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Class Information
Number: 438/694
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with coating step
Description: Processes additionally having a step of depositing a material onto the semiconductive substrate.










Sub-classes under this class:

Class Number Class Name Patents
438/696 Coating of sidewall 748
438/700 Formation of groove or trench 1,832
438/697 Planarization by etching and coating 513
438/703 Plural coating steps 607
438/695 Simultaneous etching and coating 527


Patents under this class:

Patent Number Title Of Patent Date Issued
8709866 Methods of forming integrated circuit packages Apr. 29, 2014
8709267 Double patterning method using tilt-angle deposition Apr. 29, 2014
8691701 Strip with reduced low-K dielectric damage Apr. 8, 2014
8691698 Controlled gas mixing for smooth sidewall rapid alternating etch process Apr. 8, 2014
8691696 Methods for forming an integrated circuit with straightened recess profile Apr. 8, 2014
8691659 Method for forming void-free dielectric layer Apr. 8, 2014
8685858 Formation of metal nanospheres and microspheres Apr. 1, 2014
8685844 Sub-10 nm graphene nanoribbon lattices Apr. 1, 2014
8680586 Semiconductor light emitting device including GaAs substrate and method for manufacturing the same Mar. 25, 2014
8679982 Selective suppression of dry-etch rate of materials containing both silicon and oxygen Mar. 25, 2014
8679981 Method for self-aligned doubled patterning lithography Mar. 25, 2014
8673785 Gas distribution system having fast gas switching capabilities Mar. 18, 2014
8673778 Tungsten film forming method Mar. 18, 2014
8673702 Field shield dielectric as a mask during semiconductor ink jet printing Mar. 18, 2014
8671878 Profile and CD uniformity control by plasma oxidation treatment Mar. 18, 2014
8669185 Method of tailoring conformality of Si-containing film Mar. 11, 2014
8668835 Method of etching self-aligned vias and trenches in a multi-layer film stack Mar. 11, 2014
8664699 Methods and devices for fabricating and assembling printable semiconductor elements Mar. 4, 2014
8664119 Semiconductor device manufacturing method Mar. 4, 2014
8664022 Submount for light emitting diode and method for fabricating the same Mar. 4, 2014
8652342 Semiconductor fabrication apparatuses to perform semiconductor etching and deposition processes and methods of forming semiconductor device using the same Feb. 18, 2014
8647987 Method for improving uniformity of chemical-mechanical planarization process Feb. 11, 2014
8647896 Process for producing a substrate for a liquid ejection head Feb. 11, 2014
8647521 Method of forming micro pattern of semiconductor device Feb. 11, 2014
8647441 Method of fabricating semiconductor cleaners Feb. 11, 2014
8647439 Method of epitaxial germanium tin alloy surface preparation Feb. 11, 2014
8642483 Substrate processing with shrink etching step Feb. 4, 2014
8642473 Methods for contact clean Feb. 4, 2014
8641914 Methods of improving long range order in self-assembly of block copolymer films with ionic liquids Feb. 4, 2014
8637847 Memory cells having a plurality of heaters Jan. 28, 2014
8637362 Memory array with ultra-thin etched pillar surround gate access transistors and buried data/bit lines Jan. 28, 2014
8633112 Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preference Jan. 21, 2014
8633104 Methods of manufacturing three-dimensional semiconductor devices Jan. 21, 2014
8629064 Multiple patterning lithography using spacer and self-aligned assist patterns Jan. 14, 2014
8623768 Methods for forming MEMS devices Jan. 7, 2014
8617997 Selective wet etching of gold-tin based solder Dec. 31, 2013
8617973 Semiconductor device fabrication methods with enhanced control in recessing processes Dec. 31, 2013
8614148 Methods for forming fine patterns of a semiconductor device Dec. 24, 2013
8612038 Target object processing system and method of controlling the same Dec. 17, 2013
8609549 Plasma etching method, plasma etching apparatus, and computer-readable storage medium Dec. 17, 2013
8609480 Methods of forming isolation structures on FinFET semiconductor devices Dec. 17, 2013
8598706 Method for forming interlayer dielectric film, interlayer dielectric film, semiconductor device and semiconductor manufacturing apparatus Dec. 3, 2013
8592861 Display device and manufacturing method of the display device Nov. 26, 2013
8592318 Pitch reduction using oxide spacer Nov. 26, 2013
8592313 Polishing method and polishing apparatus Nov. 26, 2013
8586481 Chemical planarization of copper wafer polishing Nov. 19, 2013
8580685 Integrated circuit having interleaved gridded features, mask set, and method for printing Nov. 12, 2013
8575031 Method of forming a fine pattern, display substrate, and method of manufacturing the same using the method of forming a fine pattern Nov. 5, 2013
8574942 Method of forming silicon nanowires and method of fabricating lithium secondary battery using the same Nov. 5, 2013
8569175 Method for dry chemical treatment of substrates and also use thereof Oct. 29, 2013











 
 
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