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Class Information
Number: 438/704
Name: Semiconductor device manufacturing: process > Chemical etching > Having liquid and vapor etching steps
Description: Processes having a liquid (i.e., wet) chemical etching step and a gaseous (i.e., dry) chemical etching step.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7625813 |
Method of fabricating recess channel in semiconductor device |
Dec. 1, 2009 |
| 7618887 |
Semiconductor device with a metal line and method of forming the same |
Nov. 17, 2009 |
| 7611992 |
Semiconductor light emitting element and method of manufacturing the same |
Nov. 3, 2009 |
| 7592201 |
Adjustments of masks by re-flow |
Sep. 22, 2009 |
| 7569489 |
High performance 3D FET structures, and methods for forming the same using preferential crystallographic etching |
Aug. 4, 2009 |
| 7566659 |
Method of forming fine pattern of semiconductor device using SiGe layer as sacrificial layer, and method of forming self-aligned contacts using the same |
Jul. 28, 2009 |
| 7544621 |
Method of removing a metal silicide layer on a gate electrode in a semiconductor manufacturing process and etching method |
Jun. 9, 2009 |
| 7540968 |
Micro movable device and method of making the same using wet etching |
Jun. 2, 2009 |
| 7528076 |
Method for manufacturing gate oxide layer with different thicknesses |
May. 5, 2009 |
| 7521366 |
Manufacturing method of electro line for liquid crystal display device |
Apr. 21, 2009 |
| 7507670 |
Silicon electrode assembly surface decontamination by acidic solution |
Mar. 24, 2009 |
| 7492012 |
Light emitting device and method of manufacturing the same |
Feb. 17, 2009 |
| 7482208 |
Thin film transistor array panel and method of manufacturing the same |
Jan. 27, 2009 |
| 7482279 |
Method for fabricating semiconductor device using ArF photolithography capable of protecting tapered profile of hard mask |
Jan. 27, 2009 |
| 7482192 |
Method of making dimple structure for prevention of MEMS device stiction |
Jan. 27, 2009 |
| 7476622 |
Method of forming a contact in a semiconductor device |
Jan. 13, 2009 |
| 7468323 |
Method of forming high aspect ratio structures |
Dec. 23, 2008 |
| 7462564 |
Processing system and method for treating a substrate |
Dec. 9, 2008 |
| 7459401 |
Method of dividing wafer |
Dec. 2, 2008 |
| 7456086 |
Semiconductor having structure with openings |
Nov. 25, 2008 |
| 7456421 |
Vertical side wall active pin structures in a phase change memory and manufacturing methods |
Nov. 25, 2008 |
| 7452822 |
Via plug formation in dual damascene process |
Nov. 18, 2008 |
| 7452821 |
Method for the formation of contact holes for a number of contact regions for components integrated in a substrate |
Nov. 18, 2008 |
| 7446045 |
Method of manufacturing nitride substrate for semiconductors |
Nov. 4, 2008 |
| 7431855 |
Apparatus and method for removing photoresist from a substrate |
Oct. 7, 2008 |
| 7422020 |
Aluminum incorporation in porous dielectric for improved mechanical properties of patterned dielectric |
Sep. 9, 2008 |
| 7419914 |
Semiconductor device fabrication method |
Sep. 2, 2008 |
| 7405139 |
Prevention of backside cracks in semiconductor chips or wafers using backside film or backside wet etch |
Jul. 29, 2008 |
| 7402523 |
Etching method |
Jul. 22, 2008 |
| 7402467 |
Method of manufacturing a semiconductor device |
Jul. 22, 2008 |
| 7396737 |
Method of forming shallow trench isolation |
Jul. 8, 2008 |
| 7384799 |
Method to avoid amorphous-si damage during wet stripping processes in the manufacture of MEMS devices |
Jun. 10, 2008 |
| 7365021 |
Methods of fabricating a semiconductor device using an organic compound and fluoride-based buffered solution |
Apr. 29, 2008 |
| 7358102 |
Method for fabricating microelectromechanical optical display devices |
Apr. 15, 2008 |
| 7351354 |
Tungsten metal removing solution and method for removing tungsten metal by use thereof |
Apr. 1, 2008 |
| 7351667 |
Etching solution for silicon oxide method of manufacturing a semiconductor device using the same |
Apr. 1, 2008 |
| 7338610 |
Etching method for manufacturing semiconductor device |
Mar. 4, 2008 |
| 7332440 |
Wet etching apparatus and method |
Feb. 19, 2008 |
| 7332449 |
Method for forming dual damascenes with supercritical fluid treatments |
Feb. 19, 2008 |
| 7326651 |
Method for forming damascene structure utilizing planarizing material coupled with compressive diffusion barrier material |
Feb. 5, 2008 |
| 7316961 |
Method of manufacturing semiconductor device |
Jan. 8, 2008 |
| 7291562 |
Method to form topography in a deposited layer above a substrate |
Nov. 6, 2007 |
| 7291559 |
Etching method, gate etching method, and method of manufacturing semiconductor devices |
Nov. 6, 2007 |
| 7279419 |
Formation of self-aligned contact plugs |
Oct. 9, 2007 |
| 7276175 |
Semiconductor device fabrication method |
Oct. 2, 2007 |
| 7271080 |
Electrically erasable programmable read only memory (EEPROM) cells and methods of fabricating the same |
Sep. 18, 2007 |
| 7267127 |
Method for manufacturing electronic device |
Sep. 11, 2007 |
| 7253114 |
Self-aligned method for defining a semiconductor gate oxide in high voltage device area |
Aug. 7, 2007 |
| 7247247 |
Selective etching method |
Jul. 24, 2007 |
| 7241639 |
Color filter, manufacturing method thereof, electrooptical device and electronic equipment |
Jul. 10, 2007 |
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