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Class Information
Number: 438/700
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Formation of groove or trench
Description: Processes wherein at least one groove or trench is formed by a combination of chemical etching and material deposition.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618893 |
Methods of forming a layer for barrier applications in an interconnect structure |
Nov. 17, 2009 |
| 7615849 |
Semiconductor device and manufacturing method thereof |
Nov. 10, 2009 |
| 7615493 |
Method for forming alignment mark |
Nov. 10, 2009 |
| 7615164 |
Plasma etching methods and contact opening forming methods |
Nov. 10, 2009 |
| 7608545 |
Semiconductor device |
Oct. 27, 2009 |
| 7608195 |
High aspect ratio contacts |
Oct. 27, 2009 |
| 7605085 |
Method of manufacturing interconnecting structure with vias |
Oct. 20, 2009 |
| 7605075 |
Multilayer circuit board and method of manufacturing the same |
Oct. 20, 2009 |
| 7605071 |
Controlling lateral distribution of air gaps in interconnects |
Oct. 20, 2009 |
| 7605049 |
Optical semiconductor device and manufacturing method for same |
Oct. 20, 2009 |
| 7601641 |
Two step optical planarizing layer etch |
Oct. 13, 2009 |
| 7601621 |
Method of forming surface irregularities and method of manufacturing gallium nitride-based light emitting diode |
Oct. 13, 2009 |
| 7601603 |
Method for manufacturing semiconductor device |
Oct. 13, 2009 |
| 7601583 |
Transistor structure of memory device and method for fabricating the same |
Oct. 13, 2009 |
| 7598174 |
Feature patterning methods |
Oct. 6, 2009 |
| 7595254 |
Method of manufacturing a semiconductor device |
Sep. 29, 2009 |
| 7592263 |
Method of manufacturing semiconductor device |
Sep. 22, 2009 |
| 7591071 |
Manufacturing Method of Semiconductive Element and Ink Jet Head Substrate |
Sep. 22, 2009 |
| 7588996 |
Oxide pattern forming method and patterning method of semiconductor device |
Sep. 15, 2009 |
| 7588657 |
Pattern-free method of making line gratings |
Sep. 15, 2009 |
| 7585778 |
Method of etching an organic low-k dielectric material |
Sep. 8, 2009 |
| 7585765 |
Formation of oxidation-resistant seed layer for interconnect applications |
Sep. 8, 2009 |
| 7582567 |
Method for forming CMOS device with self-aligned contacts and region formed using salicide process |
Sep. 1, 2009 |
| 7582566 |
Method for redirecting void diffusion away from vias in an integrated circuit design |
Sep. 1, 2009 |
| 7582560 |
Method for fabricating semiconductor device |
Sep. 1, 2009 |
| 7582532 |
Method for fabricating semiconductor device |
Sep. 1, 2009 |
| 7579273 |
Method of manufacturing a photodiode array with through-wafer vias |
Aug. 25, 2009 |
| 7576002 |
Multi-step barrier deposition method |
Aug. 18, 2009 |
| 7575984 |
Conductive hard mask to protect patterned features during trench etch |
Aug. 18, 2009 |
| 7572738 |
Crack stop trenches in multi-layered low-k semiconductor devices |
Aug. 11, 2009 |
| 7564133 |
Semiconductor device and method for fabricating the same |
Jul. 21, 2009 |
| 7563720 |
Boron doped shell for MEMS device |
Jul. 21, 2009 |
| 7563719 |
Dual damascene process |
Jul. 21, 2009 |
| 7560391 |
Forming of trenches or wells having different destinations in a semiconductor substrate |
Jul. 14, 2009 |
| 7560386 |
Method of manufacturing nonvolatile semiconductor memory device |
Jul. 14, 2009 |
| 7560385 |
Etching systems and processing gas specie modulation |
Jul. 14, 2009 |
| 7557043 |
Method of fabricating the stacked structure and damascene process |
Jul. 7, 2009 |
| 7557039 |
Method for fabricating contact hole of semiconductor device |
Jul. 7, 2009 |
| 7557002 |
Methods of forming transistor devices |
Jul. 7, 2009 |
| 7556970 |
Method of repairing damaged film having low dielectric constant, semiconductor device fabricating system and storage medium |
Jul. 7, 2009 |
| 7553764 |
Silicon wafer having through-wafer vias |
Jun. 30, 2009 |
| 7550389 |
Dual damascene method of forming a metal line of semiconductor device |
Jun. 23, 2009 |
| 7547639 |
Selective surface exposure, cleans and conditioning of the germanium film in a Ge photodetector |
Jun. 16, 2009 |
| 7547628 |
Method for manufacturing capacitor |
Jun. 16, 2009 |
| 7547605 |
Microelectronic device and a method for its manufacture |
Jun. 16, 2009 |
| 7541300 |
Silicon carbide semiconductor device and method for manufacturing the same |
Jun. 2, 2009 |
| 7541290 |
Methods of forming mask patterns on semiconductor wafers that compensate for nonuniform center-to-edge etch rates during photolithographic processing |
Jun. 2, 2009 |
| 7541288 |
Methods of forming integrated circuit structures using insulator deposition and insulator gap filling techniques |
Jun. 2, 2009 |
| 7541007 |
Microreactor and method of use to produce hydrogen by methanol reforming |
Jun. 2, 2009 |
| 7540968 |
Micro movable device and method of making the same using wet etching |
Jun. 2, 2009 |
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