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Class Information
Number: 438/674
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > Selective deposition of conductive layer
Description: Processes wherein the conductive material is deposited upon selected regions of the substrate.


Sub-classes under this class:

Class Number Class Name Patents
438/675 Plug formation (i.e., in viahole) 792
438/677 Pretreatment of surface to enhance or retard deposition 304
438/676 Utilizing electromagnetic or wave energy 154


Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
7618892 Via hole forming method Nov. 17, 2009
RE40983 Method to plate C4 to copper stud Nov. 17, 2009
7615488 Method for forming pattern, thin film transistor, display device and method for manufacturing the same, and television device Nov. 10, 2009
7615489 Method for forming metal interconnects and reducing metal seed layer overhang Nov. 10, 2009
7608531 Semiconductor device, electronic device, and method of manufacturing semiconductor device Oct. 27, 2009
7602061 Semiconductor device and method for manufacturing semiconductor device Oct. 13, 2009
7595268 Semiconductor package having re-distribution lines for supplying power and a method for manufacturing the same Sep. 29, 2009
7563713 Semiconductor devices having plated contacts, and methods of manufacturing the same Jul. 21, 2009
7553757 Semiconductor device and method of manufacturing the same Jun. 30, 2009
7547567 Method of forming film pattern, device, method of manufacturing device, electro-optical device, and electronic apparatus Jun. 16, 2009
7544604 Tantalum lanthanide oxynitride films Jun. 9, 2009
7534724 Method for manufacturing wiring, thin film transistor, light emitting device and liquid crystal display device, and droplet discharge apparatus for forming the same May. 19, 2009
7524757 Method for manufacturing multi-level transistor comprising forming selective epitaxial growth layer Apr. 28, 2009
7521361 Method for manufacturing wiring substrate Apr. 21, 2009
7517785 Electronic interconnects and methods of making same Apr. 14, 2009
7517794 Method for fabricating nanoscale features Apr. 14, 2009
7510893 Method of manufacturing a display device using droplet emitting means Mar. 31, 2009
7507661 Method of forming narrowly spaced flash memory contact openings and lithography masks Mar. 24, 2009
7504287 Methods for fabricating an integrated circuit Mar. 17, 2009
7501315 Methods and devices for forming nanostructure monolayers and devices including such monolayers Mar. 10, 2009
7498258 Through-hole conductors for semiconductor substrates and method for making same Mar. 3, 2009
7498261 Method and apparatus for forming metal film Mar. 3, 2009
7494908 Apparatus for integration of barrier layer and seed layer Feb. 24, 2009
7494925 Method for making through-hole conductors for semiconductor substrates Feb. 24, 2009
7482631 Film formation apparatus and film formation method Jan. 27, 2009
7470619 Interconnect with high aspect ratio plugged vias Dec. 30, 2008
7462513 Methods for making printed fuse devices Dec. 9, 2008
7452749 Method for manufacturing flip-chip type semiconductor device featuring nickel electrode pads, and plating apparatus used in such method Nov. 18, 2008
7425504 Systems and methods for plasma etching Sep. 16, 2008
7419903 Thin films Sep. 2, 2008
7404249 Method of manufacturing an inductance Jul. 29, 2008
7405157 Methods for the electrochemical deposition of copper onto a barrier layer of a work piece Jul. 29, 2008
7405155 Circuit package and method of plating the same Jul. 29, 2008
7402517 Method and apparatus for selective deposition of materials to surfaces and substrates Jul. 22, 2008
7400045 Semiconductor device and method for fabricating the same Jul. 15, 2008
7399705 Method for producing a local coating and combinatory substrate having such coating Jul. 15, 2008
7399704 Fabrication method of a semiconductor device using liquid repellent film Jul. 15, 2008
7396447 Through-hole conductors for semiconductor substrates and system for making same Jul. 8, 2008
7393781 Capping of metal interconnects in integrated circuit electronic devices Jul. 1, 2008
7375012 Method of forming multilayer film May. 20, 2008
7371682 Production method for electronic component and electronic component May. 13, 2008
7365008 Pattern forming method, device, method of manufacture thereof, electro-optical apparatus, and electronic apparatus Apr. 29, 2008
7364935 Common word line edge contact phase-change memory Apr. 29, 2008
7358183 Method for manufacturing wiring and method for manufacturing semiconductor device Apr. 15, 2008
7358185 Device having contact pad with a conductive layer and a conductive passivation layer Apr. 15, 2008
7344982 System and method of selectively depositing Ruthenium films by digital chemical vapor deposition Mar. 18, 2008
7332431 Method of manufacturing semiconductor device Feb. 19, 2008
7332037 Numerical jet machine for the application of a coating onto a substrate Feb. 19, 2008
7326649 Parylene-based flexible multi-electrode arrays for neuronal stimulation and recording and methods for manufacturing the same Feb. 5, 2008
7323411 Method of selective tungsten deposition on a silicon surface Jan. 29, 2008

1 2 3 4 5 6 7 8


 
 
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