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Class Information
Number: 438/681
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > Utilizing chemical vapor deposition (i.e., cvd) > Of organo-metallic precursor (i.e., mocvd)
Description: Processes where the chemical vapor deposition process utilizes an organo-metallic compound.

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11

Patent Number Title Of Patent Date Issued
8703103 Volatile imidazoles and group 2 imidazole based metal precursors Apr. 22, 2014
8703614 Metal organic chemical vapor deposition apparatus and method Apr. 22, 2014
8658249 Heteroleptic iridium precursors to be used for the deposition of iridium-containing films Feb. 25, 2014
8563353 Method of making a multicomponent film Oct. 22, 2013
8551248 Showerhead for CVD depositions Oct. 8, 2013
8551818 Method of manufacturing electronic device and display Oct. 8, 2013
8551890 Showerhead for CVD depositions Oct. 8, 2013
8536656 Self-aligned contacts for high k/metal gate process flow Sep. 17, 2013
8435905 Manufacturing method of semiconductor device, and substrate processing apparatus May. 7, 2013
8431419 UV absorption based monitor and control of chloride gas stream Apr. 30, 2013
8415180 Method for fabricating wafer product and method for fabricating gallium nitride based semiconductor optical device Apr. 9, 2013
8409983 Chemical vapor deposition apparatus, film forming method, and method of manufacturing semiconductor device Apr. 2, 2013
8409985 Methods for growing low-resistivity tungsten for high aspect ratio and small features Apr. 2, 2013
8349726 Method for fabricating a structure for a semiconductor device using a halogen based precursor Jan. 8, 2013
8349738 Metal precursors for deposition of metal-containing films Jan. 8, 2013
8333840 Metal organic chemical vapor deposition apparatus and method Dec. 18, 2012
8318590 Methods and systems for forming thin films Nov. 27, 2012
8299341 Fabrication of vertically aligned metallic nanopillars Oct. 30, 2012
8278216 Selective capping of copper Oct. 2, 2012
8258060 Sheet structure, semiconductor device and method of growing carbon structure Sep. 4, 2012
8244482 Photometrically modulated delivery of reagents Aug. 14, 2012
8222141 Method for producing an organometallic layer Jul. 17, 2012
8193027 Method of making a multicomponent film Jun. 5, 2012
8178446 Strained metal nitride films and method of forming May. 15, 2012
8173545 Method for the fabrication of a transistor gate using at least one electron beam May. 8, 2012
8158512 Atomic layer deposition method and semiconductor device formed by the same Apr. 17, 2012
8119526 Method of forming a metal layer and a method of fabricating a semiconductor device Feb. 21, 2012
8114787 Integrated circuit nanowires Feb. 14, 2012
8101521 Methods for improving uniformity and resistivity of thin tungsten films Jan. 24, 2012
8076243 Metal precursors for deposition of metal-containing films Dec. 13, 2011
8062977 Ternary tungsten-containing resistive thin films Nov. 22, 2011
8056500 Thermal reactor with improved gas flow distribution Nov. 15, 2011
8048805 Methods for growing low-resistivity tungsten film Nov. 1, 2011
8026184 Semiconductor device and method of manufacturing the same Sep. 27, 2011
7985680 Method of forming aluminum-doped metal carbonitride gate electrodes Jul. 26, 2011
7968360 Method of producing nitride semiconductor light-emitting device using a surfactant material Jun. 28, 2011
7955972 Methods for growing low-resistivity tungsten for high aspect ratio and small features Jun. 7, 2011
7951711 Metal precursors for semiconductor applications May. 31, 2011
7877865 Method of forming a wiring having carbon nanotube Feb. 1, 2011
7858536 Semiconductor device and method for manufacturing semiconductor device Dec. 28, 2010
7858522 Method for reducing carbon monoxide poisoning in a thin film deposition system Dec. 28, 2010
7858523 Unsymmetrical ligand sources, reduced symmetry metal-containing compounds, and systems and methods including same Dec. 28, 2010
7851360 Organometallic precursors for seed/barrier processes and methods thereof Dec. 14, 2010
7825020 Method for manufacturing semiconductor device Nov. 2, 2010
7820244 Method of forming a layer and method of removing reaction by-products Oct. 26, 2010
7816278 In-situ hybrid deposition of high dielectric constant films using atomic layer deposition and chemical vapor deposition Oct. 19, 2010
7807491 Method of manufacturing nitride semiconductor light-emitting device Oct. 5, 2010
7807573 Laser assisted chemical vapor deposition for backside die marking and structures formed thereby Oct. 5, 2010
7803707 Metal silicide nanowires and methods for their production Sep. 28, 2010
7799676 Method of manufacturing a contact structure to avoid open issue Sep. 21, 2010

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