Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Browse by Category: Main > Engineering
Class Information
Number: 438/697
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Planarization by etching and coating
Description: Processes wherein at least one surface of the semiconductor substrate is leveled through a combination of chemical etching and material deposition.










Sub-classes under this class:

Class Number Class Name Patents
438/699 Plural coating steps 453
438/698 Utilizing reflow 149


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11

Patent Number Title Of Patent Date Issued
5904566 Reactive ion etch method for forming vias through nitrogenated silicon oxide layers May. 18, 1999
5888905 Integrated circuit insulator and method Mar. 30, 1999
5885899 Method of chemically mechanically polishing an electronic component using a non-selective ammonium hydroxide slurry Mar. 23, 1999
5885900 Method of global planarization in fabricating integrated circuit devices Mar. 23, 1999
5882985 Reduction of field oxide step height during semiconductor fabrication Mar. 16, 1999
5883004 Method of planarization using interlayer dielectric Mar. 16, 1999
5879866 Image recording process with improved image tolerances using embedded AR coatings Mar. 9, 1999
5879862 Method for planarizing a non planar layer Mar. 9, 1999
5872060 Semiconductor device manufacturing method Feb. 16, 1999
5863837 Method of manufacturing semiconductor device Jan. 26, 1999
5861102 Method for the flattening treatment of silicon single crystal surface Jan. 19, 1999
5861342 Optimized structures for dummy fill mask design Jan. 19, 1999
5858876 Simultaneous deposit and etch method for forming a void-free and gap-filling insulator layer upon a patterned substrate layer Jan. 12, 1999
5858882 In-situ low wafer temperature oxidized gas plasma surface treatment process Jan. 12, 1999
5858870 Methods for gap fill and planarization of intermetal dielectrics Jan. 12, 1999
5855811 Cleaning composition containing tetraalkylammonium salt and use thereof in semiconductor fabrication Jan. 5, 1999
5854125 Dummy fill patterns to improve interconnect planarity Dec. 29, 1998
5854133 Method for manufacturing a semiconductor device Dec. 29, 1998
5849637 Integration of spin-on gap filling dielectric with W-plug without outgassing Dec. 15, 1998
5850105 Substantially planar semiconductor topography using dielectrics and chemical mechanical polish Dec. 15, 1998
5846886 Metal film etching method Dec. 8, 1998
5840629 Copper chemical mechanical polishing slurry utilizing a chromate oxidant Nov. 24, 1998
5840619 Method of making a semiconductor device having a planarized surface Nov. 24, 1998
5837613 Enhanced planarization technique for an integrated circuit Nov. 17, 1998
5837612 Silicon chemical mechanical polish etch (CMP) stop for reduced trench fill erosion and method for formation Nov. 17, 1998
5833817 Method for improving conformity and contact bottom coverage of sputtered titanium nitride barrier layers Nov. 10, 1998
5827782 Multiple etch method for optimizing Inter-Metal Dielectric (IMD) spacer layer profile Oct. 27, 1998
5817571 Multilayer interlevel dielectrics using phosphorus-doped glass Oct. 6, 1998
5814236 Method for forming a ferroelectric spatial light modulator utilizing a planarization process Sep. 29, 1998
5811345 Planarization of shallow- trench- isolation without chemical mechanical polishing Sep. 22, 1998
5804514 Method of planarizing a film of a semiconductor device Sep. 8, 1998
5795825 Connection layer forming method Aug. 18, 1998
5792673 Monitoring of eching Aug. 11, 1998
5783490 Photolithography alignment mark and manufacturing method Jul. 21, 1998
5773367 High throughput planarization etch process for interlayer oxide films between metals and pre-metals Jun. 30, 1998
5763010 Thermal post-deposition treatment of halogen-doped films to improve film stability and reduce halogen migration to interconnect layers Jun. 9, 1998
5747381 Technique for the removal of residual spin-on-glass (SOG) after full SOG etchback May. 5, 1998
5736451 Method of forming planar isolation in integrated circuits Apr. 7, 1998
5731245 High aspect ratio low resistivity lines/vias with a tungsten-germanium alloy hard cap Mar. 24, 1998
5728507 Method for planarizing a semiconductor layer Mar. 17, 1998
5726099 Method of chemically mechanically polishing an electronic component using a non-selective ammonium persulfate slurry Mar. 10, 1998
5723387 Method and apparatus for forming very small scale Cu interconnect metallurgy on semiconductor substrates Mar. 3, 1998
5714417 Planarization process using artificial gravity Feb. 3, 1998
5681425 Teos plasma protection technology Oct. 28, 1997
5679211 Spin-on-glass etchback planarization process using an oxygen plasma to remove an etchback polymer residue Oct. 21, 1997
5674783 Method for improving the chemical-mechanical polish (CMP) uniformity of insulator layers Oct. 7, 1997
5665633 Process for forming a semiconductor device having field isolation Sep. 9, 1997
5656554 Semiconductor chip reclamation technique involving multiple planarization processes Aug. 12, 1997
5635022 Silicon oxide removal in semiconductor processing Jun. 3, 1997
5628869 Plasma enhanced chemical vapor reactor with shaped electrodes May. 13, 1997

1 2 3 4 5 6 7 8 9 10 11










 
 
  Recently Added Patents
Determining system for localization methods combination
Method and apparatus for detecting an intermittent path to a storage system
Managing method and apparatus for servicing contents provided by content provider
System and method for a driver circuit with a referenced control signal
Polishing composition
Protein purification
Inducement of organogenetic tolerance for pancreatic xenotransplant
  Randomly Featured Patents
Open loop bi-level ballast control
Impact printer with application of oblique print force
Concept matching
High efficiency single pass shredder-granulator
Message buffer full handling in a CAN device that employs reconfigurable message buffers
Brake force sensor
Modular flash memory card expansion system
Flying insect trap
Non-rotating paper path idler
Suture anchor device