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Class Information
Number: 438/701
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Formation of groove or trench > Tapered configuration
Description: Processes wherein the viahole or trench is formed so as to possess nonparallel sides.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12

Patent Number Title Of Patent Date Issued
8703609 Through-substrate via for semiconductor device Apr. 22, 2014
8685861 Integrated circuit system with contact distribution film Apr. 1, 2014
8658539 Fin profile structure and method of making same Feb. 25, 2014
8623770 Method for sidewall spacer line doubling using atomic layer deposition of a titanium oxide Jan. 7, 2014
8619833 Broad area laser having an epitaxial stack of layers and method for the production thereof Dec. 31, 2013
8575705 Semiconductor devices including MOS transistors having an optimized channel region and methods of fabricating the same Nov. 5, 2013
8574447 Inorganic rapid alternating process for silicon etch Nov. 5, 2013
8563381 Method for manufacturing a power semiconductor device Oct. 22, 2013
8557706 Substrate processing method Oct. 15, 2013
8512582 Methods of patterning a substrate Aug. 20, 2013
8501570 Method of manufacturing source/drain structures Aug. 6, 2013
8481401 Component having a through-contact Jul. 9, 2013
8461050 Taper-etching method and method of manufacturing near-field light generator Jun. 11, 2013
8450166 Method of fabricating semiconductor devices May. 28, 2013
8450167 Method of fabricating semiconductor devices May. 28, 2013
8445381 Oxide-nitride stack gate dielectric May. 21, 2013
8440538 Method of manufacturing airbridge May. 14, 2013
8435812 Method for making solar cell May. 7, 2013
8435900 Method for manufacturing a transistor May. 7, 2013
8426314 Method for forming semiconductor device Apr. 23, 2013
8424175 Process for fabricating piezoelectrically actuated ultrananocrystalline diamond tip array integrated with ferroelectric or phase change media for high-density memory Apr. 23, 2013
8404503 Method for making light emitting diode Mar. 26, 2013
8404504 Method for making light emitting diode Mar. 26, 2013
8394718 Methods of forming self-aligned through silicon via Mar. 12, 2013
8377728 Method for making light emitting diode Feb. 19, 2013
8372513 Transparent substrate comprising an antireflection coating Feb. 12, 2013
8334212 Method of manufacturing a semiconductor device Dec. 18, 2012
8309973 Silicon-based sub-mount for an opto-electronic device Nov. 13, 2012
8298961 Patterns of semiconductor device and method of forming the same Oct. 30, 2012
8298952 Isolation structure and formation method thereof Oct. 30, 2012
8241993 Method for shallow trench isolation Aug. 14, 2012
8236698 Method for forming non-aligned microcavities of different depths Aug. 7, 2012
8211769 Method for forming junctions of vertical cells in semiconductor device Jul. 3, 2012
8211804 Methods of forming a hole having a vertical profile and semiconductor devices having a vertical hole Jul. 3, 2012
8197705 Method of processing silicon substrate and method of manufacturing liquid discharge head Jun. 12, 2012
8173472 Semiconductor sensor and manufacturing method of sensor body for semiconductor sensor May. 8, 2012
8168465 Three-dimensional semiconductor template for making high efficiency thin-film solar cells May. 1, 2012
8138093 Method for forming trenches having different widths and the same depth Mar. 20, 2012
8129248 Method of producing bipolar transistor structures in a semiconductor process Mar. 6, 2012
8120059 Nitride semiconductor substrate and method of fabricating the same Feb. 21, 2012
8120140 Isolation structure and formation method thereof Feb. 21, 2012
8105949 Substrate processing method Jan. 31, 2012
8105950 Method for forming fine patterns using etching slope of hard mask layer in semiconductor device Jan. 31, 2012
8101447 Light emitting diode element and method for fabricating the same Jan. 24, 2012
8101524 Technique for enhancing the fill capabilities in an electrochemical deposition process by edge rounding of trenches Jan. 24, 2012
8062972 Semiconductor process Nov. 22, 2011
8062951 Method to increase effective MOSFET width Nov. 22, 2011
8058177 Winged vias to increase overlay margin Nov. 15, 2011
8043932 Method of fabricating semiconductor device Oct. 25, 2011
8043973 Mask overhang reduction or elimination after substrate etch Oct. 25, 2011

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