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Class Information
Number: 438/688
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > Aluminum or aluminum alloy conductor
Description: Processes for forming a contact using aluminum (Al) or an alloy thereof.

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14

Patent Number Title Of Patent Date Issued
8691688 Method of manufacturing semiconductor structure Apr. 8, 2014
8664759 Integrated circuit with heat conducting structures for localized thermal control Mar. 4, 2014
8653665 Barrier layer, film forming method, and processing system Feb. 18, 2014
8647984 Method of manufacturing semiconductor device Feb. 11, 2014
8580135 Die and method of manufacturing same Nov. 12, 2013
8575021 Substrate processing including a masking layer Nov. 5, 2013
8551884 Method of manufacturing semiconductor device Oct. 8, 2013
8552559 Very thick metal interconnection scheme in IC chips Oct. 8, 2013
8546270 Atomic layer deposition apparatus Oct. 1, 2013
8486222 Substrate processing apparatus and method of manufacturing a semiconductor device Jul. 16, 2013
8455360 Method for fabricating storage node of semiconductor device Jun. 4, 2013
8450209 p+ Polysilicon material on aluminum for non-volatile memory device and method May. 28, 2013
8440566 Method for forming an aluminum nitride thin film May. 14, 2013
8435899 Method for producing columnar structured material May. 7, 2013
8426973 Integrated circuit of decreased size Apr. 23, 2013
8420530 Nano-interconnects for atomic and molecular scale circuits Apr. 16, 2013
8404558 Method for making buried circumferential electrode microcavity plasma device arrays, and electrical interconnects Mar. 26, 2013
8399317 Transistor having an etch stop layer including a metal compound that is selectively formed over a metal gate, and method therefor Mar. 19, 2013
8354334 Power semiconductor chip with a formed patterned thick metallization atop Jan. 15, 2013
8304336 Method for fabricating solar cell using inductively coupled plasma chemical vapor deposition Nov. 6, 2012
8288273 Method for forming a patterned thick metallization atop a power semiconductor chip Oct. 16, 2012
8283245 Method for fabricating solar cell using inductively coupled plasma chemical vapor deposition Oct. 9, 2012
8268714 Method for fabricating solar cell using inductively coupled plasma chemical vapor deposition Sep. 18, 2012
8242487 Anode for an organic electronic device Aug. 14, 2012
8193030 Methods of fabricating non-volatile memory devices having carbon nanotube layer and passivation layer Jun. 5, 2012
8168543 Methods of forming a layer for barrier applications in an interconnect structure May. 1, 2012
8119525 Process for selective growth of films during ECP plating Feb. 21, 2012
8120184 Semiconductor constructions and methods of forming layers Feb. 21, 2012
8110504 Method of manufacturing semiconductor device Feb. 7, 2012
8088688 p+ polysilicon material on aluminum for non-volatile memory device and method Jan. 3, 2012
8076778 Method for preventing Al-Cu bottom damage using TiN liner Dec. 13, 2011
8071482 Manufacturing method of a silicon carbide semiconductor device Dec. 6, 2011
8067304 Method for forming a patterned thick metallization atop a power semiconductor chip Nov. 29, 2011
8067310 Semiconductor device and method for manufacturing of same Nov. 29, 2011
8062978 Crystalline aluminum oxide layers having increased energy band gap, charge trap layer devices including crystalline aluminum oxide layers, and methods of manufacturing the same Nov. 22, 2011
8043978 Electronic device and method for producing electronic device Oct. 25, 2011
8043966 Method for monitoring patterning integrity of etched openings and forming conductive structures with the openings Oct. 25, 2011
8043944 Process for enhancing solubility and reaction rates in supercritical fluids Oct. 25, 2011
8017446 Method for manufacturing a rigid power module suited for high-voltage applications Sep. 13, 2011
8017519 Semiconductor device and manufacturing method thereof Sep. 13, 2011
8003505 Image sensor and method of fabricating the same Aug. 23, 2011
8003536 Electromigration resistant aluminum-based metal interconnect structure Aug. 23, 2011
7977131 Method for manufacturing nano-array electrode and photoelectric conversion device using same Jul. 12, 2011
7888263 Cladded silver and silver alloy metallization for improved adhesion electromigration resistance Feb. 15, 2011
7871930 Method of manufacturing a light emitting device and thin film forming apparatus Jan. 18, 2011
7867903 Passivated thin film and method of producing same Jan. 11, 2011
7816260 Method for fabricating semiconductor device Oct. 19, 2010
7811912 Method for manufacturing semiconductor device Oct. 12, 2010
7799628 Advanced metal gate method and device Sep. 21, 2010
7790617 Formation of metal silicide layer over copper interconnect for reliability enhancement Sep. 7, 2010

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