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Class Information
Number: 438/690
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with the removal of material by nonchemical means (e.g., ablating, abrading, etc.)
Description: Processes wherein the chemical removal is accompanied by the removal, either concurrently or consecutively, of material by nonchemical means.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5395788 |
Method of producing semiconductor substrate |
Mar. 7, 1995 |
| 5389579 |
Method for single sided polishing of a semiconductor wafer |
Feb. 14, 1995 |
| 5376225 |
Method of forming fine structure on compound semiconductor with inclined ion beam etching |
Dec. 27, 1994 |
| 5360765 |
Method of forming electrodes of semiconductor device |
Nov. 1, 1994 |
| 5346585 |
Use of a faceted etch process to eliminate stringers |
Sep. 13, 1994 |
| 5314709 |
Unzippable polymer mask for screening operations |
May. 24, 1994 |
| 5302547 |
Systems for patterning dielectrics by laser ablation |
Apr. 12, 1994 |
| 5270252 |
Method of forming platinum and platinum silicide schottky contacts on beta-silicon carbide |
Dec. 14, 1993 |
| 5268065 |
Method for thinning a semiconductor wafer |
Dec. 7, 1993 |
| 5259925 |
Method of cleaning a plurality of semiconductor devices |
Nov. 9, 1993 |
| 5198388 |
Method of forming interconnection patterns |
Mar. 30, 1993 |
| 5171718 |
Method for forming a fine pattern by using a patterned resist layer |
Dec. 15, 1992 |
| 5110764 |
Method of making a beveled semiconductor silicon wafer |
May. 5, 1992 |
| 5082522 |
Method for forming patterned diamond thin films |
Jan. 21, 1992 |
| 5081049 |
Sculpted solar cell surfaces |
Jan. 14, 1992 |
| 5035770 |
Methods of making surface relief gratings |
Jul. 30, 1991 |
| 5024723 |
Method of producing a thin silicon on insulator layer by wafer bonding and chemical thinning |
Jun. 18, 1991 |
| 5013692 |
Process for preparing a silicon nitride insulating film for semiconductor memory device |
May. 7, 1991 |
| 5011565 |
Dotted contact solar cell and method of making same |
Apr. 30, 1991 |
| 5011567 |
Method of fabricating solar cells |
Apr. 30, 1991 |
| 4978639 |
Method for the simultaneous formation of via-holes and wraparound plating on semiconductor chips |
Dec. 18, 1990 |
| 4962064 |
Method of planarization of topologies in integrated circuit structures |
Oct. 9, 1990 |
| 4954459 |
Method of planarization of topologies in integrated circuit structures |
Sep. 4, 1990 |
| 4879258 |
Integrated circuit planarization by mechanical polishing |
Nov. 7, 1989 |
| 4874459 |
Low damage-producing, anisotropic, chemically enhanced etching method and apparatus |
Oct. 17, 1989 |
| 4764485 |
Method for producing via holes in polymer dielectrics |
Aug. 16, 1988 |
| 4713353 |
Method of producing a transparent photocathode |
Dec. 15, 1987 |
| 4575921 |
Silicon nitride formation and use in self-aligned semiconductor device manufacturing method |
Mar. 18, 1986 |
| 4568409 |
Precision marking of layers |
Feb. 4, 1986 |
| 4528065 |
Photoelectric conversion device and its manufacturing method |
Jul. 9, 1985 |
| 4525924 |
Method for producing a plurality of semiconductor circuits |
Jul. 2, 1985 |
| 4465550 |
Method and apparatus for slicing semiconductor ingots |
Aug. 14, 1984 |
| 4247579 |
Method for metallizing a semiconductor element |
Jan. 27, 1981 |
| 4021276 |
Method of making rib-structure shadow mask for ion implantation |
May. 3, 1977 |
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