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Class Information
Number: 438/703
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Plural coating steps
Description: Processes having multiple material deposition steps.

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13

Patent Number Title Of Patent Date Issued
6690093 Metal contact structure in semiconductor device and method for forming the same Feb. 10, 2004
6664197 Process for etching thin-film layers of a workpiece used to form microelectronic circuits or components Dec. 16, 2003
6664156 Method for forming L-shaped spacers with precise width control Dec. 16, 2003
6649526 Method for implanting and coding a read-only memory with automatic alignment at four corners Nov. 18, 2003
6645868 Method of forming shallow trench isolation using antireflection layer Nov. 11, 2003
6635581 Method for forming a thin-film transistor Oct. 21, 2003
6632745 Method of forming almost L-shaped spacer for improved ILD gap fill Oct. 14, 2003
6613680 Method of manufacturing a semiconductor device Sep. 2, 2003
6589854 Method of forming shallow trench isolation Jul. 8, 2003
6589877 Method of providing an oxide Jul. 8, 2003
6579812 Method for removing residual polymer after the dry etching process and reducing oxide loss Jun. 17, 2003
6579742 Fabrication of molecular electronic circuit by imprinting Jun. 17, 2003
6555201 Method for fabricating a microelectromechanical bearing Apr. 29, 2003
6548412 Method of forming patterned thin film Apr. 15, 2003
6531067 Method for forming contact hole Mar. 11, 2003
6523494 Apparatus for depositing low dielectric constant oxide film Feb. 25, 2003
6514805 Trench sidewall profile for device isolation Feb. 4, 2003
6498105 Method of forming fine patterns of a semiconductor device Dec. 24, 2002
6492281 Method of fabricating conductor structures with metal comb bridging avoidance Dec. 10, 2002
6479360 Semiconductor device and manufacturing method Nov. 12, 2002
6461966 Method of high density plasma phosphosilicate glass process on pre-metal dielectric application for plasma damage reducing and throughput improvement Oct. 8, 2002
6458708 Method for forming metal wiring in semiconductor device Oct. 1, 2002
6458516 Method of etching dielectric layers using a removable hardmask Oct. 1, 2002
6451678 Method of reducing overetch during the formation of a semiconductor device Sep. 17, 2002
6451698 System and method for preventing electrochemical erosion by depositing a protective film Sep. 17, 2002
6444513 Metal gate stack with etch stop layer having implanted metal species Sep. 3, 2002
6440860 Semiconductor processing methods of transferring patterns from patterned photoresists to materials, and structures comprising silicon nitride Aug. 27, 2002
6436836 Method of fabricating a DRAM cell configuration Aug. 20, 2002
6432740 Fabrication of molecular electronic circuit by imprinting Aug. 13, 2002
6426287 Method for forming a semiconductor connection with a top surface having an enlarged recess Jul. 30, 2002
6410452 Method of manufacturing semiconductor device Jun. 25, 2002
6406982 Method of improving epitaxially-filled trench by smoothing trench prior to filling Jun. 18, 2002
6406995 Pattern-sensitive deposition for damascene processing Jun. 18, 2002
6391783 Method to thin down copper barriers in deep submicron geometries by using alkaline earth element, barrier additives, or self assembly technique May. 21, 2002
6365509 Semiconductor manufacturing method using a dielectric photomask Apr. 2, 2002
6365524 Method for making a concave bottom oxide within a trench Apr. 2, 2002
6358838 Semiconductor device and process for producing the same Mar. 19, 2002
6358856 Bright field image reversal for contact hole patterning Mar. 19, 2002
6352933 Methods of forming insulating materials between conductive components and methods of forming insulating materials around a conductive component Mar. 5, 2002
6339027 Process for borderless stop in tin via formation Jan. 15, 2002
6323138 Capacitor, methods of forming capacitors, methods for forming silicon nitride layers on silicon-comprising substrates, and methods of densifying silicon nitride layers Nov. 27, 2001
6277731 Method for forming a semiconductor connection with a top surface having an enlarged recess Aug. 21, 2001
6274493 Method for forming a via Aug. 14, 2001
6268620 Method of forming capacitors on integrated circuit Jul. 31, 2001
6255218 Semiconductor device and fabrication method thereof Jul. 3, 2001
6251470 Methods of forming insulating materials, and methods of forming insulating materials around a conductive component Jun. 26, 2001
6245642 Process for planarizing buried oxide films in trenches by applying sequential diverse CMP treatments Jun. 12, 2001
6246070 Semiconductor device provided with semiconductor circuit made of semiconductor element and method of fabricating the same Jun. 12, 2001
6242337 Semiconductor device and method of manufacturing the same Jun. 5, 2001
6239035 Semiconductor wafer fabrication May. 29, 2001

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