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Class Information
Number: 438/703
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Plural coating steps
Description: Processes having multiple material deposition steps.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13

Patent Number Title Of Patent Date Issued
7538036 Methods of forming openings, and methods of forming container capacitors May. 26, 2009
7521363 MEMS device with non-standard profile Apr. 21, 2009
7459731 Device containing isolation regions with threading dislocations Dec. 2, 2008
7432120 Method for realizing a hosting structure of nanometric elements Oct. 7, 2008
7432163 Method of manufacturing semiconductor device that includes forming adjacent field regions with a separating region therebetween Oct. 7, 2008
7410901 Submicron device fabrication Aug. 12, 2008
7405147 Device and methodology for reducing effective dielectric constant in semiconductor devices Jul. 29, 2008
7396475 Method of forming stepped structures employing imprint lithography Jul. 8, 2008
7351660 Process for producing high performance interconnects Apr. 1, 2008
7344974 Metallization method of semiconductor device Mar. 18, 2008
7344990 Method of manufacturing micro-structure element by utilizing molding glass Mar. 18, 2008
7341950 Method for controlling a thickness of a first layer and method for adjusting the thickness of different first layers Mar. 11, 2008
7335579 Nanometer-scale memory device utilizing self-aligned rectifying elements and method of making Feb. 26, 2008
7329586 Gapfill using deposition-etch sequence Feb. 12, 2008
7316978 Method for forming recesses Jan. 8, 2008
7307024 Flash memory and fabrication method thereof Dec. 11, 2007
7307014 Method of forming a via contact structure using a dual damascene process Dec. 11, 2007
7303995 Method for reducing dimensions between patterns on a photoresist Dec. 4, 2007
7282434 Method of manufacturing a semiconductor device Oct. 16, 2007
7279396 Methods of forming trench isolation regions with nitride liner Oct. 9, 2007
7262118 Method for generating a structure on a substrate Aug. 28, 2007
7253113 Methods for using a silylation technique to reduce cell pitch in semiconductor devices Aug. 7, 2007
7253112 Dual damascene process Aug. 7, 2007
7247582 Deposition of tensile and compressive stressed materials Jul. 24, 2007
7244680 Method of simultaneously fabricating isolation structures having rounded and unrounded corners Jul. 17, 2007
7232764 Semiconductor device fabrication method Jun. 19, 2007
7217663 Via hole and trench structures and fabrication methods thereof and dual damascene structures and fabrication methods thereof May. 15, 2007
7217625 Method of fabricating a semiconductor device having a shallow source/drain region May. 15, 2007
7205244 Patterning substrates employing multi-film layers defining etch-differential interfaces Apr. 17, 2007
7189628 Fabrication of trenches with multiple depths on the same substrate Mar. 13, 2007
7183218 Methods for fabricating a semiconductor device with etch end point detection Feb. 27, 2007
7179748 Method for forming recesses Feb. 20, 2007
7172975 Process for the wet chemical treatment of semiconductor wafers Feb. 6, 2007
7169711 Method of using carbon spacers for critical dimension (CD) reduction Jan. 30, 2007
7153778 Methods of forming openings, and methods of forming container capacitors Dec. 26, 2006
7153753 Strained Si/SiGe/SOI islands and processes of making same Dec. 26, 2006
7141485 Shallow trench isolation structure with low sidewall capacitance for high speed integrated circuits Nov. 28, 2006
7129177 Write head fabrication by inverting order of process steps Oct. 31, 2006
7112484 Thin film diode integrated with chalcogenide memory cell Sep. 26, 2006
7109121 Stress control of semiconductor microstructures for thin film growth Sep. 19, 2006
7109119 Scum solution for chemically amplified resist patterning in cu/low k dual damascene Sep. 19, 2006
7105453 Method for forming contact holes Sep. 12, 2006
7084072 Method of manufacturing semiconductor device Aug. 1, 2006
7083898 Method for performing chemical shrink process over BARC (bottom anti-reflective coating) Aug. 1, 2006
7074668 Capacitor of semiconductor device and method for forming the same Jul. 11, 2006
7071109 Methods for fabricating spatial light modulators with hidden comb actuators Jul. 4, 2006
RE39143 Method for making a wafer-pair having sealed chambers Jun. 27, 2006
7067429 Processing method of forming MRAM circuitry Jun. 27, 2006
7060622 Method of forming dummy wafer Jun. 13, 2006
7052977 Method of dicing a semiconductor wafer that substantially reduces the width of the saw street May. 30, 2006

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