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Class Information
Number: 438/7
Name: Semiconductor device manufacturing: process > Including control responsive to sensed condition > Optical characteristic sensed
Description: Process wherein the sensed condition is an optical property of the device or an optical property of the process.

Sub-classes under this class:

Class Number Class Name Patents
438/8 Chemical etching 313

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11

Patent Number Title Of Patent Date Issued
8712571 Method and apparatus for wireless transmission of diagnostic information Apr. 29, 2014
8669123 Method of and device for determining and controlling the distance between an integrated circuit and a substrate Mar. 11, 2014
8652971 Cavity process etch undercut monitor Feb. 18, 2014
8647892 Inline process control structures Feb. 11, 2014
8628982 Method of depositing and inspecting an organic light emitting display panel Jan. 14, 2014
8618610 Dummy pattern design for thermal annealing Dec. 31, 2013
8609442 Vapor deposition method, vapor deposition device and organic EL display device Dec. 17, 2013
8602838 Chemical mechanical polishing method and system Dec. 10, 2013
8580584 System and method for increasing productivity of organic light emitting diode material screening Nov. 12, 2013
8574933 Fabrication method of semiconductor device Nov. 5, 2013
8557611 Manufacturing method of semiconductor device, exposure method, and exposure apparatus Oct. 15, 2013
8557041 Method for manufacturing P-I-N microcrystalline silicon structure for thin-film solar cells Oct. 15, 2013
8551791 Apparatus and method for manufacturing semiconductor devices through layer material dimension analysis Oct. 8, 2013
8551792 Dicing a semiconductor wafer Oct. 8, 2013
8552470 Self-powered integrated circuit with multi-junction photovoltaic cell Oct. 8, 2013
8546760 Apparatus and method for checking thickness dimensions of an element while it is being machined Oct. 1, 2013
8545669 Sensor array for measuring plasma characteristics in plasma processing environments Oct. 1, 2013
8530883 Manufacture of quantum dot-enabled solid-state light emitters Sep. 10, 2013
8518721 Dopant marker for precise recess control Aug. 27, 2013
8519456 Solid-state image pickup device, image pickup apparatus including the same, and method of manufacturing the same Aug. 27, 2013
8497150 Method for defect isolation of thin-film solar cell Jul. 30, 2013
8487208 Laser beam irradiation apparatus and laser working machine Jul. 16, 2013
8486761 Hybrid combination of substrate and carrier mounted light emitting devices Jul. 16, 2013
8486725 Color control by alteration of wavelenght converting element Jul. 16, 2013
8486724 Wafer level reflector for LED packaging Jul. 16, 2013
8481340 Method for preparing a light-emitting device using gas cluster ion beam processing Jul. 9, 2013
8476091 Methods of selectively applying luminous material to light emitting devices based on measured output thereof Jul. 2, 2013
8460945 Method for monitoring status of system components Jun. 11, 2013
8445906 Method for sorting and acquiring semiconductor element, method for producing semiconductor device, and semiconductor device May. 21, 2013
8440473 Use of spectrum to synchronize RF switching with gas switching during etch May. 14, 2013
8435803 Method for depositing microcrystalline silicon and monitor device of plasma enhanced deposition May. 7, 2013
8426223 Wafer edge inspection Apr. 23, 2013
8420498 Alignment method of chips Apr. 16, 2013
8420410 Techniques providing fiducial markers for failure analysis Apr. 16, 2013
8398725 Light exposure apparatus and manufacturing method of semiconductor device using the same Mar. 19, 2013
8399263 Method for measuring expansion/contraction, method for processing substrate, method for producing device, apparatus for measuring expansion/contraction, and apparatus for processing substrate Mar. 19, 2013
8399264 Alignment inspection Mar. 19, 2013
8399808 Systems and methods for forming a time-averaged line image Mar. 19, 2013
8394708 Assembly of quasicrystalline photonic heterostructures Mar. 12, 2013
8377721 Substrate processing system and method Feb. 19, 2013
8372296 Manufacturing method for a thermal head Feb. 12, 2013
8367433 Fabrication method of semiconductor device Feb. 5, 2013
8361819 Methods of fabricating a light-emitting device Jan. 29, 2013
8361818 Method of forming optical sensor Jan. 29, 2013
8357558 Method of making semiconductor light-emitting device Jan. 22, 2013
8350305 Solid-state imaging device and camera Jan. 8, 2013
8319301 Self-aligned filter for an image sensor Nov. 27, 2012
8309371 System and method for creating a flat wavefront using a photonic crystal Nov. 13, 2012
8304261 Thermal treatment apparatus, thermal treatment method and method of manufacturing semiconductor device Nov. 6, 2012
8298837 System and method for increasing productivity of organic light emitting diode material screening Oct. 30, 2012

1 2 3 4 5 6 7 8 9 10 11

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