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Class Information
Number: 438/694
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step
Description: Processes additionally having a step of depositing a material onto the semiconductive substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7615497 |
Forming fine pattern of semiconductor device using three mask layers and CMP of spin-on carbon layer |
Nov. 10, 2009 |
| 7608539 |
ALD method and apparatus |
Oct. 27, 2009 |
| 7598176 |
Method for photoresist stripping and treatment of low-k dielectric material |
Oct. 6, 2009 |
| 7591071 |
Manufacturing Method of Semiconductive Element and Ink Jet Head Substrate |
Sep. 22, 2009 |
| 7580279 |
Flash memory cells with reduced distances between cell elements |
Aug. 25, 2009 |
| 7576009 |
Method for forming fine pattern of semiconductor device |
Aug. 18, 2009 |
| 7576008 |
Method for forming buried contact electrode of semiconductor device having pn junction and optoelectronic semiconductor device using the same |
Aug. 18, 2009 |
| 7569403 |
Pattern evaluation method, manufacturing method of semiconductor device, correction method of mask pattern and manufacturing method of exposure mask |
Aug. 4, 2009 |
| 7563702 |
Method for fabricating semiconductor device |
Jul. 21, 2009 |
| 7560389 |
Method for fabricating semiconductor element |
Jul. 14, 2009 |
| 7560376 |
Method for adjoining adjacent coatings on a processing element |
Jul. 14, 2009 |
| 7557025 |
Method of etching a dielectric layer to form a contact hole and a via hole and damascene method |
Jul. 7, 2009 |
| 7556994 |
Normally-off integrated JFET power switches in wide bandgap semiconductors and methods of making |
Jul. 7, 2009 |
| 7556989 |
Semiconductor device having fuse pattern and methods of fabricating the same |
Jul. 7, 2009 |
| 7547601 |
Low power electrically alterable nonvolatile memory cells and arrays |
Jun. 16, 2009 |
| 7544619 |
Method of fabricating semiconductor device |
Jun. 9, 2009 |
| 7541288 |
Methods of forming integrated circuit structures using insulator deposition and insulator gap filling techniques |
Jun. 2, 2009 |
| 7540968 |
Micro movable device and method of making the same using wet etching |
Jun. 2, 2009 |
| 7528075 |
Self-masking defect removing method |
May. 5, 2009 |
| 7524750 |
Integrated process modulation (IPM) a novel solution for gapfill with HDP-CVD |
Apr. 28, 2009 |
| 7521365 |
Selective epitaxy process with alternating gas supply |
Apr. 21, 2009 |
| 7514013 |
Devices with thermoelectric and thermodiodic characteristics and methods for manufacturing same |
Apr. 7, 2009 |
| 7514364 |
Hydrophilicity treatment method of a silicon wafer |
Apr. 7, 2009 |
| 7514361 |
Selective thin metal cap process |
Apr. 7, 2009 |
| 7504338 |
Method of pattern etching a silicon-containing hard mask |
Mar. 17, 2009 |
| 7501069 |
Flexible structures for sensors and electronics |
Mar. 10, 2009 |
| 7497959 |
Methods and structures for protecting one area while processing another area on a chip |
Mar. 3, 2009 |
| 7494921 |
Aluminum metal line of a semiconductor device and method of fabricating the same |
Feb. 24, 2009 |
| 7494929 |
Automatic gain control |
Feb. 24, 2009 |
| 7491343 |
Line end shortening reduction during etch |
Feb. 17, 2009 |
| 7488611 |
Devices and methods for integrated circuit manufacturing |
Feb. 10, 2009 |
| 7476621 |
Halogen-free noble gas assisted H.sub.2 plasma etch process in deposition-etch-deposition gap fill |
Jan. 13, 2009 |
| 7476622 |
Method of forming a contact in a semiconductor device |
Jan. 13, 2009 |
| 7476618 |
Selective formation of metal layers in an integrated circuit |
Jan. 13, 2009 |
| 7473645 |
Method of depositing a layer comprising silicon, carbon, and fluorine onto a semiconductor substrate |
Jan. 6, 2009 |
| 7459266 |
Phase-change memory cell and method of fabricating the phase-change memory cell |
Dec. 2, 2008 |
| 7459699 |
Method of determining processing position in charged particle beam apparatus, and infrared microscope used in the method |
Dec. 2, 2008 |
| 7459399 |
Method for manufacturing probe structure of probe card |
Dec. 2, 2008 |
| 7459363 |
Line edge roughness reduction |
Dec. 2, 2008 |
| 7452826 |
Oxidation method and oxidation system |
Nov. 18, 2008 |
| 7445726 |
Photoresist trimming process |
Nov. 4, 2008 |
| 7446041 |
Full sequence metal and barrier layer electrochemical mechanical processing |
Nov. 4, 2008 |
| 7442624 |
Deep alignment marks on edge chips for subsequent alignment of opaque layers |
Oct. 28, 2008 |
| 7442647 |
Structure and method for formation of cladded interconnects for MRAMs |
Oct. 28, 2008 |
| 7439143 |
Flash memory device and method of manufacturing the same |
Oct. 21, 2008 |
| 7439087 |
Semiconductor device and manufacturing method thereof |
Oct. 21, 2008 |
| 7439184 |
Method of making comb-teeth electrode pair |
Oct. 21, 2008 |
| 7435683 |
Apparatus and method for selectively recessing spacers on multi-gate devices |
Oct. 14, 2008 |
| 7432206 |
Self-aligned manufacturing method, and manufacturing method for thin film fuse phase change ram |
Oct. 7, 2008 |
| 7432120 |
Method for realizing a hosting structure of nanometric elements |
Oct. 7, 2008 |
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