Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Browse by Category: Main > Engineering
Class Information
Number: 438/691
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with the removal of material by nonchemical means (e.g., ablating, abrading, etc.) > Combined mechanical and chemical material removal
Description: Processes wherein the nonchemical material removal is a mechanical (e.g., abrading, cutting, etc.) removal method.










Sub-classes under this class:

Class Number Class Name Patents
438/692 Simultaneous (e.g., chemical-mechanical polishing, etc.) 2,959


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Next

Patent Number Title Of Patent Date Issued
6800556 Polishing method using ceria slurry, and method of manufacturing semiconductor device Oct. 5, 2004
6800560 Gas assisted method for applying resist stripper and gas-resist stripper combinations Oct. 5, 2004
6797623 Methods of producing and polishing semiconductor device and polishing apparatus Sep. 28, 2004
6797624 Solution for ruthenium chemical mechanical planarization Sep. 28, 2004
6797625 Method of forming a protective step on the edge of a semiconductor wafer Sep. 28, 2004
6794272 Wafer thinning using magnetic mirror plasma Sep. 21, 2004
6794289 Method and apparatuses for making and using bi-modal abrasive slurries for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies Sep. 21, 2004
6790711 Method of making semiconductor device Sep. 14, 2004
6790786 Etching processes for integrated circuit manufacturing including methods of forming capacitors Sep. 14, 2004
6787470 Sacrificial feature for corrosion prevention during CMP Sep. 7, 2004
6787471 Method of manufacturing a semiconductor device Sep. 7, 2004
6784093 Copper surface passivation during semiconductor manufacturing Aug. 31, 2004
6780771 Forming a substantially planar upper surface at the outer edge of a semiconductor topography Aug. 24, 2004
6780772 Method and system to provide electroplanarization of a workpiece with a conducting material layer Aug. 24, 2004
6780773 Method of chemical mechanical polishing with high throughput and low dishing Aug. 24, 2004
6780775 Design of lithography alignment and overlay measurement marks on CMP finished damascene surface Aug. 24, 2004
6776688 Real-time polishing pad stiffness-control using magnetically controllable fluid Aug. 17, 2004
6776696 Continuous chemical mechanical polishing process for polishing multiple conductive and non-conductive layers on semiconductor wafers Aug. 17, 2004
6776852 Process of removing holefill residue from a metallic surface of an electronic substrate Aug. 17, 2004
6776917 Chemical mechanical polishing thickness control in magnetic head fabrication Aug. 17, 2004
6777307 Method of forming semiconductor structures with reduced step heights Aug. 17, 2004
6777335 Polishing method Aug. 17, 2004
6777336 Method of forming a shallow trench isolation structure Aug. 17, 2004
6761619 Method and system for spatial uniform polishing Jul. 13, 2004
6762135 Method of cleaning a polishing pad conditioner Jul. 13, 2004
6756307 Apparatus for electrically planarizing semiconductor wafers Jun. 29, 2004
6756308 Chemical-mechanical planarization using ozone Jun. 29, 2004
6756317 Method for making a microstructure by surface micromachining Jun. 29, 2004
6752844 Ceric-ion slurry for use in chemical-mechanical polishing Jun. 22, 2004
6753249 Multilayer interface in copper CMP for low K dielectric Jun. 22, 2004
6753256 Method of manufacturing semiconductor wafer Jun. 22, 2004
6753258 Integration scheme for dual damascene structure Jun. 22, 2004
6750128 Methods of polishing, interconnect-fabrication, and producing semiconductor devices Jun. 15, 2004
6746498 Abrasive with a modified surface and a method for making it Jun. 8, 2004
6743075 Method for determining chemical mechanical polishing time Jun. 1, 2004
6743268 Chemical-mechanical planarization of barriers or liners for copper metallurgy Jun. 1, 2004
6743660 Method of making a wafer level chip scale package Jun. 1, 2004
6743697 Thin silicon circuits and method for making the same Jun. 1, 2004
6743698 Semiconductor wafer, method for producing the same, and wafer chuck Jun. 1, 2004
6743723 Method for fabricating semiconductor device Jun. 1, 2004
6740589 Composition for polishing semiconductor wafer, semiconductor circuit wafer, and method for producing the same May. 25, 2004
6734427 TEM/SEM sample preparation May. 11, 2004
6730592 Methods for planarization of metal-containing surfaces using halogens and halide salts May. 4, 2004
6730602 Method for forming aluminum bumps by sputtering and chemical mechanical polishing May. 4, 2004
6730603 System and method of determining a polishing endpoint by monitoring signal intensity May. 4, 2004
6730615 High reflector tunable stress coating, such as for a MEMS mirror May. 4, 2004
6722963 Apparatus for chemical-mechanical planarization of microelectronic substrates with a carrier and membrane Apr. 20, 2004
6723144 Semiconductor device fabricating method Apr. 20, 2004
6723626 Method of manufacturing semiconductor device Apr. 20, 2004
6723644 Method of fabricating a semiconductor device using two chemical mechanical polishing processes to polish regions having different conductive pattern densities Apr. 20, 2004

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Next










 
 
  Recently Added Patents
Reduced plating ignitron
Nanoparticle entrapment of materials
Systems and methods for redox flow battery scalable modular reactant storage
Method and device for surface scanning of a patient
Managing job execution
Methods for selective reverse mask planarization and interconnect structures formed thereby
System and method for reliable packet data transport in a computer network
  Randomly Featured Patents
Safety bag device for vehicle
Substituted 2-phenylhydrazino and 2-phenylazo thiazolines
Apparatus for placing a web of film under tension
Airfoil tip squealer cooling construction
Disk drive having support posts aligned with storage disk and actuator mounting points to reduce mechanical off-tracking
Electric fishing device for fishing from a ship
Process for the recovery of pure nitriles
Apparatus and method for managing software applications of a mobile device server
Method and apparatus for supporting a vertical cylinder of wet cement surrounding a vertical pipe passing through a horizontal concrete slab
Rubber composition for extrusion molding and for molding with mold and use thereof