 |
Methods of fabricating a semiconductor device using an organic compound and fluoride-based buffered solution |
Apr. 29, 2008 |
| 7358102 |
Method for fabricating microelectromechanical optical display devices |
Apr. 15, 2008 |
| 7351354 |
Tungsten metal removing solution and method for removing tungsten metal by use thereof |
Apr. 1, 2008 |
| 7351667 |
Etching solution for silicon oxide method of manufacturing a semiconductor device using the same |
Apr. 1, 2008 |
| 7338610 |
Etching method for manufacturing semiconductor device |
Mar. 4, 2008 |
| 7332440 |
Wet etching apparatus and method |
Feb. 19, 2008 |
| 7332449 |
Method for forming dual damascenes with supercritical fluid treatments |
Feb. 19, 2008 |
| 7326651 |
Method for forming damascene structure utilizing planarizing material coupled with compressive diffusion barrier material |
Feb. 5, 2008 |
| 7316961 |
Method of manufacturing semiconductor device |
Jan. 8, 2008 |
| 7291559 |
Etching method, gate etching method, and method of manufacturing semiconductor devices |
Nov. 6, 2007 |
| 7291562 |
Method to form topography in a deposited layer above a substrate |
Nov. 6, 2007 |
| 7279419 |
Formation of self-aligned contact plugs |
Oct. 9, 2007 |
| 7276175 |
Semiconductor device fabrication method |
Oct. 2, 2007 |
| 7271080 |
Electrically erasable programmable read only memory (EEPROM) cells and methods of fabricating the same |
Sep. 18, 2007 |
| 7267127 |
Method for manufacturing electronic device |
Sep. 11, 2007 |
| 7253114 |
Self-aligned method for defining a semiconductor gate oxide in high voltage device area |
Aug. 7, 2007 |
| 7247247 |
Selective etching method |
Jul. 24, 2007 |
| 7241639 |
Color filter, manufacturing method thereof, electrooptical device and electronic equipment |
Jul. 10, 2007 |
| 7235491 |
Method of manufacturing spacer |
Jun. 26, 2007 |
| 7230293 |
Storage nodes of a semiconductor memory |
Jun. 12, 2007 |
| 7229926 |
Method of manufacturing nitride substrate for semiconductors, and nitride semiconductor substrate |
Jun. 12, 2007 |
| 7226866 |
Etching method for making a reticle |
Jun. 5, 2007 |
| 7205197 |
Method of fabricating a nonvolatile semiconductor memory |
Apr. 17, 2007 |
| 7202175 |
Method and apparatus for treating a substrate surface by bubbling |
Apr. 10, 2007 |
| 7198727 |
Etching process for micromachining materials and devices fabricated thereby |
Apr. 3, 2007 |
| 7195946 |
Process for fabricating a semiconductor device having a suspended micro-system and resultant device |
Mar. 27, 2007 |
| 7192848 |
Method for manufacturing mesa semiconductor device |
Mar. 20, 2007 |
| 7179744 |
Method for fabricating semiconductor device |
Feb. 20, 2007 |
| 7171975 |
Fabrication of ultra-shallow channels for microfluidic devices and systems |
Feb. 6, 2007 |
| 7172971 |
Semiconductor device having a contact window including a lower with a wider to provide a lower contact resistance |
Feb. 6, 2007 |
| 7160751 |
Method of making a SOI silicon structure |
Jan. 9, 2007 |
| 7157378 |
Method for making a semiconductor device having a high-k gate dielectric layer and a metal gate electrode |
Jan. 2, 2007 |
| 7147709 |
Non-contact etch annealing of strained layers |
Dec. 12, 2006 |
| 7148148 |
Mask forming and removing method, and semiconductor device, an electric circuit, a display module, a color filter and an emissive device manufactured by the same method |
Dec. 12, 2006 |
| 7148149 |
Method for fabricating nitride-based compound semiconductor element |
Dec. 12, 2006 |
| 7132368 |
Method for repairing plasma damage after spacer formation for integrated circuit devices |
Nov. 7, 2006 |
| 7119006 |
Via formation for damascene metal conductors in an integrated circuit |
Oct. 10, 2006 |
| 7105361 |
Method of etching a magnetic material |
Sep. 12, 2006 |
| 7105447 |
Etching method |
Sep. 12, 2006 |
| 7091128 |
Method for avoiding oxide undercut during pre-silicide clean for thin spacer FETs |
Aug. 15, 2006 |
| 7091127 |
Methods and apparatus for patterning a surface |
Aug. 15, 2006 |
| 7087531 |
Shallow trench isolation formation |
Aug. 8, 2006 |
| 7084072 |
Method of manufacturing semiconductor device |
Aug. 1, 2006 |
| 7060624 |
Deep filled vias |
Jun. 13, 2006 |
| 7052617 |
Simplified etching technique for producing multiple undercut profiles |
May. 30, 2006 |
| 7041603 |
Method for producing magnetic memory device |
May. 9, 2006 |
| 7041605 |
Semiconductor contact structure and method of forming the same |
May. 9, 2006 |
| 7037842 |
Method and apparatus for dissolving a gas into a liquid for single wet wafer processing |
May. 2, 2006 |
| 7037849 |
Process for patterning high-k dielectric material |
May. 2, 2006 |
| 7033848 |
Light emitting device and method of manufacturing the same |
Apr. 25, 2006 |
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