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Class Information
Number: 438/697
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Planarization by etching and coating
Description: Processes wherein at least one surface of the semiconductor substrate is leveled through a combination of chemical etching and material deposition.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7368385 |
Method for producing a structure on the surface of a substrate |
May. 6, 2008 |
| 7361598 |
Method for fabricating semiconductor device capable of preventing scratch |
Apr. 22, 2008 |
| 7354530 |
Chemical mechanical polishing systems and methods for their use |
Apr. 8, 2008 |
| 7354527 |
Chemical mechanical polishing pad and chemical mechanical polishing process |
Apr. 8, 2008 |
| 7346981 |
Method for fabricating microelectromechanical system (MEMS) devices |
Mar. 25, 2008 |
| 7344906 |
Structure and method for releasing stressy metal films |
Mar. 18, 2008 |
| 7319076 |
Low resistance T-shaped ridge structure |
Jan. 15, 2008 |
| 7291561 |
MEMS device integrated chip package, and method of making same |
Nov. 6, 2007 |
| 7282451 |
Methods of forming integrated circuit devices having metal interconnect layers therein |
Oct. 16, 2007 |
| 7279425 |
Polishing method |
Oct. 9, 2007 |
| 7270758 |
Method to improve ability to perform CMP-assisted liftoff for trackwidth definition |
Sep. 18, 2007 |
| 7256100 |
Manufacturing method of semiconductor device having trench type element isolation |
Aug. 14, 2007 |
| 7232762 |
Method for forming an improved low power SRAM contact |
Jun. 19, 2007 |
| 7229926 |
Method of manufacturing nitride substrate for semiconductors, and nitride semiconductor substrate |
Jun. 12, 2007 |
| 7223698 |
Method of forming a semiconductor arrangement with reduced field-to active step height |
May. 29, 2007 |
| 7217631 |
Semiconductor device and method for fabricating the device |
May. 15, 2007 |
| 7196013 |
Capping layer for a semiconductor device and a method of fabrication |
Mar. 27, 2007 |
| 7186655 |
Method for manufacturing semiconductor device |
Mar. 6, 2007 |
| 7179746 |
Method of surface treatment for manufacturing semiconductor device |
Feb. 20, 2007 |
| 7179735 |
Method of manufacturing semiconductor device |
Feb. 20, 2007 |
| 7129177 |
Write head fabrication by inverting order of process steps |
Oct. 31, 2006 |
| 7112458 |
Method of forming a liquid crystal display |
Sep. 26, 2006 |
| 7109118 |
Electrochemical fabrication methods including use of surface treatments to reduce overplating and/or planarization during formation of multi-layer three-dimensional structures |
Sep. 19, 2006 |
| 7105448 |
Method for peeling off semiconductor element and method for manufacturing semiconductor device |
Sep. 12, 2006 |
| 7105452 |
Method of planarizing a semiconductor substrate with an etching chemistry |
Sep. 12, 2006 |
| 7087530 |
Aqueous dispersion for chemical mechanical polishing |
Aug. 8, 2006 |
| 7084059 |
CMP system for metal deposition |
Aug. 1, 2006 |
| 7081410 |
Controlling threading dislocation densities in Ge on Si using graded GeSi layers and planarization |
Jul. 25, 2006 |
| 7071107 |
Method for manufacturing a semiconductor device |
Jul. 4, 2006 |
| 7067329 |
Methods of forming ferroelectric memory devices |
Jun. 27, 2006 |
| 7060622 |
Method of forming dummy wafer |
Jun. 13, 2006 |
| 7056832 |
Deep trench self-alignment process for an active area of a partial vertical cell |
Jun. 6, 2006 |
| 7045450 |
Method of manufacturing semiconductor device |
May. 16, 2006 |
| 7022608 |
Method and composition for the removal of residual materials during substrate planarization |
Apr. 4, 2006 |
| 7008876 |
Method of forming gate electrode structure of a semiconductor device |
Mar. 7, 2006 |
| 7008870 |
Structure applied to a photolithographic process and method for fabricating a semiconductor device |
Mar. 7, 2006 |
| 7005334 |
Zero threshold voltage pFET and method of making same |
Feb. 28, 2006 |
| 6979649 |
Fabrication method of semiconductor integrated circuit device |
Dec. 27, 2005 |
| 6969683 |
Method of preventing resist poisoning in dual damascene structures |
Nov. 29, 2005 |
| 6964924 |
Integrated circuit process monitoring and metrology system |
Nov. 15, 2005 |
| 6949392 |
Integrated optical circuit with dense planarized cladding layer |
Sep. 27, 2005 |
| 6939786 |
Method of manufacturing a semiconductor device having self-aligned contacts |
Sep. 6, 2005 |
| 6936541 |
Method for planarizing metal interconnects |
Aug. 30, 2005 |
| 6936544 |
Method of removing metal etching residues following a metal etchback process to improve a CMP process |
Aug. 30, 2005 |
| 6927160 |
Fabrication of copper-containing region such as electrical interconnect |
Aug. 9, 2005 |
| 6924238 |
Edge peeling improvement of low-k dielectric materials stack by adjusting EBR resistance |
Aug. 2, 2005 |
| 6921695 |
Etching method for forming a square cornered polysilicon wordline electrode |
Jul. 26, 2005 |
| 6916743 |
Semiconductor device and method for manufacturing thereof |
Jul. 12, 2005 |
| 6913993 |
Chemical-mechanical polishing method |
Jul. 5, 2005 |
| 6913997 |
Method of using tantalum-aluminum-nitrogen material as diffusion barrier and adhesion layer in semiconductor devices |
Jul. 5, 2005 |
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