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Class Information
Number: 438/690
Name: Semiconductor device manufacturing: process > Chemical etching > Combined with the removal of material by nonchemical means (e.g., ablating, abrading, etc.)
Description: Processes wherein the chemical removal is accompanied by the removal, either concurrently or consecutively, of material by nonchemical means.










Sub-classes under this class:

Class Number Class Name Patents
438/691 Combined mechanical and chemical material removal 1,015


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

Patent Number Title Of Patent Date Issued
8703004 Method for chemical planarization and chemical planarization apparatus Apr. 22, 2014
8685832 Trench filling method and method of manufacturing semiconductor integrated circuit device Apr. 1, 2014
8679355 MEMS element Mar. 25, 2014
8679944 Progressive trimming method Mar. 25, 2014
8679980 Aqueous metal polishing agent comprising a polymeric abrasiv containing pendant functional groups and its use in a CMP process Mar. 25, 2014
8673781 Plasma etching method Mar. 18, 2014
8673660 Method of producing liquid ejection head Mar. 18, 2014
8673741 Etching a laser-cut semiconductor before dicing a die attach film (DAF) or other material layer Mar. 18, 2014
8673784 Method for producing silicon epitaxial wafer Mar. 18, 2014
8669184 Method for improving flatness of a layer deposited on polycrystalline layer Mar. 11, 2014
8652967 Adjuvant for controlling polishing selectivity and chemical mechanical polishing slurry comprising the same Feb. 18, 2014
8647985 Method for polishing a substrate composed of semiconductor material Feb. 11, 2014
8628998 Annealing methods for backside illumination image sensor chips Jan. 14, 2014
8629064 Multiple patterning lithography using spacer and self-aligned assist patterns Jan. 14, 2014
8609529 Fabrication method and structure of through silicon via Dec. 17, 2013
8609541 Polishing slurry for metal films and polishing method Dec. 17, 2013
8604467 Organic electro-optical component Dec. 10, 2013
8598042 Device manufacturing and cleaning method Dec. 3, 2013
8592952 Semiconductor chip and semiconductor package with stack chip structure Nov. 26, 2013
8580687 Semiconductor structure and method for making same Nov. 12, 2013
8575030 Semiconductor device manufacturing method Nov. 5, 2013
8568877 Porous and non-porous nanostructures Oct. 29, 2013
8552510 Semiconductor device having ring-shaped gate electrode, design apparatus, and program Oct. 8, 2013
8546260 Fabric containing non-crimped fibers and methods of manufacture Oct. 1, 2013
8546261 Slurry for polishing and planarization method of insulating layer using the same Oct. 1, 2013
8540894 Polishing composition Sep. 24, 2013
8541308 Polishing method and method for forming a gate Sep. 24, 2013
8530353 SiC substrate and method of manufacturing the same Sep. 10, 2013
8529778 Large area patterning of nano-sized shapes Sep. 10, 2013
8524606 Chemical mechanical planarization with overburden mask Sep. 3, 2013
8518135 Polishing composition containing hybrid abrasive for nickel-phosphorous coated memory disks Aug. 27, 2013
8518297 Polishing composition and polishing method using the same Aug. 27, 2013
8513126 Slurry composition having tunable dielectric polishing selectivity and method of polishing a substrate Aug. 20, 2013
8513127 Chemical mechanical planarization processes for fabrication of FinFET devices Aug. 20, 2013
8506832 Wafer dividing apparatus and methods Aug. 13, 2013
8501580 Process of fabricating semiconductor device with low capacitance for high-frequency circuit protection Aug. 6, 2013
8501533 Method of etching a programmable memory microelectronic device Aug. 6, 2013
8501028 Method for grinding a semiconductor wafer Aug. 6, 2013
8496843 Method of polishing a substrate comprising polysilicon and at least one of silicon oxide and silicon nitride Jul. 30, 2013
8497210 Shallow trench isolation chemical mechanical planarization Jul. 30, 2013
8492277 Method of polishing a substrate comprising polysilicon and at least one of silicon oxide and silicon nitride Jul. 23, 2013
8492276 Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method Jul. 23, 2013
8491808 Method of polishing a substrate comprising polysilicon, silicon oxide and silicon nitride Jul. 23, 2013
8486823 Methods of forming through via Jul. 16, 2013
8486837 Polishing slurry for metal, and polishing method Jul. 16, 2013
8480920 Chemical mechanical polishing aqueous dispersion, method of preparing the same, chemical mechanical polishing aqueous dispersion preparation kit, and chemical mechanical polishing method Jul. 9, 2013
8466484 Materials and methods for organic light-emitting device microcavity Jun. 18, 2013
8461042 Electrode contact contaminate removal Jun. 11, 2013
8444728 Stabilized chemical mechanical polishing composition and method of polishing a substrate May. 21, 2013
8445982 Method of forming a semiconductor device May. 21, 2013

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