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Class Information
Number: 438/696
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Coating of sidewall
Description: Processes wherein the chemical etching and material deposition is affected so that only vertically disposed surfaces remain coated with the deposited material.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7018551 |
Pull-back method of forming fins in FinFets |
Mar. 28, 2006 |
| 7005375 |
Method to avoid copper contamination of a via or dual damascene structure |
Feb. 28, 2006 |
| 7001784 |
Method to control spacer width |
Feb. 21, 2006 |
| 6998348 |
Method for manufacturing electronic circuits integrated on a semiconductor substrate |
Feb. 14, 2006 |
| 6984858 |
Semiconductor device and manufacturing method thereof |
Jan. 10, 2006 |
| 6967165 |
Method for fabricating multilayer interconnect and method for checking the same |
Nov. 22, 2005 |
| 6960529 |
Methods for sidewall protection of metal interconnect for unlanded vias using physical vapor deposition |
Nov. 1, 2005 |
| 6960527 |
Method for fabricating non-volatile memory device having sidewall gate structure and SONOS cell structure |
Nov. 1, 2005 |
| 6960530 |
Method of reducing the aspect ratio of a trench |
Nov. 1, 2005 |
| 6953744 |
Methods of fabricating integrated circuit devices providing improved short prevention |
Oct. 11, 2005 |
| 6951809 |
Method for manufacturing semiconductor device |
Oct. 4, 2005 |
| 6951821 |
Processing system and method for chemically treating a substrate |
Oct. 4, 2005 |
| 6949467 |
Forming method of contact in semiconductor device and manufacturing method of PMOS device using the same |
Sep. 27, 2005 |
| 6946359 |
Method for fabricating trench isolations with high aspect ratio |
Sep. 20, 2005 |
| 6943118 |
Method of fabricating flash memory |
Sep. 13, 2005 |
| 6943119 |
Flash process for stacking poly etching |
Sep. 13, 2005 |
| 6936383 |
Method of defining the dimensions of circuit elements by using spacer deposition techniques |
Aug. 30, 2005 |
| 6933236 |
Method for forming pattern using argon fluoride photolithography |
Aug. 23, 2005 |
| 6924221 |
Integrated process flow to improve copper filling in a damascene structure |
Aug. 2, 2005 |
| 6924237 |
Method for manufacturing semiconductor integrated circuit device |
Aug. 2, 2005 |
| 6921695 |
Etching method for forming a square cornered polysilicon wordline electrode |
Jul. 26, 2005 |
| 6916743 |
Semiconductor device and method for manufacturing thereof |
Jul. 12, 2005 |
| 6913871 |
Fabricating sub-resolution structures in planar lightwave devices |
Jul. 5, 2005 |
| 6913976 |
Method of manufacturing semiconductor device |
Jul. 5, 2005 |
| 6913962 |
Manufacturing method of semiconductor device and semiconductor device |
Jul. 5, 2005 |
| 6911156 |
Methods for fabricating MRAM device structures |
Jun. 28, 2005 |
| 6908839 |
Method of producing an imaging device |
Jun. 21, 2005 |
| 6893893 |
Method of preventing short circuits in magnetic film stacks |
May. 17, 2005 |
| 6887802 |
Method of manufacturing semiconductor device and semiconductor device |
May. 3, 2005 |
| 6887785 |
Etching openings of different depths using a single mask layer method and structure |
May. 3, 2005 |
| 6887395 |
Method of forming sub-micron-size structures over a substrate |
May. 3, 2005 |
| 6881351 |
Methods for contacting conducting layers overlying magnetoelectronic elements of MRAM devices |
Apr. 19, 2005 |
| 6872647 |
Method for forming multiple fins in a semiconductor device |
Mar. 29, 2005 |
| 6872663 |
Method for reworking a multi-layer photoresist following an underlayer development |
Mar. 29, 2005 |
| 6867139 |
Method of manufacturing semiconductor device |
Mar. 15, 2005 |
| 6855602 |
Method for forming a box shaped polygate |
Feb. 15, 2005 |
| 6852595 |
Method of manufacturing a flash memory cell |
Feb. 8, 2005 |
| 6852597 |
Method for fabricating power semiconductor device having trench gate structure |
Feb. 8, 2005 |
| 6849551 |
Method for forming isolation region in semiconductor device |
Feb. 1, 2005 |
| 6849550 |
Method for manufacturing semiconductor device |
Feb. 1, 2005 |
| 6841452 |
Method of forming device isolation trench |
Jan. 11, 2005 |
| 6838362 |
Process for manufacturing a through insulated interconnection in a body of semiconductor material |
Jan. 4, 2005 |
| 6835640 |
Method of forming a novel composite insulator spacer |
Dec. 28, 2004 |
| 6835663 |
Hardmask of amorphous carbon-hydrogen (a-C:H) layers with tunable etch resistivity |
Dec. 28, 2004 |
| 6833327 |
Method of fabraicating semiconductor device |
Dec. 21, 2004 |
| 6833292 |
Reducing dopant losses during annealing processes |
Dec. 21, 2004 |
| 6833079 |
Method of etching a shaped cavity |
Dec. 21, 2004 |
| 6828238 |
Methods of forming openings extending through electrically insulative material to electrically conductive material |
Dec. 7, 2004 |
| 6828186 |
Vertical sidewall profile spacer layer and method for fabrication thereof |
Dec. 7, 2004 |
| 6825121 |
Method of manufacturing a capacitor of a semiconductor device |
Nov. 30, 2004 |
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