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Class Information
Number: 438/694
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step
Description: Processes additionally having a step of depositing a material onto the semiconductive substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6875703 |
Method for forming quadruple density sidewall image transfer (SIT) structures |
Apr. 5, 2005 |
| 6872663 |
Method for reworking a multi-layer photoresist following an underlayer development |
Mar. 29, 2005 |
| 6869892 |
Method of oxidizing work pieces and oxidation system |
Mar. 22, 2005 |
| 6869880 |
In situ application of etch back for improved deposition into high-aspect-ratio features |
Mar. 22, 2005 |
| 6867139 |
Method of manufacturing semiconductor device |
Mar. 15, 2005 |
| 6864177 |
Method for manufacturing metal line contact plug of semiconductor device |
Mar. 8, 2005 |
| 6864179 |
Semiconductor memory device having COB structure and method of fabricating the same |
Mar. 8, 2005 |
| 6861758 |
Structure and manufacturing process of localized shunt to reduce electromigration failure of copper dual damascene process |
Mar. 1, 2005 |
| 6858452 |
Method for isolating self-aligned contact pads |
Feb. 22, 2005 |
| 6858541 |
Etch stop control for MEMS device formation |
Feb. 22, 2005 |
| 6855636 |
Electrode fabrication methods for organic electroluminscent devices |
Feb. 15, 2005 |
| 6855602 |
Method for forming a box shaped polygate |
Feb. 15, 2005 |
| 6852617 |
Semiconductor device fabrication method |
Feb. 8, 2005 |
| 6852634 |
Low cost method of providing a semiconductor device having a high channel density |
Feb. 8, 2005 |
| 6852630 |
Electroetching process and system |
Feb. 8, 2005 |
| 6849550 |
Method for manufacturing semiconductor device |
Feb. 1, 2005 |
| 6849553 |
Method of manufacturing semiconductor device |
Feb. 1, 2005 |
| 6849551 |
Method for forming isolation region in semiconductor device |
Feb. 1, 2005 |
| 6849552 |
Vertical type transistor and method for fabricating the same |
Feb. 1, 2005 |
| 6847092 |
Microelectronic capacitor structure with radial current flow |
Jan. 25, 2005 |
| 6846424 |
Plasma-assisted dry etching of noble metal-based materials |
Jan. 25, 2005 |
| 6844262 |
CMP process |
Jan. 18, 2005 |
| 6844237 |
Method for improving dielectric polishing |
Jan. 18, 2005 |
| 6830877 |
Method for forming via and contact holes with deep UV photoresist |
Dec. 14, 2004 |
| 6831014 |
Method of manufacturing a semiconductor apparatus using chemical mechanical polishing |
Dec. 14, 2004 |
| 6831017 |
Catalyst patterning for nanowire devices |
Dec. 14, 2004 |
| 6825122 |
Method for fabricating a patterned thin film and a micro device |
Nov. 30, 2004 |
| 6825049 |
Method and system for field assisted statistical assembly of wafers |
Nov. 30, 2004 |
| 6825121 |
Method of manufacturing a capacitor of a semiconductor device |
Nov. 30, 2004 |
| 6825123 |
Method for treating semiconductor processing components and components formed thereby |
Nov. 30, 2004 |
| 6821896 |
Method to eliminate via poison effect |
Nov. 23, 2004 |
| 6821898 |
Method of forming a multi-layer microfluidic device |
Nov. 23, 2004 |
| 6818995 |
Semiconductor device and method of manufacturing the same |
Nov. 16, 2004 |
| 6818502 |
Method for forming capacitor |
Nov. 16, 2004 |
| 6818558 |
Method of manufacturing a dielectric layer for a silicon-oxide-nitride-oxide-silicon (SONOS) type devices |
Nov. 16, 2004 |
| 6815696 |
Beam stop for use in an ion implantation system |
Nov. 9, 2004 |
| 6815355 |
Method of integrating L-shaped spacers in a high performance CMOS process via use of an oxide-nitride-doped oxide spacer |
Nov. 9, 2004 |
| 6815356 |
Method for forming bottle trench |
Nov. 9, 2004 |
| 6811448 |
Pre-cleaning for silicidation in an SMOS process |
Nov. 2, 2004 |
| 6812149 |
Method of forming junction isolation to isolate active elements |
Nov. 2, 2004 |
| 6812148 |
Preventing gate oxice thinning effect in a recess LOCOS process |
Nov. 2, 2004 |
| 6809033 |
Innovative method of hard mask removal |
Oct. 26, 2004 |
| 6809032 |
Method and apparatus for detecting the endpoint of a chemical-mechanical polishing operation using optical techniques |
Oct. 26, 2004 |
| 6806194 |
Apparatus and methods for processing a workpiece |
Oct. 19, 2004 |
| 6806195 |
Manufacturing method of semiconductor IC device |
Oct. 19, 2004 |
| 6803314 |
Double-layered low dielectric constant dielectric dual damascene method |
Oct. 12, 2004 |
| 6803315 |
Method for blocking implants from the gate of an electronic device via planarizing films |
Oct. 12, 2004 |
| 6803317 |
Method of making a vertical gate semiconductor device |
Oct. 12, 2004 |
| 6800557 |
Process for manufacturing semiconductor integrated circuit device |
Oct. 5, 2004 |
| 6799713 |
Flip-chip bonding structure and method for making the same |
Oct. 5, 2004 |
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