Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Browse by Category: Main > Engineering
Class Information
Number: 438/704
Name: Semiconductor device manufacturing: process > Chemical etching > Having liquid and vapor etching steps
Description: Processes having a liquid (i.e., wet) chemical etching step and a gaseous (i.e., dry) chemical etching step.


Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
7365021 Methods of fabricating a semiconductor device using an organic compound and fluoride-based buffered solution Apr. 29, 2008
7358102 Method for fabricating microelectromechanical optical display devices Apr. 15, 2008
7351354 Tungsten metal removing solution and method for removing tungsten metal by use thereof Apr. 1, 2008
7351667 Etching solution for silicon oxide method of manufacturing a semiconductor device using the same Apr. 1, 2008
7338610 Etching method for manufacturing semiconductor device Mar. 4, 2008
7332440 Wet etching apparatus and method Feb. 19, 2008
7332449 Method for forming dual damascenes with supercritical fluid treatments Feb. 19, 2008
7326651 Method for forming damascene structure utilizing planarizing material coupled with compressive diffusion barrier material Feb. 5, 2008
7316961 Method of manufacturing semiconductor device Jan. 8, 2008
7291559 Etching method, gate etching method, and method of manufacturing semiconductor devices Nov. 6, 2007
7291562 Method to form topography in a deposited layer above a substrate Nov. 6, 2007
7279419 Formation of self-aligned contact plugs Oct. 9, 2007
7276175 Semiconductor device fabrication method Oct. 2, 2007
7271080 Electrically erasable programmable read only memory (EEPROM) cells and methods of fabricating the same Sep. 18, 2007
7267127 Method for manufacturing electronic device Sep. 11, 2007
7253114 Self-aligned method for defining a semiconductor gate oxide in high voltage device area Aug. 7, 2007
7247247 Selective etching method Jul. 24, 2007
7241639 Color filter, manufacturing method thereof, electrooptical device and electronic equipment Jul. 10, 2007
7235491 Method of manufacturing spacer Jun. 26, 2007
7230293 Storage nodes of a semiconductor memory Jun. 12, 2007
7229926 Method of manufacturing nitride substrate for semiconductors, and nitride semiconductor substrate Jun. 12, 2007
7226866 Etching method for making a reticle Jun. 5, 2007
7205197 Method of fabricating a nonvolatile semiconductor memory Apr. 17, 2007
7202175 Method and apparatus for treating a substrate surface by bubbling Apr. 10, 2007
7198727 Etching process for micromachining materials and devices fabricated thereby Apr. 3, 2007
7195946 Process for fabricating a semiconductor device having a suspended micro-system and resultant device Mar. 27, 2007
7192848 Method for manufacturing mesa semiconductor device Mar. 20, 2007
7179744 Method for fabricating semiconductor device Feb. 20, 2007
7171975 Fabrication of ultra-shallow channels for microfluidic devices and systems Feb. 6, 2007
7172971 Semiconductor device having a contact window including a lower with a wider to provide a lower contact resistance Feb. 6, 2007
7160751 Method of making a SOI silicon structure Jan. 9, 2007
7157378 Method for making a semiconductor device having a high-k gate dielectric layer and a metal gate electrode Jan. 2, 2007
7147709 Non-contact etch annealing of strained layers Dec. 12, 2006
7148148 Mask forming and removing method, and semiconductor device, an electric circuit, a display module, a color filter and an emissive device manufactured by the same method Dec. 12, 2006
7148149 Method for fabricating nitride-based compound semiconductor element Dec. 12, 2006
7132368 Method for repairing plasma damage after spacer formation for integrated circuit devices Nov. 7, 2006
7119006 Via formation for damascene metal conductors in an integrated circuit Oct. 10, 2006
7105361 Method of etching a magnetic material Sep. 12, 2006
7105447 Etching method Sep. 12, 2006
7091128 Method for avoiding oxide undercut during pre-silicide clean for thin spacer FETs Aug. 15, 2006
7091127 Methods and apparatus for patterning a surface Aug. 15, 2006
7087531 Shallow trench isolation formation Aug. 8, 2006
7084072 Method of manufacturing semiconductor device Aug. 1, 2006
7060624 Deep filled vias Jun. 13, 2006
7052617 Simplified etching technique for producing multiple undercut profiles May. 30, 2006
7041603 Method for producing magnetic memory device May. 9, 2006
7041605 Semiconductor contact structure and method of forming the same May. 9, 2006
7037842 Method and apparatus for dissolving a gas into a liquid for single wet wafer processing May. 2, 2006
7037849 Process for patterning high-k dielectric material May. 2, 2006
7033848 Light emitting device and method of manufacturing the same Apr. 25, 2006

1 2 3 4 5 6 7 8 9


 
 
  Recently Added Patents
Microorganism
Method and apparatus of growing silicon single crystal and silicon wafer fabricated thereby
Patch panel for mounting on a wall or in a subrack
Rotor for brushless motor and brushless motor
Drum tuning key
Post-processing method for reducing artifacts in block-coded digital images, and post-processing device for actuating such method
System and method for controlling the coupling between the driveshaft and the primary gear shaft in a motor vehicle with a servo-controlled gearbox
  Randomly Featured Patents
Fuel cell-fuel cell hybrid system
Functional fluid compositions
Stiffenable capsule clamping ring
Chair
Apparatus for cutting plate-shaped workpieces and for edge processing thereof
Power delivery circuit with boost for energetic starting in a pulsed charge starter/alternator system
Superconducting electrical conductor
Impact drive sprinkler
Turbocharger with downstream pressure-gain combustor
System for actively reducing rotational nonuniformity of a shaft, in particular, the drive shaft of an internal combustion engine, and method for this