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Class Information
Number: 438/700
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Formation of groove or trench
Description: Processes wherein at least one groove or trench is formed by a combination of chemical etching and material deposition.

Sub-classes under this class:

Class Number Class Name Patents
438/702 Plural coating steps 854
438/701 Tapered configuration 600

Patents under this class:

Patent Number Title Of Patent Date Issued
8709898 Fabrication method of semiconductor device and fabrication method of dynamic threshold transistor Apr. 29, 2014
8703570 Methods of fabricating substrates Apr. 22, 2014
8703509 Method for manufacturing a substrate for liquid-ejecting heads and a liquid-ejecting head Apr. 22, 2014
8691701 Strip with reduced low-K dielectric damage Apr. 8, 2014
8691698 Controlled gas mixing for smooth sidewall rapid alternating etch process Apr. 8, 2014
8691691 TSV pillar as an interconnecting structure Apr. 8, 2014
8685860 Semiconductor structure and manufacturing method thereof Apr. 1, 2014
8685853 Dual damascene copper process using a selected mask Apr. 1, 2014
8679922 Method of producing semiconductor device and method of producing solid-state image pickup device Mar. 25, 2014
8673785 Gas distribution system having fast gas switching capabilities Mar. 18, 2014
8673782 Methods of manufacturing NAND flash memory devices Mar. 18, 2014
8673673 Trench process and structure for backside contact solar cells with polysilicon doped regions Mar. 18, 2014
8668835 Method of etching self-aligned vias and trenches in a multi-layer film stack Mar. 11, 2014
8668833 Method of forming a nanostructure Mar. 11, 2014
8664117 Method for manufacturing semiconductor device using anisotropic etching Mar. 4, 2014
8658538 Method of fabricating memory device Feb. 25, 2014
8658537 Mask manufacturing method for nanoimprinting Feb. 25, 2014
8653665 Barrier layer, film forming method, and processing system Feb. 18, 2014
8653483 Mask manufacturing device Feb. 18, 2014
8652968 Method of manufacturing a semiconductor device Feb. 18, 2014
8652342 Semiconductor fabrication apparatuses to perform semiconductor etching and deposition processes and methods of forming semiconductor device using the same Feb. 18, 2014
8652337 Self-formed nanometer channel at wafer scale Feb. 18, 2014
8647988 Memory device and method of fabricating the same Feb. 11, 2014
8647961 Method for filling cavities in wafers, correspondingly filled blind hole and wafer having correspondingly filled insulation trenches Feb. 11, 2014
8647945 Method of forming substrate contact for semiconductor on insulator (SOI) substrate Feb. 11, 2014
8642475 Integrated circuit system with reduced polysilicon residue and method of manufacture thereof Feb. 4, 2014
8642474 Spacer lithography Feb. 4, 2014
8641914 Methods of improving long range order in self-assembly of block copolymer films with ionic liquids Feb. 4, 2014
8633580 Integrated void fill for through silicon via Jan. 21, 2014
8633116 Dry etching method Jan. 21, 2014
8633112 Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preference Jan. 21, 2014
8633105 Method of fabricating a self-aligning damascene memory structure Jan. 21, 2014
8629040 Methods for epitaxially growing active regions between STI regions Jan. 14, 2014
8623771 Method for fabricating micropattern of semiconductor device Jan. 7, 2014
8623769 Through hole forming method, nozzle plate and MEMS device Jan. 7, 2014
8619833 Broad area laser having an epitaxial stack of layers and method for the production thereof Dec. 31, 2013
8618668 Semiconductor contact barrier Dec. 31, 2013
8618602 Semiconductor device and method of forming the same Dec. 31, 2013
8617996 Fin removal method Dec. 31, 2013
8614148 Methods for forming fine patterns of a semiconductor device Dec. 24, 2013
8609543 Method for manufacturing semiconductor device having multi-layered hard mask layer Dec. 17, 2013
8609537 Integrated void fill for through silicon via Dec. 17, 2013
8609533 Methods for fabricating integrated circuits having substrate contacts and integrated circuits having substrate contacts Dec. 17, 2013
8609491 Method for fabricating semiconductor device with buried bit lines Dec. 17, 2013
8603918 Semiconductor devices and methods of manufacture thereof Dec. 10, 2013
8598689 Methods of manufacturing semiconductor structures and devices including nanotubes, and semiconductor structures, devices, and systems fabricated using such methods Dec. 3, 2013
8585910 Process of making a microtube and microfluidic devices formed therewith Nov. 19, 2013
8580126 Piezoelectric vibrating pieces comprising edge mesa steps, and methods for manufacturing same Nov. 12, 2013
8575026 Method of protecting sidewall surfaces of a semiconductor substrate Nov. 5, 2013
8568604 CMOS gate structures fabricated by selective oxidation Oct. 29, 2013

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