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Class Information
Number: 438/703
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Plural coating steps
Description: Processes having multiple material deposition steps.

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13

Patent Number Title Of Patent Date Issued
5849635 Semiconductor processing method of forming an insulating dielectric layer and a contact opening therein Dec. 15, 1998
5833817 Method for improving conformity and contact bottom coverage of sputtered titanium nitride barrier layers Nov. 10, 1998
5827780 Additive metalization using photosensitive polymer as RIE mask and part of composite insulator Oct. 27, 1998
5814552 High step process for manufacturing alignment marks for twin-well integrated circuit devices Sep. 29, 1998
5814186 SOG etchant gas and method for using same Sep. 29, 1998
5804515 Method for forming contact holes of semiconductor device Sep. 8, 1998
5795825 Connection layer forming method Aug. 18, 1998
5786277 Method of manufacturing a semiconductor device having an oxide film of a high quality on a semiconductor substrate Jul. 28, 1998
5766492 Method of metal-plating electrode portions of printed-wiring board Jun. 16, 1998
5766499 Method of making a circuitized substrate Jun. 16, 1998
5767020 Etching solution for etching porous silicon, etching method using the etching solution and method of preparing semiconductor member using the etching solution Jun. 16, 1998
5753534 Semiconductor connecting device and method for making the same May. 19, 1998
5750415 Low dielectric constant layers via immiscible sol-gel processing May. 12, 1998
5747357 Modified poly-buffered isolation May. 5, 1998
5741626 Method for forming a dielectric tantalum nitride layer as an anti-reflective coating (ARC) Apr. 21, 1998
5733468 Pattern plating method for fabricating printed circuit boards Mar. 31, 1998
5731235 Methods of forming a silicon nitrite film, a capacitor dielectric layer and a capacitor Mar. 24, 1998
5728507 Method for planarizing a semiconductor layer Mar. 17, 1998
5723385 Wafer edge seal ring structure Mar. 3, 1998
5707487 Method of manufacturing semiconductor device Jan. 13, 1998
5695602 Process of etching silicon nitride layer by using etching gas containing sulfur hexafluoride, hydrogen bromide and oxygen Dec. 9, 1997
5681773 Method for forming a DRAM capacitor Oct. 28, 1997
5677241 Integrated circuitry having a pair of adjacent conductive lines and method of forming Oct. 14, 1997
5674356 Method for forming a semiconductor device in which an anti reflective layer is formed by varying the composition thereof Oct. 7, 1997
5670408 Thin film capacitor with small leakage current and method for fabricating the same Sep. 23, 1997
5663098 Method for deposition of a conductor in integrated circuits Sep. 2, 1997
5639681 Process for eliminating effect of polysilicon stringers in semiconductor devices Jun. 17, 1997
5637186 Method and monitor testsite pattern for measuring critical dimension openings Jun. 10, 1997
5633210 Method for forming damage free patterned layers adjoining the edges of high step height apertures May. 27, 1997
5627110 Method for eliminating window mask process in the fabrication of a semiconductor wafer when chemical-mechanical polish planarization is used May. 6, 1997
5620909 Method of depositing thin passivating film on microminiature semiconductor devices Apr. 15, 1997
5618380 Wafer edge sealing Apr. 8, 1997
5618760 Method of etching a pattern on a substrate using a scanning probe microscope Apr. 8, 1997
5616401 Oxynitride film and its formation method, and method for forming an element isolation oxide film using the oxynitride film Apr. 1, 1997
5609772 Cube maskless lead open process using chemical mechanical polish/lead-tip expose process Mar. 11, 1997
5595941 Method of forming fine patterns Jan. 21, 1997
5593925 Semiconductor device capable of preventing humidity invasion Jan. 14, 1997
RE35420 Method of increasing capacitance by surface roughening in semiconductor wafer processing Jan. 7, 1997
5589422 Controlled, gas phase process for removal of trace metal contamination and for removal of a semiconductor layer Dec. 31, 1996
5580812 Semiconductor device have a belt cover film Dec. 3, 1996
5567637 Method of fabricating a micro-trench floating gate electrode for flash memory cell Oct. 22, 1996
5562802 Method of producing a quantum device which utilizes the quantum effect Oct. 8, 1996
5550007 Surface-imaging technique for lithographic processes for device fabrication Aug. 27, 1996
5545570 Method of inspecting first layer overlay shift in global alignment process Aug. 13, 1996
5518947 Method of forming a semiconductor memory device having silicon nitride overlying only in peripheral circuit area May. 21, 1996
5508231 Apparatus and method for achieving mechanical and thermal isolation of portions of integrated monolithic circuits Apr. 16, 1996
5506164 Method of manufacturing a semiconductor device having a cylindrical capacitor Apr. 9, 1996
5498577 Method for fabricating thin oxides for a semiconductor technology Mar. 12, 1996
5496777 Method of arranging alignment marks Mar. 5, 1996
5496753 Method of fabricating a semiconductor nonvolatile storage device Mar. 5, 1996

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