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Class Information
Number: 438/698
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Planarization by etching and coating > Utilizing reflow
Description: Processes wherein the planarization method requires decreasing the viscosity of a layer residing on the substrate in order to fluidize the same.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8685848 Manufacturing method of silicon carbide semiconductor device Apr. 1, 2014
8664125 Highly selective spacer etch process with reduced sidewall spacer slimming Mar. 4, 2014
8629065 Growth of planar non-polar {10-10} M-plane gallium nitride with hydride vapor phase epitaxy (HVPE) Jan. 14, 2014
8597427 Method of manufacturing a semiconductor device Dec. 3, 2013
8546269 Top-down nanowire thinning processes Oct. 1, 2013
8524555 Susceptor with backside area of constant emissivity Sep. 3, 2013
8466067 Post-planarization densification Jun. 18, 2013
8446736 Circuit board and manufacturing method thereof May. 21, 2013
8404538 Device with self aligned stressor and method of making same Mar. 26, 2013
8361869 Method for manufacturing suspended fin and gate-all-around field effect transistor Jan. 29, 2013
8329587 Post-planarization densification Dec. 11, 2012
8298942 Method for forming electric vias Oct. 30, 2012
8202806 Method to avoid threshold voltage shift in thicker dielectric films Jun. 19, 2012
8187968 Methods of post-contact back end of line through-hole via integration May. 29, 2012
8124431 Nitride semiconductor laser device and method of producing the same Feb. 28, 2012
8119475 Method of forming gate of semiconductor device Feb. 21, 2012
8080466 Method for growth of nitrogen face (N-face) polarity compound nitride semiconductor device with integrated processing system Dec. 20, 2011
8058102 Package structure and manufacturing method thereof Nov. 15, 2011
8058175 Method for planarization of wafer and method for formation of isolation structure in top metal layer Nov. 15, 2011
8048697 Method for manufacturing an LCD device employing a reduced number of photomasks including bottom and top gate type devices Nov. 1, 2011
7998868 Self-aligned masks using multi-temperature phase-change materials Aug. 16, 2011
7977245 Methods for etching a dielectric barrier layer with high selectivity Jul. 12, 2011
7955983 Defect reduction of non-polar and semi-polar III-nitrides with sidewall lateral epitaxial overgrowth (SLEO) Jun. 7, 2011
7947589 FinFET formation with a thermal oxide spacer hard mask formed from crystalline silicon layer May. 24, 2011
7910482 Method of forming a finFET and structure Mar. 22, 2011
7897515 Method of fabricating structures Mar. 1, 2011
7882626 Method of manufacturing wiring board having a semiconductor thereon Feb. 8, 2011
7842528 Method for manufacturing an LCD device employing a reduced number of photomasks Nov. 30, 2010
7838427 Method for planarization Nov. 23, 2010
7816160 Manufacturing method for semiconductor device Oct. 19, 2010
7790618 Selective slurry for chemical mechanical polishing Sep. 7, 2010
7776748 Selective-redeposition structures for calibrating a plasma process Aug. 17, 2010
7727895 Substrate processing system and substrate processing method Jun. 1, 2010
7723148 Method for manufacturing image sensor May. 25, 2010
7696096 Self-aligned masks using multi-temperature phase-change materials Apr. 13, 2010
7575995 Method of forming fine metal pattern and method of forming metal line using the same Aug. 18, 2009
7544621 Method of removing a metal silicide layer on a gate electrode in a semiconductor manufacturing process and etching method Jun. 9, 2009
7507618 Method for making electronic devices using metal oxide nanoparticles Mar. 24, 2009
7479455 Method for manufacturing semiconductor wafer Jan. 20, 2009
7410863 Methods of forming and using memory cell structures Aug. 12, 2008
7357873 Polymide thin film self-assembly process Apr. 15, 2008
7348278 Method of making nitride-based compound semiconductor crystal and substrate Mar. 25, 2008
7335255 Manufacturing method of semiconductor device Feb. 26, 2008
7264976 Advance ridge structure for microlens gapless approach Sep. 4, 2007
7226865 Process for forming pattern and method for producing liquid crystal display apparatus Jun. 5, 2007
7192867 Protection of low-k dielectric in a passivation level Mar. 20, 2007
7176087 Methods of forming electrical connections Feb. 13, 2007
7144817 Etching solutions and processes for manufacturing flexible wiring boards Dec. 5, 2006
7060623 Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern Jun. 13, 2006
7053407 Liquid crystal display device and method for manufacturing the same May. 30, 2006

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