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Class Information
Number: 438/679
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > Evaporative coating of conductive layer
Description: Processes wherein the formation of the conductive layer is accomplished through the evaporation of the conductive material from a source and the deposition of the same on the semiconductive substrate.










Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8673777 In-line deposition system and process for deposition of a thin film layer Mar. 18, 2014
8575027 Sputtering and aligning multiple layers having different boundaries Nov. 5, 2013
8492196 Semiconductor device and method of forming prefabricated EMI shielding frame with cavities containing penetrable material over semiconductor die Jul. 23, 2013
8435829 Method for producing a light-emitting element May. 7, 2013
8409985 Methods for growing low-resistivity tungsten for high aspect ratio and small features Apr. 2, 2013
8349731 Methods for forming copper diffusion barriers for semiconductor interconnect structures Jan. 8, 2013
8329502 Conformal coating of highly structured surfaces Dec. 11, 2012
8299341 Fabrication of vertically aligned metallic nanopillars Oct. 30, 2012
8268725 Horizontal coffee-stain method using control structure to pattern self-organized line structures Sep. 18, 2012
8198120 Optical article Jun. 12, 2012
8183082 Fabrication of organic solar array for applications in microelectromechanical systems and others May. 22, 2012
8168543 Methods of forming a layer for barrier applications in an interconnect structure May. 1, 2012
8133811 Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, computer program and storage medium Mar. 13, 2012
8105872 Semiconductor device and method of forming prefabricated EMI shielding frame with cavities containing penetrable material over semiconductor die Jan. 31, 2012
8101521 Methods for improving uniformity and resistivity of thin tungsten films Jan. 24, 2012
8093136 Method for manufacturing SOI substrate Jan. 10, 2012
8087380 Evaporative system for solar cell fabrication Jan. 3, 2012
8056500 Thermal reactor with improved gas flow distribution Nov. 15, 2011
8053364 Closed-loop sputtering controlled to enhance electrical characteristics in deposited layer Nov. 8, 2011
8048800 Fabrication method of two-terminal semiconductor component using trench technology Nov. 1, 2011
8048805 Methods for growing low-resistivity tungsten film Nov. 1, 2011
7989798 Fabricating arrays of metallic nanostructures Aug. 2, 2011
7972960 Method for manufacturing thin film Jul. 5, 2011
7956292 Printed circuit board manufacturing method, printed circuit board, and electronic apparatus Jun. 7, 2011
7955972 Methods for growing low-resistivity tungsten for high aspect ratio and small features Jun. 7, 2011
7880292 Semiconductor device and fabricating method thereof Feb. 1, 2011
7867904 Method and system for isolated and discretized process sequence integration Jan. 11, 2011
7855147 Methods and apparatus for engineering an interface between a diffusion barrier layer and a seed layer Dec. 21, 2010
7833899 Multi-layer thick metallization structure for a microelectronic device, intergrated circuit containing same, and method of manufacturing an integrated circuit containing same Nov. 16, 2010
7816254 Film forming method, fabrication process of semiconductor device, computer-readable recording medium and sputtering apparatus Oct. 19, 2010
7799602 Semiconductor device and method of forming a shielding layer over a semiconductor die after forming a build-up interconnect structure Sep. 21, 2010
7795144 Method for forming electrode structure for use in light emitting device and method for forming stacked structure Sep. 14, 2010
7767574 Method of forming micro metal bump Aug. 3, 2010
7763535 Method for producing a metal backside contact of a semiconductor component, in particular, a solar cell Jul. 27, 2010
7745332 PVD-based metallization methods for fabrication of interconnections in semiconductor devices Jun. 29, 2010
7709383 Film forming method, and substrate-processing apparatus May. 4, 2010
7674694 Process for manufacturing a TFT device with source and drain regions having gradual dopant profile Mar. 9, 2010
7659204 Oxidized barrier layer Feb. 9, 2010
7618893 Methods of forming a layer for barrier applications in an interconnect structure Nov. 17, 2009
7601639 Method for conditioning a microelectronics device deposition chamber Oct. 13, 2009
7592255 Fabricating arrays of metallic nanostructures Sep. 22, 2009
7589017 Methods for growing low-resistivity tungsten film Sep. 15, 2009
7531398 Methods and devices employing metal layers in gates to introduce channel strain May. 12, 2009
7528071 Method for fabricating semiconductor device May. 5, 2009
7482631 Film formation apparatus and film formation method Jan. 27, 2009
7473642 Method for fabricating conductive layer Jan. 6, 2009
7351596 Method and system for operating a physical vapor deposition process Apr. 1, 2008
7351657 Method and apparatus for applying external coating to grid array packages for increased reliability and performance Apr. 1, 2008
7348274 Method of aligning carbon nanotubes and method of manufacturing field emission device using the same Mar. 25, 2008
7341942 Method for forming metal line of semiconductor device Mar. 11, 2008

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