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Class Information
Number: 438/703
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Plural coating steps
Description: Processes having multiple material deposition steps.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13

Patent Number Title Of Patent Date Issued
8426314 Method for forming semiconductor device Apr. 23, 2013
8420542 Method of patterned image reversal Apr. 16, 2013
8415253 Low-temperature in-situ removal of oxide from a silicon surface during CMOS epitaxial processing Apr. 9, 2013
8394280 Resist pattern protection technique for double patterning application Mar. 12, 2013
8389413 Method of manufacturing semiconductor device Mar. 5, 2013
8389414 Method of manufacturing a wiring board Mar. 5, 2013
8383516 Semiconductor device and method for manufacturing the same Feb. 26, 2013
8377798 Method and structure for wafer to wafer bonding in semiconductor packaging Feb. 19, 2013
8377826 Fin mask and method for fabricating saddle type fin using the same Feb. 19, 2013
8378385 Methods of preparing flexible photovoltaic devices using epitaxial liftoff, and preserving the integrity of growth substrates used in epitaxial growth Feb. 19, 2013
8372751 Method for fabricating side contact in semiconductor device Feb. 12, 2013
8357618 Frequency doubling using a photo-resist template mask Jan. 22, 2013
8358010 Method for realizing a nanometric circuit architecture between standard electronic components and semiconductor device obtained with said method Jan. 22, 2013
8349741 Amorphous carbon deposition method for improved stack defectivity Jan. 8, 2013
8343868 Device and methodology for reducing effective dielectric constant in semiconductor devices Jan. 1, 2013
8343878 Method of plasma etching GA-based compound semiconductors Jan. 1, 2013
8338308 Method of plasma etching Ga-based compound semiconductors Dec. 25, 2012
8338205 Method of fabricating and encapsulating MEMS devices Dec. 25, 2012
8334181 Germanium MOSFET devices and methods for making same Dec. 18, 2012
8329588 Passivation of integrated circuits containing ferroelectric capacitors and hydrogen barriers Dec. 11, 2012
8318603 Method of forming patterns for semiconductor device Nov. 27, 2012
8298954 Sidewall image transfer process employing a cap material layer for a metal nitride layer Oct. 30, 2012
8298953 Method for defining a separating structure within a semiconductor device Oct. 30, 2012
8293651 Method of forming thin film pattern for semiconductor device and apparatus for the same Oct. 23, 2012
8293652 Substrate processing method, semiconductor chip manufacturing method, and resin-adhesive-layer-backed semiconductor chip manufacturing method Oct. 23, 2012
8288645 Single heterojunction back contact solar cell Oct. 16, 2012
8288284 Substrate processing method, semiconductor chip manufacturing method, and resin-adhesive-layer-backed semiconductor chip manufacturing method Oct. 16, 2012
8283253 Pattern forming method, semiconductor device manufacturing method and semiconductor device manufacturing apparatus Oct. 9, 2012
8283254 Etching method and etching apparatus Oct. 9, 2012
8273663 Process for anisotropic etching of semiconductors Sep. 25, 2012
8273661 Pattern forming method, semiconductor device manufacturing method and semiconductor device manufacturing apparatus Sep. 25, 2012
8273662 Method for manufacturing a semiconductor device Sep. 25, 2012
8273665 Nonvolatile memory device using semiconductor nanocrystals and method forming same Sep. 25, 2012
8268184 Etch process for reducing silicon recess Sep. 18, 2012
8252690 In situ Cu seed layer formation for improving sidewall coverage Aug. 28, 2012
8252692 Semiconductor device and method of fabricating the same Aug. 28, 2012
8247305 Method and resulting structure for deep trench polysilicon hard mask removal Aug. 21, 2012
8247330 Method of forming micropattern, die formed by this method of forming micropattern, transfer method and micropattern forming method using this die Aug. 21, 2012
8242021 Method for manufacturing semiconductor device Aug. 14, 2012
8242029 Method for forming a silicon dioxide/metal oxide-nanolaminate with a desired wet etch rate Aug. 14, 2012
8237167 Semiconductor device and manufacturing method thereof Aug. 7, 2012
8236697 Method for manufacturing semiconductor device Aug. 7, 2012
8232210 Double patterning process for integrated circuit device manufacturing Jul. 31, 2012
8232164 Damascene method of forming a semiconductor structure and a semiconductor structure with multiple fin-shaped channel regions having different widths Jul. 31, 2012
8227352 Amorphous carbon deposition method for improved stack defectivity Jul. 24, 2012
8227307 Method for removing threshold voltage adjusting layer with external acid diffusion process Jul. 24, 2012
8222152 Method for fabricating hole pattern Jul. 17, 2012
8222153 Textured single crystal Jul. 17, 2012
8216945 Wafer planarity control between pattern levels Jul. 10, 2012
8211769 Method for forming junctions of vertical cells in semiconductor device Jul. 3, 2012

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