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Class Information
Number: 438/699
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Planarization by etching and coating > Plural coating steps
Description: Processes having multiple material deposition steps are utilized in the planarization of the surface.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7616291 |
Lithographic processing cell and device manufacturing method |
Nov. 10, 2009 |
| 7615480 |
Methods of post-contact back end of the line through-hole via integration |
Nov. 10, 2009 |
| 7507669 |
Gap tuning for surface micromachined structures in an epitaxial reactor |
Mar. 24, 2009 |
| 7462504 |
Surface-emitting type light-emitting diode and fabrication method thereof |
Dec. 9, 2008 |
| 7435683 |
Apparatus and method for selectively recessing spacers on multi-gate devices |
Oct. 14, 2008 |
| 7432120 |
Method for realizing a hosting structure of nanometric elements |
Oct. 7, 2008 |
| 7425508 |
Liquid crystal display device and fabricating method thereof, and thin film patterning method applied thereto |
Sep. 16, 2008 |
| 7410863 |
Methods of forming and using memory cell structures |
Aug. 12, 2008 |
| 7390743 |
Methods for forming a structured tungsten layer and forming a semiconductor device using the same |
Jun. 24, 2008 |
| 7384799 |
Method to avoid amorphous-si damage during wet stripping processes in the manufacture of MEMS devices |
Jun. 10, 2008 |
| 7375012 |
Method of forming multilayer film |
May. 20, 2008 |
| 7300886 |
Interlayer dielectric for charge loss improvement |
Nov. 27, 2007 |
| 7268075 |
Method to reduce the copper line roughness for increased electrical conductivity of narrow interconnects (<100nm) |
Sep. 11, 2007 |
| 7247569 |
Ultra-thin Si MOSFET device structure and method of manufacture |
Jul. 24, 2007 |
| 7180706 |
Magnetic heads and semiconductor devices and surface planarization processes for the fabrication thereof |
Feb. 20, 2007 |
| 7179757 |
Replenishment of surface carbon and surface passivation of low-k porous silicon-based dielectric materials |
Feb. 20, 2007 |
| 7112458 |
Method of forming a liquid crystal display |
Sep. 26, 2006 |
| 7084059 |
CMP system for metal deposition |
Aug. 1, 2006 |
| 7078312 |
Method for controlling etch process repeatability |
Jul. 18, 2006 |
| 7033930 |
Interconnect structures in a semiconductor device and processes of formation |
Apr. 25, 2006 |
| 7022579 |
Method for filling via with metal |
Apr. 4, 2006 |
| 7009811 |
Surface planarization processes for the fabrication of magnetic heads and semiconductor devices |
Mar. 7, 2006 |
| 6979649 |
Fabrication method of semiconductor integrated circuit device |
Dec. 27, 2005 |
| 6972259 |
Method for forming openings in low dielectric constant material layer |
Dec. 6, 2005 |
| 6943118 |
Method of fabricating flash memory |
Sep. 13, 2005 |
| 6924238 |
Edge peeling improvement of low-k dielectric materials stack by adjusting EBR resistance |
Aug. 2, 2005 |
| 6921718 |
Semiconductor device and method of manufacturing the same |
Jul. 26, 2005 |
| 6913993 |
Chemical-mechanical polishing method |
Jul. 5, 2005 |
| 6905975 |
Methods of forming patterned compositions |
Jun. 14, 2005 |
| 6884724 |
Method for dishing reduction and feature passivation in polishing processes |
Apr. 26, 2005 |
| 6872664 |
Dual gate nitride process |
Mar. 29, 2005 |
| 6867139 |
Method of manufacturing semiconductor device |
Mar. 15, 2005 |
| 6864179 |
Semiconductor memory device having COB structure and method of fabricating the same |
Mar. 8, 2005 |
| 6855634 |
Polishing method and polishing apparatus |
Feb. 15, 2005 |
| 6833232 |
Micro-pattern forming method for semiconductor device |
Dec. 21, 2004 |
| 6821872 |
Method of making a bit line contact device |
Nov. 23, 2004 |
| 6812115 |
Method of filling an opening in a material layer with an insulating material |
Nov. 2, 2004 |
| 6809032 |
Method and apparatus for detecting the endpoint of a chemical-mechanical polishing operation using optical techniques |
Oct. 26, 2004 |
| 6784077 |
Shallow trench isolation process |
Aug. 31, 2004 |
| 6780774 |
Method of semiconductor device isolation |
Aug. 24, 2004 |
| 6774045 |
Residual halogen reduction with microwave stripper |
Aug. 10, 2004 |
| 6774042 |
Planarization method for deep sub micron shallow trench isolation process |
Aug. 10, 2004 |
| 6759319 |
Residue-free solder bumping process |
Jul. 6, 2004 |
| 6750148 |
Method of manufacturing wireless suspension blank |
Jun. 15, 2004 |
| 6746960 |
Electronic techniques for analyte detection |
Jun. 8, 2004 |
| 6746888 |
Display and fabricating method thereof |
Jun. 8, 2004 |
| 6734105 |
Method for forming silicon quantum dots and method for fabricating nonvolatile memory device using the same |
May. 11, 2004 |
| 6730603 |
System and method of determining a polishing endpoint by monitoring signal intensity |
May. 4, 2004 |
| 6716769 |
Use of a plasma source to form a layer during the formation of a semiconductor device |
Apr. 6, 2004 |
| 6706635 |
Innovative method to build a high precision analog capacitor with low voltage coefficient and hysteresis |
Mar. 16, 2004 |
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