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Class Information
Number: 438/703
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Plural coating steps
Description: Processes having multiple material deposition steps.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8211804 Methods of forming a hole having a vertical profile and semiconductor devices having a vertical hole Jul. 3, 2012
8207065 Method for forming a shallow trench isolation Jun. 26, 2012
8187927 Liquid crystal display and fabrication method thereof May. 29, 2012
8168520 Method of manufacturing semiconductor device May. 1, 2012
8148246 Method for separating semiconductor layer from substrate Apr. 3, 2012
8148247 Method and algorithm for random half pitched interconnect layout with constant spacing Apr. 3, 2012
8138010 Method for fabricating high density pillar structures by double patterning using positive photoresist Mar. 20, 2012
8138094 Method for manufacturing mask Mar. 20, 2012
8120144 Method for forming dual high-K metal gate using photoresist mask and structures thereof Feb. 21, 2012
8118585 Pattern formation method and a method for manufacturing a semiconductor device Feb. 21, 2012
8114302 Method of fabricating cantilever type probe and method of fabricating probe card using the same Feb. 14, 2012
8114769 Methods and structures to enable self-aligned via etch for Cu damascene structure using trench first metal hard mask (TFMHM) scheme Feb. 14, 2012
8105949 Substrate processing method Jan. 31, 2012
8093153 Method of etching oxide layer and nitride layer Jan. 10, 2012
8091046 Set of masks, method of generating mask data and method for forming a pattern Jan. 3, 2012
8084310 Self-aligned multi-patterning for advanced critical dimension contacts Dec. 27, 2011
8071485 Method of semiconductor manufacturing for small features Dec. 6, 2011
8071442 Transistor with embedded Si/Ge material having reduced offset to the channel region Dec. 6, 2011
8062971 Dual damascene process Nov. 22, 2011
8058174 Method for treating semiconductor processing components and components formed thereby Nov. 15, 2011
8058177 Winged vias to increase overlay margin Nov. 15, 2011
8048325 Method and apparatus for multilayer photoresist dry development Nov. 1, 2011
8048810 Method for metal gate N/P patterning Nov. 1, 2011
8030217 Simplified pitch doubling process flow Oct. 4, 2011
8026179 Patterning method and integrated circuit structure Sep. 27, 2011
8003540 Method for manufacturing semiconductor device Aug. 23, 2011
8003544 Method of manufacturing semiconductor device Aug. 23, 2011
7994056 Method for forming pattern in semiconductor device Aug. 9, 2011
7994060 Dual exposure track only pitch split process Aug. 9, 2011
7985686 Method of forming a nonvolatile memory device using semiconductor nanoparticles Jul. 26, 2011
7977242 Double mask self-aligned double patterning technology (SADPT) process Jul. 12, 2011
7972967 Method of forming patterns of a semiconductor device including forming spacers on sidewalls of auxiliary patterns and removing exposed auxiliary patterns Jul. 5, 2011
7972966 Etching of tungsten selective to titanium nitride Jul. 5, 2011
7972929 Method for manufacturing semicondcutor device Jul. 5, 2011
7960287 Methods for fabricating FinFET structures having different channel lengths Jun. 14, 2011
7955990 Method for improved thickness repeatability of PECVD deposited carbon films Jun. 7, 2011
7955908 Thin film transistor array panel and manufacturing method thereof Jun. 7, 2011
7951720 Method of forming a contact hole for a semiconductor device May. 31, 2011
7947606 Methods of forming conductive features and structures thereof May. 24, 2011
7947576 Method of manufacturing by etching a semiconductor substrate horizontally without creating a vertical face May. 24, 2011
7939448 Semiconductor device having electrode and manufacturing method thereof May. 10, 2011
7928016 Method of manufacturing semiconductor device, and semiconductor device Apr. 19, 2011
7927961 Selective etching method and method for forming an isolation structure of a memory device Apr. 19, 2011
7923372 Method for fabricating semiconductor device Apr. 12, 2011
7919413 Methods for forming patterns Apr. 5, 2011
7915115 Method for forming dual high-k metal gate using photoresist mask and structures thereof Mar. 29, 2011
7910487 Reverse masking profile improvements in high aspect ratio etch Mar. 22, 2011
7902074 Simplified pitch doubling process flow Mar. 8, 2011
7902083 Passivation layer for a circuit device and method of manufacture Mar. 8, 2011
7892940 Device and methodology for reducing effective dielectric constant in semiconductor devices Feb. 22, 2011

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