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Class Information
Number: 438/699
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Planarization by etching and coating > Plural coating steps
Description: Processes having multiple material deposition steps are utilized in the planarization of the surface.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8664079 Method of fabricating semiconductor device by thinning hardmask layers on frontside and backside of substrate Mar. 4, 2014
8658536 Selective fin cut process Feb. 25, 2014
8652968 Method of manufacturing a semiconductor device Feb. 18, 2014
8647987 Method for improving uniformity of chemical-mechanical planarization process Feb. 11, 2014
8647989 Method of forming opening on semiconductor substrate Feb. 11, 2014
8513131 Fin field effect transistor with variable channel thickness for threshold voltage tuning Aug. 20, 2013
8470714 Method of forming fin structures in integrated circuits Jun. 25, 2013
8435900 Method for manufacturing a transistor May. 7, 2013
8399774 Substrate for suspension Mar. 19, 2013
8372513 Transparent substrate comprising an antireflection coating Feb. 12, 2013
8338291 Producing transistor including multiple reentrant profiles Dec. 25, 2012
8304347 Actuating transistor including multiple reentrant profiles Nov. 6, 2012
8288271 Method for reworking antireflective coating over semiconductor substrate Oct. 16, 2012
8282847 Photoresist double patterning Oct. 9, 2012
8227350 Controlling diamond film surfaces and layering Jul. 24, 2012
8216944 Methods of forming patterns in semiconductor devices Jul. 10, 2012
8183152 Method of fabricating semiconductor device May. 22, 2012
8173548 Reverse planarization method May. 8, 2012
8143137 Method of fabricating semiconductor device by thinning hardmask layers on frontside and backside of substrate Mar. 27, 2012
8097811 Substrate for suspension Jan. 17, 2012
8039389 Semiconductor device having an organic anti-reflective coating (ARC) and method therefor Oct. 18, 2011
8030217 Simplified pitch doubling process flow Oct. 4, 2011
8017464 Semiconductor integrated circuit device and a method for manufacturing a semiconductor integrated circuit device Sep. 13, 2011
8008205 Methods for producing a semiconductor device having planarization films Aug. 30, 2011
7998868 Self-aligned masks using multi-temperature phase-change materials Aug. 16, 2011
7985684 Actuating transistor including reduced channel length Jul. 26, 2011
7968468 Substrate treatment apparatus and substrate treatment method Jun. 28, 2011
7947569 Method for producing a semiconductor including a foreign material layer May. 24, 2011
7915064 Processing for overcoming extreme topography Mar. 29, 2011
7911001 Methods for forming self-aligned dual stress liners for CMOS semiconductor devices Mar. 22, 2011
7902074 Simplified pitch doubling process flow Mar. 8, 2011
7879645 Fill-in etching free pore device Feb. 1, 2011
7879643 Memory cell with memory element contacting an inverted T-shaped bottom electrode Feb. 1, 2011
7867902 Methods of forming a contact structure Jan. 11, 2011
7863196 Self-aligned dielectric cap Jan. 4, 2011
7855148 Methods of isolating array features during pitch doubling processes and semiconductor device structures having isolated array features Dec. 21, 2010
7846756 Nanoimprint enhanced resist spacer patterning method Dec. 7, 2010
7833872 Uniform recess of a material in a trench independent of incoming topography Nov. 16, 2010
7799690 Method for fabricating semiconductor integrated circuit device Sep. 21, 2010
7772122 Sidewall forming processes Aug. 10, 2010
7759261 Method for producing layers located on a hybrid circuit Jul. 20, 2010
7745343 Method for fabricating semiconductor device with fuse element Jun. 29, 2010
7709390 Methods of isolating array features during pitch doubling processes and semiconductor device structures having isolated array features May. 4, 2010
7678651 Method for fabricating semiconductor device Mar. 16, 2010
7679149 Method of removing refractory metal layers and of siliciding contact areas Mar. 16, 2010
7670925 Semiconductor device, method of manufacturing same, and apparatus for designing same Mar. 2, 2010
7616291 Lithographic processing cell and device manufacturing method Nov. 10, 2009
7615480 Methods of post-contact back end of the line through-hole via integration Nov. 10, 2009
7507669 Gap tuning for surface micromachined structures in an epitaxial reactor Mar. 24, 2009
7462504 Surface-emitting type light-emitting diode and fabrication method thereof Dec. 9, 2008

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