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Class Information
Number: 438/680
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > Utilizing chemical vapor deposition (i.e., cvd)
Description: Processes wherein the conductive material is deposited utilizing a vapor phase precursor which decomposes or reacts either in the gaseous phase or on a substrate.










Sub-classes under this class:

Class Number Class Name Patents
438/681 Of organo-metallic precursor (i.e., mocvd) 516


Patents under this class:

Patent Number Title Of Patent Date Issued
8709957 Spalling utilizing stressor layer portions Apr. 29, 2014
8703613 Plasma processing apparatus and plasma processing method Apr. 22, 2014
8685855 Tray for CVD and method for forming film using same Apr. 1, 2014
8685850 System and method of plating conductive gate contacts on metal gates for self-aligned contact interconnections Apr. 1, 2014
8679976 Method of manufacturing graphene by using germanium layer Mar. 25, 2014
8679922 Method of producing semiconductor device and method of producing solid-state image pickup device Mar. 25, 2014
8669182 Metal cap with ultra-low .kappa. dielectric material for circuit interconnect applications Mar. 11, 2014
8664023 Deposition method, deposition film, and method for producing organic electroluminescence display device Mar. 4, 2014
8658521 Method and device for layer deposition Feb. 25, 2014
8658249 Heteroleptic iridium precursors to be used for the deposition of iridium-containing films Feb. 25, 2014
8636882 Producing method of semiconductor device and substrate processing apparatus Jan. 28, 2014
8633105 Method of fabricating a self-aligning damascene memory structure Jan. 21, 2014
8629062 Method for forming tungsten film having low resistivity and good surface roughness and method for forming wiring of semiconductor device using the same Jan. 14, 2014
8629031 Method for manufacturing SOI substrate and semiconductor device Jan. 14, 2014
8624340 Plasma processing apparatus and method thereof Jan. 7, 2014
8623764 Composition and methods for forming metal films on semiconductor substrates using supercritical solvents Jan. 7, 2014
8618003 Method of making electronic devices using selective deposition Dec. 31, 2013
8614147 Method of manufacturing a semiconductor device Dec. 24, 2013
8592291 Fabrication of large-area hexagonal boron nitride thin films Nov. 26, 2013
8586479 Methods for forming a contact metal layer in semiconductor devices Nov. 19, 2013
8586393 Stress sensor for in-situ measurement of package-induced stress in semiconductor devices Nov. 19, 2013
8580686 Silicidation and/or germanidation on SiGe or Ge by cosputtering Ni and Ge and using an intralayer for thermal stability Nov. 12, 2013
8574985 Methods for depositing high-K dielectrics Nov. 5, 2013
8557720 Substrate processing apparatus and method of manufacturing a semiconductor device Oct. 15, 2013
8557697 Vapor deposition methods for forming a metal-containing layer on a substrate Oct. 15, 2013
8551890 Showerhead for CVD depositions Oct. 8, 2013
8551885 Method for reducing tungsten roughness and improving reflectivity Oct. 8, 2013
8551880 Ammonia-based plasma treatment for metal fill in narrow features Oct. 8, 2013
8551851 Titanium-based high-K dielectric films Oct. 8, 2013
8551818 Method of manufacturing electronic device and display Oct. 8, 2013
8551248 Showerhead for CVD depositions Oct. 8, 2013
8536491 Rotatable and tunable heaters for semiconductor furnace Sep. 17, 2013
8536058 Method of growing electrical conductors Sep. 17, 2013
8536057 Thin film deposition apparatus and method of manufacturing organic light emitting device by using the same Sep. 17, 2013
8519489 Method and apparatus for tunable electrical conductivity Aug. 27, 2013
8513116 Atomic layer deposition of tungsten materials Aug. 20, 2013
8507381 Method for fabricating silicon and/or germanium nanowires Aug. 13, 2013
8497196 Semiconductor device, method for fabricating the same and apparatus for fabricating the same Jul. 30, 2013
8492196 Semiconductor device and method of forming prefabricated EMI shielding frame with cavities containing penetrable material over semiconductor die Jul. 23, 2013
8486835 Czochralski growth of randomly oriented polysilicon and use of randomly oriented polysilicon dummy wafers Jul. 16, 2013
8486193 Systems for forming semiconductor materials by atomic layer deposition Jul. 16, 2013
8481381 Superior integrity of high-k metal gate stacks by preserving a resist material above end caps of gate electrode structures Jul. 9, 2013
8476161 Method for forming Cu electrical interconnection film Jul. 2, 2013
8471353 Mesa photodiode and method for manufacturing the same Jun. 25, 2013
8466069 Method for manufacturing semiconductor device Jun. 18, 2013
8455365 Self-aligned carbon electronics with embedded gate electrode Jun. 4, 2013
8455360 Method for fabricating storage node of semiconductor device Jun. 4, 2013
8455352 Method for removing native oxide and associated residue from a substrate Jun. 4, 2013
8455314 Transistors comprising high-K metal gate electrode structures and embedded strain-inducing semiconductor alloys formed in a late stage Jun. 4, 2013
8450819 Plasma doping method and apparatus thereof May. 28, 2013











 
 
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