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Class Information
Number: 438/697
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Planarization by etching and coating
Description: Processes wherein at least one surface of the semiconductor substrate is leveled through a combination of chemical etching and material deposition.










Sub-classes under this class:

Class Number Class Name Patents
438/699 Plural coating steps 453
438/698 Utilizing reflow 149


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11

Patent Number Title Of Patent Date Issued
8691699 Manufacturing method of semiconductor device and semiconductor device Apr. 8, 2014
8685850 System and method of plating conductive gate contacts on metal gates for self-aligned contact interconnections Apr. 1, 2014
8664119 Semiconductor device manufacturing method Mar. 4, 2014
8647987 Method for improving uniformity of chemical-mechanical planarization process Feb. 11, 2014
8603846 Processing for overcoming extreme topography Dec. 10, 2013
8551888 Method of forming patterns for semiconductor device Oct. 8, 2013
8551886 CMP process for processing STI on two distinct silicon planes Oct. 8, 2013
8530355 Mixed orientation semiconductor device and method Sep. 10, 2013
8524587 Non-uniformity reduction in semiconductor planarization Sep. 3, 2013
8524606 Chemical mechanical planarization with overburden mask Sep. 3, 2013
8513131 Fin field effect transistor with variable channel thickness for threshold voltage tuning Aug. 20, 2013
8466067 Post-planarization densification Jun. 18, 2013
8445386 Smoothing method for semiconductor material and wafers produced by same May. 21, 2013
8435900 Method for manufacturing a transistor May. 7, 2013
8415253 Low-temperature in-situ removal of oxide from a silicon surface during CMOS epitaxial processing Apr. 9, 2013
8404593 Semiconductor devices including interlayer conductive contacts and methods of forming the same Mar. 26, 2013
8394721 Method for obtaining a layout design for an existing integrated circuit Mar. 12, 2013
8394282 Adaptive nanotopography sculpting Mar. 12, 2013
8383516 Semiconductor device and method for manufacturing the same Feb. 26, 2013
8377769 Method for integrating replacement gate in semiconductor device Feb. 19, 2013
8367534 Non-uniformity reduction in semiconductor planarization Feb. 5, 2013
8361832 Contact for memory cell Jan. 29, 2013
8338198 Method of peeling thin film device and method of manufacturing semiconductor device using peeled thin film device Dec. 25, 2012
8329587 Post-planarization densification Dec. 11, 2012
8279444 Chips for surface plasmon (SPR) detection Oct. 2, 2012
8264088 Planarized passivation layer for semiconductor devices Sep. 11, 2012
8242487 Anode for an organic electronic device Aug. 14, 2012
8227351 Fabrication of magnetic tunnel junction (MTJ) devices with reduced surface roughness for magnetic random access memory (MRAM) Jul. 24, 2012
8222147 Semiconductor device with stop layers and fabrication method using ceria slurry Jul. 17, 2012
8216900 Nonvolatile memory device, method of manufacturing the nonvolatile memory device, and method of manufacturing flat panel display device provided with the nonvolatile memory device Jul. 10, 2012
8216946 Patterning method Jul. 10, 2012
8173548 Reverse planarization method May. 8, 2012
8163646 Interconnection wiring structure of a semiconductor device and method for manufacturing same Apr. 24, 2012
8153528 Surface characteristics of graphite and graphite foils Apr. 10, 2012
8153501 Maskless selective boron-doped epitaxial growth Apr. 10, 2012
8143163 Method for forming pattern of semiconductor device Mar. 27, 2012
8143137 Method of fabricating semiconductor device by thinning hardmask layers on frontside and backside of substrate Mar. 27, 2012
8129242 Method of manufacturing a memory device Mar. 6, 2012
8124512 Methods of forming integrated circuit devices having different gate electrode cross sections Feb. 28, 2012
8080464 Methods for processing silicon on insulator wafers Dec. 20, 2011
8058175 Method for planarization of wafer and method for formation of isolation structure in top metal layer Nov. 15, 2011
8039203 Integrated circuits and methods of design and manufacture thereof Oct. 18, 2011
8032856 Method and system for designing semiconductor integrated circuit providing dummy pattern in divided layout region Oct. 4, 2011
8003539 Integrated assist features for epitaxial growth Aug. 23, 2011
7998831 Planarized passivation layer for semiconductor devices Aug. 16, 2011
7989349 Methods of manufacturing nanotubes having controlled characteristics Aug. 2, 2011
7985687 System and method for improving reliability in a semiconductor device Jul. 26, 2011
7955982 Method for smoothing wafer surface and apparatus used therefor Jun. 7, 2011
7951706 Method of manufacturing metal interconnection May. 31, 2011
7923372 Method for fabricating semiconductor device Apr. 12, 2011

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