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Class Information
Number: 438/702
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Formation of groove or trench > Plural coating steps
Description: Processes wherein the viahole or trench is formed by a process having multiple material deposition steps.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8709946 Method for forming contact hole Apr. 29, 2014
8703591 Method for fabricating black silicon by using plasma immersion ion implantation Apr. 22, 2014
8691698 Controlled gas mixing for smooth sidewall rapid alternating etch process Apr. 8, 2014
8685822 Semiconductor component and method of manufacture Apr. 1, 2014
8673785 Gas distribution system having fast gas switching capabilities Mar. 18, 2014
8664079 Method of fabricating semiconductor device by thinning hardmask layers on frontside and backside of substrate Mar. 4, 2014
8658531 Method of forming connection holes Feb. 25, 2014
8647981 Methods of forming patterns, and methods of forming integrated circuitry Feb. 11, 2014
8647989 Method of forming opening on semiconductor substrate Feb. 11, 2014
8647990 Method of patterning a low-K dielectric film Feb. 11, 2014
8643094 Method of forming a self-aligned contact opening in MOSFET Feb. 4, 2014
8642425 Method of making an insulated gate semiconductor device and structure Feb. 4, 2014
8637411 Plasma activated conformal dielectric film deposition Jan. 28, 2014
8633113 Method for fabricating a bottom oxide layer in a trench Jan. 21, 2014
8614149 Critical dimension reduction and roughness control Dec. 24, 2013
8609491 Method for fabricating semiconductor device with buried bit lines Dec. 17, 2013
8609533 Methods for fabricating integrated circuits having substrate contacts and integrated circuits having substrate contacts Dec. 17, 2013
8603919 Method for fabricating semiconductor device Dec. 10, 2013
8598038 Process for producing two interleaved patterns on a substrate Dec. 3, 2013
8598036 Method for forming fine pattern having variable width and method for manufacturing semiconductor device using the same Dec. 3, 2013
8598689 Methods of manufacturing semiconductor structures and devices including nanotubes, and semiconductor structures, devices, and systems fabricated using such methods Dec. 3, 2013
8557707 Focused ion beam deep nano-patterning apparatus and method Oct. 15, 2013
8557706 Substrate processing method Oct. 15, 2013
8546258 Method of fabricating metal contact using double patterning technology and device formed thereby Oct. 1, 2013
8546218 Method for fabricating semiconductor device with buried word line Oct. 1, 2013
8541311 Integrated circuit fabrication methods utilizing embedded hardmask layers for high resolution patterning Sep. 24, 2013
8536050 Selective shrinkage of contact elements in a semiconductor device Sep. 17, 2013
8501607 FinFET alignment structures using a double trench flow Aug. 6, 2013
8497212 Filling narrow openings using ion beam etch Jul. 30, 2013
8492188 Method for producing a micromechanical component Jul. 23, 2013
8486840 Inverse spacer processing Jul. 16, 2013
8481429 Method of manufacturing semiconductor device Jul. 9, 2013
8481431 Method for opening one-side contact region of vertical transistor and method for fabricating one-side junction region using the same Jul. 9, 2013
8466070 Methods of forming semiconductor structures Jun. 18, 2013
8455363 Method for adjusting trench depth of substrate Jun. 4, 2013
8450190 Fabrication of GaN substrate by defect selective passivation May. 28, 2013
8450133 Strained-enhanced silicon photon-to-electron conversion devices May. 28, 2013
8440570 Method for manufacturing semiconductor device May. 14, 2013
8431488 Damascene process using cleaning solution Apr. 30, 2013
8426314 Method for forming semiconductor device Apr. 23, 2013
8420541 Method for increasing adhesion between polysilazane and silicon nitride Apr. 16, 2013
8420540 Sub-lithographic printing method Apr. 16, 2013
8415224 Method of fabricating a semiconductor device including forming trenches having particular structures Apr. 9, 2013
8415770 Apparatus and methods for uniform metal plating Apr. 9, 2013
8399359 Manufacturing method for dual damascene structure Mar. 19, 2013
8389405 Method for forming fine pattern having variable width and method for manufacturing semiconductor device using the same Mar. 5, 2013
8383511 Method for manufacturing mask Feb. 26, 2013
8383516 Semiconductor device and method for manufacturing the same Feb. 26, 2013
8383517 Substrate processing method and substrate processing apparatus Feb. 26, 2013
8377826 Fin mask and method for fabricating saddle type fin using the same Feb. 19, 2013

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