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Class Information
Number: 438/694
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step
Description: Processes additionally having a step of depositing a material onto the semiconductive substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6972259 |
Method for forming openings in low dielectric constant material layer |
Dec. 6, 2005 |
| 6969682 |
Single workpiece processing system |
Nov. 29, 2005 |
| 6960527 |
Method for fabricating non-volatile memory device having sidewall gate structure and SONOS cell structure |
Nov. 1, 2005 |
| 6953751 |
Micro device and process for producing it |
Oct. 11, 2005 |
| 6951821 |
Processing system and method for chemically treating a substrate |
Oct. 4, 2005 |
| 6951818 |
Method of manufacturing an electronic device |
Oct. 4, 2005 |
| 6949472 |
Method for high kinetic energy plasma barrier deposition |
Sep. 27, 2005 |
| 6949467 |
Forming method of contact in semiconductor device and manufacturing method of PMOS device using the same |
Sep. 27, 2005 |
| 6946398 |
Method for fabricating a micro machine |
Sep. 20, 2005 |
| 6943119 |
Flash process for stacking poly etching |
Sep. 13, 2005 |
| 6943118 |
Method of fabricating flash memory |
Sep. 13, 2005 |
| 6943117 |
UV nanoimprint lithography process using elementwise embossed stamp and selectively additive pressurization |
Sep. 13, 2005 |
| 6943116 |
Method for fabricating a p-channel field-effect transistor on a semiconductor substrate |
Sep. 13, 2005 |
| 6936541 |
Method for planarizing metal interconnects |
Aug. 30, 2005 |
| 6933235 |
Method for removing contaminants on a substrate |
Aug. 23, 2005 |
| 6933218 |
Low temperature nitridation of amorphous high-K metal-oxide in inter-gates insulator stack |
Aug. 23, 2005 |
| 6930046 |
Single workpiece processing system |
Aug. 16, 2005 |
| 6930027 |
Method of manufacturing a semiconductor component |
Aug. 16, 2005 |
| 6930054 |
Slurry composition for use in chemical mechanical polishing of metal wiring |
Aug. 16, 2005 |
| 6927169 |
Method and apparatus to improve thickness uniformity of surfaces for integrated device manufacturing |
Aug. 9, 2005 |
| 6927171 |
Piezoresistive device and manufacturing processes of this device |
Aug. 9, 2005 |
| 6924191 |
Method for fabricating a gate structure of a field effect transistor |
Aug. 2, 2005 |
| 6921708 |
Integrated circuits having low resistivity contacts and the formation thereof using an in situ plasma doping and clean |
Jul. 26, 2005 |
| 6916744 |
Method and apparatus for planarization of a material by growing a sacrificial film with customized thickness profile |
Jul. 12, 2005 |
| 6916743 |
Semiconductor device and method for manufacturing thereof |
Jul. 12, 2005 |
| 6914003 |
Method for manufacturing magnetic random access memory |
Jul. 5, 2005 |
| 6914000 |
Polishing method, polishing system and process-managing system |
Jul. 5, 2005 |
| 6913993 |
Chemical-mechanical polishing method |
Jul. 5, 2005 |
| 6911346 |
Method of etching a magnetic material |
Jun. 28, 2005 |
| 6908861 |
Method for imprint lithography using an electric field |
Jun. 21, 2005 |
| 6909625 |
Method to produce data cell region and system region for semiconductor memory |
Jun. 21, 2005 |
| 6905949 |
Semiconductor apparatus fabrication method forming a resist pattern, a film over the resist, and reflowing the resist |
Jun. 14, 2005 |
| 6905975 |
Methods of forming patterned compositions |
Jun. 14, 2005 |
| 6902656 |
Fabrication of microstructures with vacuum-sealed cavity |
Jun. 7, 2005 |
| 6903031 |
In-situ-etch-assisted HDP deposition using SiF4 and hydrogen |
Jun. 7, 2005 |
| 6900125 |
Method of manufacturing a semiconductor device including a multi-layer interconnect structure |
May. 31, 2005 |
| 6900132 |
Single workpiece processing system |
May. 31, 2005 |
| 6900134 |
Method for forming openings in a substrate using bottom antireflective coatings |
May. 31, 2005 |
| 6897138 |
Method and apparatus for producing group III nitride compound semiconductor |
May. 24, 2005 |
| 6893968 |
Defect-minimizing, topology-independent planarization of process surfaces in semiconductor devices |
May. 17, 2005 |
| 6893967 |
L-shaped spacer incorporating or patterned using amorphous carbon or CVD organic materials |
May. 17, 2005 |
| 6892432 |
Nanotube cartridge and a method for manufacturing the same |
May. 17, 2005 |
| 6890858 |
Methods of forming materials over uneven surface topologies, and methods of forming insulative materials over and between conductive lines |
May. 10, 2005 |
| 6884729 |
Global planarization method |
Apr. 26, 2005 |
| 6884727 |
Semiconductor fabrication process for modifying the profiles of patterned features |
Apr. 26, 2005 |
| 6884726 |
Method for handling a thin silicon wafer |
Apr. 26, 2005 |
| 6881677 |
Method for making a micro-fluid ejection device |
Apr. 19, 2005 |
| 6878633 |
Flip-chip structure and method for high quality inductors and transformers |
Apr. 12, 2005 |
| 6878632 |
Semiconductor device having a conductive layer with a cobalt tungsten phosphorus coating and a manufacturing method thereof |
Apr. 12, 2005 |
| 6878417 |
Method of molecular-scale pattern imprinting at surfaces |
Apr. 12, 2005 |
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