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Class Information
Number: 438/696
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step > Coating of sidewall
Description: Processes wherein the chemical etching and material deposition is affected so that only vertically disposed surfaces remain coated with the deposited material.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7368385 |
Method for producing a structure on the surface of a substrate |
May. 6, 2008 |
| 7354523 |
Methods for sidewall etching and etching during filling of a trench |
Apr. 8, 2008 |
| 7332439 |
Metal gate transistors with epitaxial source and drain regions |
Feb. 19, 2008 |
| 7326651 |
Method for forming damascene structure utilizing planarizing material coupled with compressive diffusion barrier material |
Feb. 5, 2008 |
| 7311850 |
Method of forming patterned thin film and method of fabricating micro device |
Dec. 25, 2007 |
| 7294580 |
Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition |
Nov. 13, 2007 |
| 7291563 |
Method of etching a substrate; method of forming a feature on a substrate; and method of depositing a layer comprising silicon, carbon, and fluorine onto a semiconductor substrate |
Nov. 6, 2007 |
| 7282450 |
Sidewall coverage for copper damascene filling |
Oct. 16, 2007 |
| 7276447 |
Plasma dielectric etch process including ex-situ backside polymer removal for low-dielectric constant material |
Oct. 2, 2007 |
| 7259098 |
Methods for fabricating semiconductor devices |
Aug. 21, 2007 |
| 7250371 |
Reduction of feature critical dimensions |
Jul. 31, 2007 |
| 7238619 |
Method for eliminating bridging defect in via first dual damascene process |
Jul. 3, 2007 |
| 7235489 |
Device and method to eliminate shorting induced by via to metal misalignment |
Jun. 26, 2007 |
| 7232762 |
Method for forming an improved low power SRAM contact |
Jun. 19, 2007 |
| 7226852 |
Preventing damage to low-k materials during resist stripping |
Jun. 5, 2007 |
| 7223657 |
Methods of fabricating flash memory devices with floating gates that have reduced seams |
May. 29, 2007 |
| 7217625 |
Method of fabricating a semiconductor device having a shallow source/drain region |
May. 15, 2007 |
| 7208418 |
Sealing sidewall pores in low-k dielectrics |
Apr. 24, 2007 |
| 7192871 |
Semiconductor device with a line and method of fabrication thereof |
Mar. 20, 2007 |
| 7189652 |
Selective oxidation of gate stack |
Mar. 13, 2007 |
| 7179757 |
Replenishment of surface carbon and surface passivation of low-k porous silicon-based dielectric materials |
Feb. 20, 2007 |
| 7175777 |
Method of forming a sub-micron tip feature |
Feb. 13, 2007 |
| 7176137 |
Method for multiple spacer width control |
Feb. 13, 2007 |
| 7169677 |
Method for producing a spacer structure |
Jan. 30, 2007 |
| 7169669 |
Method of making thin silicon sheets for solar cells |
Jan. 30, 2007 |
| 7166232 |
Method for producing a solid body including a microstructure |
Jan. 23, 2007 |
| 7141514 |
Selective plasma re-oxidation process using pulsed RF source power |
Nov. 28, 2006 |
| 7141485 |
Shallow trench isolation structure with low sidewall capacitance for high speed integrated circuits |
Nov. 28, 2006 |
| 7132134 |
Staggered in-situ deposition and etching of a dielectric layer for HDP CVD |
Nov. 7, 2006 |
| 7132368 |
Method for repairing plasma damage after spacer formation for integrated circuit devices |
Nov. 7, 2006 |
| 7129176 |
Optical device having micro lens array and method for manufacturing the same |
Oct. 31, 2006 |
| 7125805 |
Method of semiconductor fabrication incorporating disposable spacer into elevated source/drain processing |
Oct. 24, 2006 |
| 7112531 |
Silicon oxide co-deposition/etching process |
Sep. 26, 2006 |
| 7109080 |
Method of forming capacitor over bitline contact |
Sep. 19, 2006 |
| 7105451 |
Method for manufacturing semiconductor device |
Sep. 12, 2006 |
| 7078347 |
Method for forming MOS transistors with improved sidewall structures |
Jul. 18, 2006 |
| 7071108 |
Chemical mechanical polishing slurry containing abrasive particles exhibiting photocatalytic function |
Jul. 4, 2006 |
| 7071111 |
Sealed nitride layer for integrated circuits |
Jul. 4, 2006 |
| 7064022 |
Method of forming merged FET inverter/logic gate |
Jun. 20, 2006 |
| 7064071 |
Method of forming a conformal spacer adjacent to a gate electrode structure |
Jun. 20, 2006 |
| 7052617 |
Simplified etching technique for producing multiple undercut profiles |
May. 30, 2006 |
| 7045450 |
Method of manufacturing semiconductor device |
May. 16, 2006 |
| 7041601 |
Method of manufacturing metal gate MOSFET with strained channel |
May. 9, 2006 |
| 7033948 |
Method for reducing dimensions between patterns on a photoresist |
Apr. 25, 2006 |
| 7033944 |
Dual damascene process |
Apr. 25, 2006 |
| 7029937 |
Semiconductor device and method of manufacturing the same, circuit board, and electronic instrument |
Apr. 18, 2006 |
| 7030022 |
Method of manufacturing semiconductor device having metal interconnections of different thickness |
Apr. 18, 2006 |
| 7018551 |
Pull-back method of forming fins in FinFets |
Mar. 28, 2006 |
| 7005375 |
Method to avoid copper contamination of a via or dual damascene structure |
Feb. 28, 2006 |
| 7001784 |
Method to control spacer width |
Feb. 21, 2006 |
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