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Class Information
Number: 438/689
Name: Semiconductor device manufacturing: process > Chemical etching
Description: Processes having a step of removing material from a semiconductor substrate through the action of a chemical agent, wherein the intent is to use the electrical properties of the semiconductor for at least one of the purposes outlined in section I, C, of the class definition for this class (438).

Sub-classes under this class:

Class Number Class Name Patents
438/705 Altering etchability of substrate region by compositional or crystalline modification 452
438/694 Combined with coating step 1,362
438/690 Combined with the removal of material by nonchemical means (e.g., ablating, abrading, etc.) 721
438/704 Having liquid and vapor etching steps 576
438/745 Liquid phase etching 1,679
438/706 Vapor phase etching (i.e., dry etching) 2,070

Patents under this class:

Patent Number Title Of Patent Date Issued
8709954 Wafer recycling method Apr. 29, 2014
8709952 Etching method, etching apparatus, and computer-readable recording medium Apr. 29, 2014
8709265 (4927 Apr. 29, 2014
8703620 Methods for PFET fabrication using APM solutions Apr. 22, 2014
8703617 Method for planarizing interlayer dielectric layer Apr. 22, 2014
8703616 Method for adjusting feature size and position Apr. 22, 2014
8703579 Method of manufacturing semiconductor device Apr. 22, 2014
8703085 Crystalline cerium oxide and preparation method of the same Apr. 22, 2014
8703004 Method for chemical planarization and chemical planarization apparatus Apr. 22, 2014
8685864 Method and device for treating a substrate surface of a substrate Apr. 1, 2014
8685863 Semiconductor process, semiconductor element and package having semiconductor element Apr. 1, 2014
8685856 Solid-state imaging device, fabrication method thereof, imaging apparatus, and fabrication method of anti-reflection structure Apr. 1, 2014
8685844 Sub-10 nm graphene nanoribbon lattices Apr. 1, 2014
8685836 Method for forming a silicon layer on any substrate using light irradiation Apr. 1, 2014
8685266 Monocyclic high aspect ratio titanium inductively coupled plasma deep etching processes and products so produced Apr. 1, 2014
8679983 Selective suppression of dry-etch rate of materials containing both silicon and nitrogen Mar. 25, 2014
8679980 Aqueous metal polishing agent comprising a polymeric abrasiv containing pendant functional groups and its use in a CMP process Mar. 25, 2014
8679952 Method of manufacturing silicon carbide epitaxial wafer Mar. 25, 2014
8679355 MEMS element Mar. 25, 2014
8673782 Methods of manufacturing NAND flash memory devices Mar. 18, 2014
8673781 Plasma etching method Mar. 18, 2014
8673780 Methods of processing semiconductor substrates in forming scribe line alignment marks Mar. 18, 2014
8673660 Method of producing liquid ejection head Mar. 18, 2014
8669190 Method for manufacturing semiconductor device and semiconductor wafer Mar. 11, 2014
8669184 Method for improving flatness of a layer deposited on polycrystalline layer Mar. 11, 2014
8669183 Manufacturing method of semiconductor device Mar. 11, 2014
8663488 Apparatus for processing substrate and method of doing the same Mar. 4, 2014
8658543 Methods for pFET fabrication using APM solutions Feb. 25, 2014
8654537 Printed circuit board with integral radio-frequency shields Feb. 18, 2014
8653601 Current control semiconductor element and control device using the same Feb. 18, 2014
8652967 Adjuvant for controlling polishing selectivity and chemical mechanical polishing slurry comprising the same Feb. 18, 2014
8647521 Method of forming micro pattern of semiconductor device Feb. 11, 2014
8642477 Method for clearing native oxide Feb. 4, 2014
8642473 Methods for contact clean Feb. 4, 2014
8642470 Semiconductor device manufacturing method Feb. 4, 2014
8641916 Plasma etching apparatus, plasma etching method and storage medium Feb. 4, 2014
8629064 Multiple patterning lithography using spacer and self-aligned assist patterns Jan. 14, 2014
8628981 Method of manufacturing a ferroelectric-capacitor memory device including recovery annealing Jan. 14, 2014
8623771 Method for fabricating micropattern of semiconductor device Jan. 7, 2014
8623765 Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus Jan. 7, 2014
8623670 Method for making a perpendicular thermally-assisted recording (TAR) magnetic recording disk having a carbon segregant Jan. 7, 2014
8623229 Manufacturing techniques to limit damage on workpiece with varying topographies Jan. 7, 2014
8617997 Selective wet etching of gold-tin based solder Dec. 31, 2013
8617993 Method of reducing pattern collapse in high aspect ratio nanostructures Dec. 31, 2013
8617412 Nano-filter and method of forming same, and method of filtration Dec. 31, 2013
8617409 Magnetically levitated gas cell for touchless site-isolated wet processing Dec. 31, 2013
8614140 Semiconductor device manufacturing apparatus Dec. 24, 2013
8613287 Apparatus for preventing stiction of MEMS microstructure Dec. 24, 2013
8609524 Method for making semiconductor device comprising replacement gate electrode structures with an enhanced diffusion barrier Dec. 17, 2013
8609441 Substrate comprising a mark Dec. 17, 2013

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