 |
|
 |
| |
 |
|
Class Information
Number: 438/694
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step
Description: Processes additionally having a step of depositing a material onto the semiconductive substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7371627 |
Memory array with ultra-thin etched pillar surround gate access transistors and buried data/bit lines |
May. 13, 2008 |
| 7371684 |
Process for preparing electronics structures using a sacrificial multilayer hardmask scheme |
May. 13, 2008 |
| 7368390 |
Photolithographic patterning process using a carbon hard mask layer of diamond-like hardness produced by a plasma-enhanced deposition process |
May. 6, 2008 |
| 7368391 |
Methods for designing carrier substrates with raised terminals |
May. 6, 2008 |
| 7361599 |
Integrated circuit and method |
Apr. 22, 2008 |
| 7361588 |
Etch process for CD reduction of arc material |
Apr. 22, 2008 |
| 7358190 |
Methods of filling gaps by deposition on materials having different deposition rates |
Apr. 15, 2008 |
| 7354522 |
Substrate etching method for forming connected features |
Apr. 8, 2008 |
| 7354786 |
Sensor element with trenched cavity |
Apr. 8, 2008 |
| 7351664 |
Methods for minimizing mask undercuts and notches for plasma processing system |
Apr. 1, 2008 |
| 7351666 |
Layout and process to contact sub-lithographic structures |
Apr. 1, 2008 |
| 7346981 |
Method for fabricating microelectromechanical system (MEMS) devices |
Mar. 25, 2008 |
| 7341949 |
Process for forming lead-free bump on electronic component |
Mar. 11, 2008 |
| 7341931 |
Methods of forming low resistivity contact for an integrated circuit device |
Mar. 11, 2008 |
| 7335593 |
Method of fabricating semiconductor device |
Feb. 26, 2008 |
| 7326651 |
Method for forming damascene structure utilizing planarizing material coupled with compressive diffusion barrier material |
Feb. 5, 2008 |
| 7319066 |
Semiconductor device and method for fabricating the same |
Jan. 15, 2008 |
| 7314832 |
Low temperature texturing layer to enhance adhesion of subsequent layers |
Jan. 1, 2008 |
| 7312155 |
Forming self-aligned nano-electrodes |
Dec. 25, 2007 |
| 7303994 |
Process for interfacial adhesion in laminate structures through patterned roughing of a surface |
Dec. 4, 2007 |
| 7300882 |
Etching method and semiconductor device fabricating method |
Nov. 27, 2007 |
| 7294577 |
Method of manufacturing a silicide layer |
Nov. 13, 2007 |
| 7294579 |
Method for forming contact opening |
Nov. 13, 2007 |
| 7291560 |
Method of production pitch fractionizations in semiconductor technology |
Nov. 6, 2007 |
| 7291559 |
Etching method, gate etching method, and method of manufacturing semiconductor devices |
Nov. 6, 2007 |
| 7291563 |
Method of etching a substrate; method of forming a feature on a substrate; and method of depositing a layer comprising silicon, carbon, and fluorine onto a semiconductor substrate |
Nov. 6, 2007 |
| 7288483 |
Method and system for patterning a dielectric film |
Oct. 30, 2007 |
| 7288476 |
Controlled dry etch of a film |
Oct. 30, 2007 |
| 7282439 |
Anti-reflective coating doped with carbon for use in integrated circuit technology and method of formation |
Oct. 16, 2007 |
| 7279109 |
Method for manufacturing a photonic device and a photonic device |
Oct. 9, 2007 |
| 7279349 |
Semiconductor optical device and manufacturing method thereof |
Oct. 9, 2007 |
| 7276445 |
Method for forming pattern using printing method |
Oct. 2, 2007 |
| 7276447 |
Plasma dielectric etch process including ex-situ backside polymer removal for low-dielectric constant material |
Oct. 2, 2007 |
| 7273565 |
Method for manufacturing a photonic device and a photonic device |
Sep. 25, 2007 |
| 7271098 |
Method of fabricating a desired pattern of electronically functional material |
Sep. 18, 2007 |
| 7268081 |
Wafer-level transfer of membranes with gas-phase etching and wet etching methods |
Sep. 11, 2007 |
| 7262071 |
Micromechanical component and suitable method for its manufacture |
Aug. 28, 2007 |
| 7262136 |
Modified facet etch to prevent blown gate oxide and increase etch chamber life |
Aug. 28, 2007 |
| 7262501 |
Large-area nanoenabled macroelectronic substrates and uses therefor |
Aug. 28, 2007 |
| 7256127 |
Air gap formation |
Aug. 14, 2007 |
| 7256135 |
Etching method and computer storage medium storing program for controlling same |
Aug. 14, 2007 |
| 7253114 |
Self-aligned method for defining a semiconductor gate oxide in high voltage device area |
Aug. 7, 2007 |
| 7250370 |
Two step post-deposition treatment of ILD layer for a lower dielectric constant and improved mechanical properties |
Jul. 31, 2007 |
| 7247568 |
Method for manufacturing a transparent element with invisible electrodes |
Jul. 24, 2007 |
| 7244679 |
Methods of forming silicon quantum dots and methods of fabricating semiconductor memory devices using the same |
Jul. 17, 2007 |
| 7244635 |
Semiconductor device and method of manufacturing the same |
Jul. 17, 2007 |
| 7232762 |
Method for forming an improved low power SRAM contact |
Jun. 19, 2007 |
| 7226873 |
Method of improving via filling uniformity in isolated and dense via-pattern regions |
Jun. 5, 2007 |
| 7226869 |
Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing |
Jun. 5, 2007 |
| 7226852 |
Preventing damage to low-k materials during resist stripping |
Jun. 5, 2007 |
|
|
|
 |
|
 |
|
| |
Randomly Featured Patents |
|
