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Class Information
Number: 438/701
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Formation of groove or trench > Tapered configuration
Description: Processes wherein the viahole or trench is formed so as to possess nonparallel sides.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7615849 |
Semiconductor device and manufacturing method thereof |
Nov. 10, 2009 |
| 7598177 |
Methods of filling trenches using high-density plasma deposition (HDP) |
Oct. 6, 2009 |
| 7598169 |
Method to remove beol sacrificial materials and chemical residues by irradiation |
Oct. 6, 2009 |
| 7582532 |
Method for fabricating semiconductor device |
Sep. 1, 2009 |
| 7575968 |
Inverse slope isolation and dual surface orientation integration |
Aug. 18, 2009 |
| 7575996 |
Semiconductor device and method for manufacturing the same |
Aug. 18, 2009 |
| 7572653 |
Method of fabricating light emitting diode |
Aug. 11, 2009 |
| 7569485 |
Method for an integrated circuit contact |
Aug. 4, 2009 |
| 7531410 |
Semiconductor flash memory device and method of fabricating the same |
May. 12, 2009 |
| 7517710 |
Method of manufacturing field emission device |
Apr. 14, 2009 |
| 7485579 |
Method of manufacturing a semiconductor device |
Feb. 3, 2009 |
| 7462564 |
Processing system and method for treating a substrate |
Dec. 9, 2008 |
| 7439143 |
Flash memory device and method of manufacturing the same |
Oct. 21, 2008 |
| 7432605 |
Overlay mark, method for forming the same and application thereof |
Oct. 7, 2008 |
| 7413995 |
Etched interposer for integrated circuit devices |
Aug. 19, 2008 |
| 7410905 |
Method for fabricating thin film pattern, device and fabricating method therefor, method for fabricating liquid crystal display, liquid crystal display, method for fabricating active matrix su |
Aug. 12, 2008 |
| 7405162 |
Etching method and computer-readable storage medium |
Jul. 29, 2008 |
| 7393791 |
Etching method, method of fabricating metal film structure, and etching structure |
Jul. 1, 2008 |
| 7387955 |
Field effect transistor and method for manufacturing the same |
Jun. 17, 2008 |
| 7381649 |
Structure for a multiple-gate FET device and a method for its fabrication |
Jun. 3, 2008 |
| 7365015 |
Damascene replacement metal gate process with controlled gate profile and length using Si.sub.1-xGe.sub.x as sacrificial material |
Apr. 29, 2008 |
| 7348202 |
CMOS image sensor and method for fabricating the same |
Mar. 25, 2008 |
| 7335593 |
Method of fabricating semiconductor device |
Feb. 26, 2008 |
| 7320927 |
In situ hardmask pullback using an in situ plasma resist trim process |
Jan. 22, 2008 |
| 7311850 |
Method of forming patterned thin film and method of fabricating micro device |
Dec. 25, 2007 |
| 7303648 |
Via etch process |
Dec. 4, 2007 |
| 7300882 |
Etching method and semiconductor device fabricating method |
Nov. 27, 2007 |
| 7297568 |
Three-dimensional structural body composed of silicon fine wire, its manufacturing method, and device using same |
Nov. 20, 2007 |
| 7282434 |
Method of manufacturing a semiconductor device |
Oct. 16, 2007 |
| 7271101 |
High density plasma chemical vapor deposition process |
Sep. 18, 2007 |
| 7259102 |
Etching technique to planarize a multi-layer structure |
Aug. 21, 2007 |
| 7255801 |
Deep submicron CMOS compatible suspending inductor |
Aug. 14, 2007 |
| 7241679 |
Method of manufacturing semiconductor device |
Jul. 10, 2007 |
| 7238609 |
Method for fabricating semiconductor device |
Jul. 3, 2007 |
| 7211517 |
Semiconductor device and method that includes reverse tapering multiple layers |
May. 1, 2007 |
| 7199053 |
Method for detecting end-point of chemical mechanical polishing process |
Apr. 3, 2007 |
| 7195927 |
Process for making magnetic memory structures having different-sized memory cell layers |
Mar. 27, 2007 |
| 7186650 |
Control of bottom dimension of tapered contact via variation(s) of etch process |
Mar. 6, 2007 |
| 7183217 |
Dry-etching method |
Feb. 27, 2007 |
| 7172971 |
Semiconductor device having a contact window including a lower with a wider to provide a lower contact resistance |
Feb. 6, 2007 |
| 7174072 |
Optical device having optical waveguide and method for manufacturing the same |
Feb. 6, 2007 |
| 7169711 |
Method of using carbon spacers for critical dimension (CD) reduction |
Jan. 30, 2007 |
| 7125791 |
Advanced copper damascene structure |
Oct. 24, 2006 |
| 7122476 |
Method for fabricating semiconductor device by forming trenches in different depths at a cellregion and a peripheral region for reducing self aligned source resistance at the cell region |
Oct. 17, 2006 |
| 7118933 |
Method for manufacturing optical bench, optical bench, optical module, silicon wafer substrate in which wiring and groove are formed, and wafer |
Oct. 10, 2006 |
| 7109120 |
Profiled standoff structure and method for optical display package |
Sep. 19, 2006 |
| 7098115 |
Semiconductor device and method of manufacturing the same |
Aug. 29, 2006 |
| 7084065 |
Method for fabricating a semiconductor device |
Aug. 1, 2006 |
| 7078279 |
Manufacturing method of a thin film transistor array substrate |
Jul. 18, 2006 |
| 7078346 |
High density plasma chemical vapor deposition process |
Jul. 18, 2006 |
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