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Class Information
Number: 438/689
Name: Semiconductor device manufacturing: process > Chemical etching
Description: Processes having a step of removing material from a semiconductor substrate through the action of a chemical agent, wherein the intent is to use the electrical properties of the semiconductor for at least one of the purposes outlined in section I, C, of the class definition for this class (438).
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618898 |
Method and apparatus for forming contact hole |
Nov. 17, 2009 |
| 7615206 |
Methods of fabricating nanoscale-to-microscale structures |
Nov. 10, 2009 |
| 7616291 |
Lithographic processing cell and device manufacturing method |
Nov. 10, 2009 |
| 7611960 |
Method and system for wafer backside alignment |
Nov. 3, 2009 |
| 7608540 |
Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition |
Oct. 27, 2009 |
| 7608541 |
Method of forming fine pattern, liquid crystal display device having a fine pattern and fabricating method thereof |
Oct. 27, 2009 |
| 7608542 |
Large-size glass substrate for photomask and making method, computer-readable recording medium, and mother glass exposure method |
Oct. 27, 2009 |
| 7601643 |
Arrangement and method for fabricating a semiconductor wafer |
Oct. 13, 2009 |
| 7601641 |
Two step optical planarizing layer etch |
Oct. 13, 2009 |
| 7598173 |
Electro-optic displays, and components for use therein |
Oct. 6, 2009 |
| 7598174 |
Feature patterning methods |
Oct. 6, 2009 |
| 7598177 |
Methods of filling trenches using high-density plasma deposition (HDP) |
Oct. 6, 2009 |
| 7598178 |
Carbon precursors for use during silicon epitaxial film formation |
Oct. 6, 2009 |
| 7591806 |
High-aspect-ratio microdevices and methods for transdermal delivery and sampling of active substances |
Sep. 22, 2009 |
| 7592201 |
Adjustments of masks by re-flow |
Sep. 22, 2009 |
| 7592260 |
Method of manufacturing a semiconductor device |
Sep. 22, 2009 |
| 7585424 |
Pattern reversal process for self aligned imprint lithography and device |
Sep. 8, 2009 |
| 7582220 |
Etching method |
Sep. 1, 2009 |
| 7582532 |
Method for fabricating semiconductor device |
Sep. 1, 2009 |
| 7582564 |
Process and composition for conductive material removal by electrochemical mechanical polishing |
Sep. 1, 2009 |
| 7579278 |
Topography directed patterning |
Aug. 25, 2009 |
| 7579309 |
Methods for characterizing defects on silicon surfaces and etching composition and treatment process therefor |
Aug. 25, 2009 |
| 7572732 |
Method to modulate etch rate in SLAM |
Aug. 11, 2009 |
| 7569484 |
Plasma and electron beam etching device and method |
Aug. 4, 2009 |
| 7566665 |
Semiconductor device manufacturing method and manufacturing line thereof |
Jul. 28, 2009 |
| 7563382 |
Mask and method of fabricating the same, and method of machining material |
Jul. 21, 2009 |
| 7553775 |
Method for coating semiconductor surface, process for production of semiconductor particles using said method, and optical element using said semiconductor particles |
Jun. 30, 2009 |
| 7553767 |
Method for fabricating semiconductor device having taper type trench |
Jun. 30, 2009 |
| 7553679 |
Method of determining plasma ion density, wafer voltage, etch rate and wafer current from applied bias voltage and current |
Jun. 30, 2009 |
| 7544307 |
Metal polishing liquid and polishing method using it |
Jun. 9, 2009 |
| 7544620 |
Process for digging a deep trench in a semiconductor body and semiconductor body so obtained |
Jun. 9, 2009 |
| 7544625 |
Silicon oxide thin-films with embedded nanocrystalline silicon |
Jun. 9, 2009 |
| 7541286 |
Method for manufacturing semiconductor device using KrF light source |
Jun. 2, 2009 |
| 7541285 |
Substrate processing apparatus and substrate processing method |
Jun. 2, 2009 |
| 7541228 |
Semiconductor device, method of manufacturing the same, and method of designing the same |
Jun. 2, 2009 |
| 7537657 |
Silicon wafer and process for producing it |
May. 26, 2009 |
| 7537990 |
Method of manufacturing semiconductor devices |
May. 26, 2009 |
| 7531102 |
Simultaneous selective polymer deposition and etch pitch doubling for sub 50nm line/space patterning |
May. 12, 2009 |
| 7531470 |
Method and apparatus for electronic device manufacture using shadow masks |
May. 12, 2009 |
| 7527704 |
Method for preparing film structure comprising ferroelectric single crystal layer |
May. 5, 2009 |
| 7528076 |
Method for manufacturing gate oxide layer with different thicknesses |
May. 5, 2009 |
| 7526357 |
Pulse modulation laser writing system |
Apr. 28, 2009 |
| 7521362 |
Methods for the optimization of ion energy control in a plasma processing system |
Apr. 21, 2009 |
| 7517805 |
Method of in-situ ash strip to eliminate memory effect and reduce wafer damage |
Apr. 14, 2009 |
| 7514369 |
Method of producing porous silicon particles by stain-etching and silicon nanoparticles from stain-etched silicon powder |
Apr. 7, 2009 |
| 7510974 |
CMP process |
Mar. 31, 2009 |
| 7504326 |
Use of scanning theme implanters and annealers for selective implantation and annealing |
Mar. 17, 2009 |
| 7501069 |
Flexible structures for sensors and electronics |
Mar. 10, 2009 |
| 7501346 |
Gallium and chromium ions for oxide rate enhancement |
Mar. 10, 2009 |
| 7498209 |
Etching tape and method of fabricating array substrate for liquid crystal display using the same |
Mar. 3, 2009 |
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