| |
 |
|
Class Information
Number: 438/689
Name: Semiconductor device manufacturing: process > Chemical etching
Description: Processes having a step of removing material from a semiconductor substrate through the action of a chemical agent, wherein the intent is to use the electrical properties of the semiconductor for at least one of the purposes outlined in section I, C, of the class definition for this class (438).
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7326635 |
Method and apparatus for stripping photo-resist |
Feb. 5, 2008 |
| 7323416 |
Method and composition for polishing a substrate |
Jan. 29, 2008 |
| 7323414 |
Method for polishing a substrate surface |
Jan. 29, 2008 |
| 7323413 |
Method for stripping silicon nitride |
Jan. 29, 2008 |
| 7323115 |
Substrate processing method and ink jet recording head substrate manufacturing method |
Jan. 29, 2008 |
| 7323114 |
Method of making optical elements for an optical disc system |
Jan. 29, 2008 |
| 7323111 |
Angle control of multi-cavity molded components for MEMS and NEMS group assembly |
Jan. 29, 2008 |
| 7316975 |
Method of forming sidewall spacers |
Jan. 8, 2008 |
| 7314803 |
Method for producing a semiconductor structure |
Jan. 1, 2008 |
| 7313863 |
Method to form a cavity having inner walls of varying slope |
Jan. 1, 2008 |
| 7312152 |
Lactate-containing corrosion inhibitor |
Dec. 25, 2007 |
| 7312162 |
Low temperature plasma deposition process for carbon layer deposition |
Dec. 25, 2007 |
| 7309652 |
Method for removing photoresist layer and method for forming metal line in semiconductor device using the same |
Dec. 18, 2007 |
| 7307020 |
Membrane 3D IC fabrication |
Dec. 11, 2007 |
| 7307019 |
Method for supercritical carbon dioxide processing of fluoro-carbon films |
Dec. 11, 2007 |
| 7300874 |
Chemical mechanical polishing compositions and methods relating thereto |
Nov. 27, 2007 |
| 7297287 |
Method and apparatus for endpoint detection using partial least squares |
Nov. 20, 2007 |
| 7297636 |
Methods for fabricating device features having small dimensions |
Nov. 20, 2007 |
| 7292906 |
Formula-based run-to-run control |
Nov. 6, 2007 |
| 7291560 |
Method of production pitch fractionizations in semiconductor technology |
Nov. 6, 2007 |
| 7291559 |
Etching method, gate etching method, and method of manufacturing semiconductor devices |
Nov. 6, 2007 |
| 7288482 |
Silicon nitride etching methods |
Oct. 30, 2007 |
| 7285495 |
Methods for thermally treating a semiconductor layer |
Oct. 23, 2007 |
| 7285499 |
Polymer spacers for creating sub-lithographic spaces |
Oct. 23, 2007 |
| 7282449 |
Thermal treatment of a semiconductor layer |
Oct. 16, 2007 |
| 7282447 |
Method for an integrated circuit contact |
Oct. 16, 2007 |
| 7282446 |
Method of manufacturing self-ordered nanochannel-array and method of manufacturing nanodot using the nanochannel-array |
Oct. 16, 2007 |
| 7282448 |
Substrate and method of forming substrate for fluid ejection device |
Oct. 16, 2007 |
| 7279398 |
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces |
Oct. 9, 2007 |
| 7279112 |
Method of manufacture of smart microfluidic medical device with universal coating |
Oct. 9, 2007 |
| 7279108 |
Method for the manufacture of printed circuit boards with plated resistors |
Oct. 9, 2007 |
| 7278210 |
Method for producing a 3-D microscope flow-through cell |
Oct. 9, 2007 |
| 7277214 |
Tiltable-body apparatus, and method of fabricating the same |
Oct. 2, 2007 |
| 7276445 |
Method for forming pattern using printing method |
Oct. 2, 2007 |
| 7273732 |
Systems and methods for nanowire growth and harvesting |
Sep. 25, 2007 |
| 7273815 |
Etch features with reduced line edge roughness |
Sep. 25, 2007 |
| 7271099 |
Forming a conductive pattern on a substrate |
Sep. 18, 2007 |
| 7271098 |
Method of fabricating a desired pattern of electronically functional material |
Sep. 18, 2007 |
| 7271082 |
Method of manufacturing a semiconductor device |
Sep. 18, 2007 |
| 7271057 |
Memory array with overlapping buried digit line and active area and method for forming same |
Sep. 18, 2007 |
| 7270760 |
Method and apparatus for simulating standard test wafers |
Sep. 18, 2007 |
| 7268079 |
Method for fabricating a semiconductor having a field zone |
Sep. 11, 2007 |
| 7268080 |
Method for printing contacts on a substrate |
Sep. 11, 2007 |
| 7265053 |
Trench photolithography rework for removal of photoresist residue |
Sep. 4, 2007 |
| 7261829 |
Method for masking a recess in a structure having a high aspect ratio |
Aug. 28, 2007 |
| 7262078 |
Method of forming a wear-resistant dielectric layer |
Aug. 28, 2007 |
| 7259107 |
Method of forming isolated features of semiconductor devices |
Aug. 21, 2007 |
| 7256126 |
Pitch reduction integrating formation of memory array and peripheral circuitry |
Aug. 14, 2007 |
| 7256094 |
Method for changing threshold voltage of device in resist asher |
Aug. 14, 2007 |
| 7255801 |
Deep submicron CMOS compatible suspending inductor |
Aug. 14, 2007 |
|
|
|
