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Class Information
Number: 438/703
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Plural coating steps
Description: Processes having multiple material deposition steps.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13

Patent Number Title Of Patent Date Issued
8709947 Method for forming pattern Apr. 29, 2014
8703618 Method of forming micropattern, die formed by this method of forming micropattern, transfer method and micropattern forming method using this die Apr. 22, 2014
8691698 Controlled gas mixing for smooth sidewall rapid alternating etch process Apr. 8, 2014
8685862 Method of forming micropattern, die formed by this method of forming micropattern, transfer method and micropattern forming method using this die Apr. 1, 2014
8686542 Compliant monopolar micro device transfer head with silicon electrode Apr. 1, 2014
8673757 Structure and method for using high-k material as an etch stop layer in dual stress layer process Mar. 18, 2014
8673786 Method for manufacturing microstructure using self-assembly of amphiphilic polymer Mar. 18, 2014
8674052 Carbazole novolak resin Mar. 18, 2014
8669185 Method of tailoring conformality of Si-containing film Mar. 11, 2014
8652969 High aspect ratio and reduced undercut trench etch process for a semiconductor substrate Feb. 18, 2014
8647989 Method of forming opening on semiconductor substrate Feb. 11, 2014
8642425 Method of making an insulated gate semiconductor device and structure Feb. 4, 2014
8637406 Image transfer process employing a hard mask layer Jan. 28, 2014
8633573 Strained semiconductor materials, devices and methods therefore Jan. 21, 2014
8629040 Methods for epitaxially growing active regions between STI regions Jan. 14, 2014
8614144 Method for fabrication of interconnect structure with improved alignment for semiconductor devices Dec. 24, 2013
8614148 Methods for forming fine patterns of a semiconductor device Dec. 24, 2013
8609544 Method for fabricating semiconductor device Dec. 17, 2013
8609543 Method for manufacturing semiconductor device having multi-layered hard mask layer Dec. 17, 2013
8609491 Method for fabricating semiconductor device with buried bit lines Dec. 17, 2013
8598465 Hermetic circuit ring for BCB WSA circuits Dec. 3, 2013
8592297 Wafer and method of processing wafer Nov. 26, 2013
8575032 Methods of forming a pattern on a substrate Nov. 5, 2013
8557131 Methods of forming fine patterns and methods of fabricating semiconductor devices Oct. 15, 2013
8557706 Substrate processing method Oct. 15, 2013
8546218 Method for fabricating semiconductor device with buried word line Oct. 1, 2013
8546170 MEMS process and device Oct. 1, 2013
8541306 Semiconductor device and method of double photolithography process for forming patterns of the semiconductor device Sep. 24, 2013
8524605 Fabrication and mask design methods using spatial frequency sextupling technique Sep. 3, 2013
8518732 Method of providing a semiconductor structure with forming a sacrificial structure Aug. 27, 2013
8518828 Semiconductor device fabrication method Aug. 27, 2013
8518831 Method of forming semiconductor memory device Aug. 27, 2013
8513133 Composition for forming resist underlayer film and method for forming pattern Aug. 20, 2013
8513125 Manufacturing a microelectronic device comprising silicon and germanium nanowires integrated on a same substrate Aug. 20, 2013
8507346 Method of forming a semiconductor device having a cut-way hole to expose a portion of a hardmask layer Aug. 13, 2013
8507385 Method for processing a thin film micro device on a substrate Aug. 13, 2013
8501607 FinFET alignment structures using a double trench flow Aug. 6, 2013
8502334 Image sensor and method for manufacturing the same Aug. 6, 2013
8497211 Integrated process modulation for PSG gapfill Jul. 30, 2013
8492227 Method of forming side wall spacers for a semiconductor device Jul. 23, 2013
8492282 Methods of forming a masking pattern for integrated circuits Jul. 23, 2013
8488128 Line edge roughness measuring technique and test structure Jul. 16, 2013
8481364 Flexible micro-system and fabrication method thereof Jul. 9, 2013
8481417 Semiconductor structures including tight pitch contacts and methods to form same Jul. 9, 2013
8481431 Method for opening one-side contact region of vertical transistor and method for fabricating one-side junction region using the same Jul. 9, 2013
8470711 Tone inversion with partial underlayer etch for semiconductor device formation Jun. 25, 2013
RE44303 Passivation layer for a circuit device and method of manufacture Jun. 18, 2013
8461048 Fabrication method of minute pattern Jun. 11, 2013
8440557 Method for fabricating a semiconductor device by considering the extinction coefficient during etching of an interlayer insulating film May. 14, 2013
8435900 Method for manufacturing a transistor May. 7, 2013

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