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Class Information
Number: 438/684
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > Electrically conductive polysilicon
Description: Processes for forming a contact using electrically conductive polycrystalline silicon.


Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
7585770 Method of growing carbon nanotubes and method of manufacturing field emission device having the same Sep. 8, 2009
7569468 Method for forming a floating gate memory with polysilicon local interconnects Aug. 4, 2009
7563708 Method for manufacturing semiconductor device Jul. 21, 2009
7563702 Method for fabricating semiconductor device Jul. 21, 2009
7531398 Methods and devices employing metal layers in gates to introduce channel strain May. 12, 2009
7446044 Carbon nanotube switches for memory, RF communications and sensing applications, and methods of making the same Nov. 4, 2008
7407886 Method for preparing a contact plug structure Aug. 5, 2008
7375005 Method for reclaiming and reusing wafers May. 20, 2008
7354858 Film formation method and apparatus for semiconductor process Apr. 8, 2008
7326653 Method of preparation of organic optoelectronic and electronic devices and devices thereby obtained Feb. 5, 2008
7294573 Method for controlling poly 1 thickness and uniformity in a memory array fabrication process Nov. 13, 2007
7279422 Semiconductor device with silicide film and method of manufacturing the same Oct. 9, 2007
7256123 Method of forming an interface for a semiconductor device Aug. 14, 2007
7220670 Method of producing rough polysilicon by the use of pulsed plasma chemical vapor deposition and products produced by same May. 22, 2007
7220672 Semiconductor device comprising metal silicide films formed to cover gate electrode and source-drain diffusion layers and method of manufacturing the same May. 22, 2007
7208409 Integrated circuit metal silicide method Apr. 24, 2007
7199043 Method of forming copper wiring in semiconductor device Apr. 3, 2007
7115509 Method for forming polysilicon local interconnects Oct. 3, 2006
7067391 Method to form a metal silicide gate device Jun. 27, 2006
7041550 Device and method for protecting against oxidation of a conductive layer in said device May. 9, 2006
7041605 Semiconductor contact structure and method of forming the same May. 9, 2006
7037796 Method of manufacturing spacers on sidewalls of titanium polycide gate May. 2, 2006
7029937 Semiconductor device and method of manufacturing the same, circuit board, and electronic instrument Apr. 18, 2006
7012021 Method for end point detection polysilicon chemical mechanical polishing in an anti-fuse memory device Mar. 14, 2006
7008873 Integrated circuit with reverse engineering protection Mar. 7, 2006
7005302 Semiconductor on insulator substrate and devices formed therefrom Feb. 28, 2006
6991999 Bi-layer silicon film and method of fabrication Jan. 31, 2006
6969916 Substrate having built-in semiconductor apparatus and manufacturing method thereof Nov. 29, 2005
6930039 Method of fabricating a contact structure having a composite barrier layer between a platinum layer and a polysilicon plug Aug. 16, 2005
6927165 Method and apparatus for processing substrates and method for manufacturing a semiconductor device Aug. 9, 2005
6916740 Method of forming smooth polycrystalline silicon electrodes for molecular electronic devices Jul. 12, 2005
6911384 Gate structure with independently tailored vertical doping profile Jun. 28, 2005
6905963 Fabrication of B-doped silicon film by LPCVD method using BCI3 and SiH4 gases Jun. 14, 2005
6902973 Hemi-spherical grain silicon enhancement Jun. 7, 2005
6849498 Method of manufacturing semiconductor capacitor Feb. 1, 2005
6828232 Semiconductor structure having in-situ formed unit resistors and method for fabrication Dec. 7, 2004
6821874 Method for depositing tungsten silicide film and method for preparing gate electrode/wiring Nov. 23, 2004
6818537 Method of manufacturing a contact plug for a semiconductor device Nov. 16, 2004
6797558 Methods of forming a capacitor with substantially selective deposite of polysilicon on a substantially crystalline capacitor dielectric layer Sep. 28, 2004
6790720 Method for fabricating a MOSFET and reducing line width of gate structure Sep. 14, 2004
6787434 Method of fabricating polysilicon film by nickel/copper induced lateral crystallization Sep. 7, 2004
6787465 Method of forming a metal to polysilicon contact in oxygen environment Sep. 7, 2004
6693032 Method of forming a contact structure having an anchoring portion Feb. 17, 2004
6693024 Semiconductor component with a semiconductor body having a multiplicity of pores and method for fabricating Feb. 17, 2004
6677233 Material deposition from a liquefied gas solution Jan. 13, 2004
6638860 Method and apparatus for processing substrates and method for manufacturing a semiconductor device Oct. 28, 2003
6620635 Damascene resistor and method for measuring the width of same Sep. 16, 2003
6610569 Semiconductor device and process of producing the same Aug. 26, 2003
6605535 Method of filling trenches using vapor-liquid-solid mechanism Aug. 12, 2003
6589867 Method of fabricating a contact structure having a composite barrier layer between a platinum layer and a polysilicon plug Jul. 8, 2003

1 2 3 4 5


 
 
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