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Class Information
Number: 438/673
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > And patterning of conductive layer > Tapered etching
Description: Processes wherein the patterning step is accomplished through a tapering etching step.










Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8709944 Method to alter silicide properties using GCIB treatment Apr. 29, 2014
8703607 Method to alter silicide properties using GCIB treatment Apr. 22, 2014
8597992 Transistor and manufacturing method of the same Dec. 3, 2013
8598036 Method for forming fine pattern having variable width and method for manufacturing semiconductor device using the same Dec. 3, 2013
8501618 Semiconductor device and method of forming RDL wider than contact pad along first axis and narrower than contact pad along second axis Aug. 6, 2013
8491984 Structure resulting from chemical shrink process over BARC (bottom anti-reflective coating) Jul. 23, 2013
8455312 Fabrication methods for T-gate and inverted L-gate structure for high frequency devices and circuits Jun. 4, 2013
8435890 Method to alter silicide properties using GCIB treatment May. 7, 2013
8431486 Interconnect structure for improved time dependent dielectric breakdown Apr. 30, 2013
8420533 Metallization system of a semiconductor device comprising rounded interconnects formed by hard mask rounding Apr. 16, 2013
8415804 Semiconductor chip, method of fabricating the same, and stack module and memory card including the same Apr. 9, 2013
8394718 Methods of forming self-aligned through silicon via Mar. 12, 2013
8389405 Method for forming fine pattern having variable width and method for manufacturing semiconductor device using the same Mar. 5, 2013
8349728 Method of fabricating copper damascene and dual damascene interconnect wiring Jan. 8, 2013
8334153 Semiconductor light emitting device and method of fabricating semiconductor light emitting device Dec. 18, 2012
8329572 Semiconductor device and method for fabricating the same Dec. 11, 2012
8324103 Vias and method of making Dec. 4, 2012
8298928 Manufacturing method of a semiconductor device and method for creating a layout thereof Oct. 30, 2012
8293639 Method for controlling ADI-AEI CD difference ratio of openings having different sizes Oct. 23, 2012
8293644 Methods of manufacturing a semiconductor memory device Oct. 23, 2012
8252683 3D interconnection structure and method of manufacturing the same Aug. 28, 2012
8241940 Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturing Aug. 14, 2012
8241992 Method for air gap interconnect integration using photo-patternable low k material Aug. 14, 2012
8222135 Increasing reliability of copper-based metallization structures in a microstructure device by using aluminum nitride Jul. 17, 2012
8187971 Method to alter silicide properties using GCIB treatment May. 29, 2012
8158516 Method for manufacturing semiconductor device Apr. 17, 2012
8120122 Self-aligned masks using multi-temperature phase-change materials Feb. 21, 2012
8110496 Method for performing chemical shrink process over BARC (bottom anti-reflective coating) Feb. 7, 2012
8101092 Method for controlling ADI-AEI CD difference ratio of openings having different sizes Jan. 24, 2012
8071474 Method of manufacturing semiconductor device suitable for forming wiring using damascene method Dec. 6, 2011
8062976 Low cost method of fabrication of vertical interconnections combined to metal top electrodes Nov. 22, 2011
8058166 Method of manufacturing a semiconductor device Nov. 15, 2011
8043961 Method of forming a bond pad Oct. 25, 2011
8003538 Method for producing a structure on the surface of a substrate Aug. 23, 2011
8004087 Semiconductor device with dual damascene wirings and method for manufacturing same Aug. 23, 2011
7998868 Self-aligned masks using multi-temperature phase-change materials Aug. 16, 2011
7989347 Process for filling recessed features in a dielectric substrate Aug. 2, 2011
7981784 Methods of manufacturing a semiconductor device Jul. 19, 2011
7947534 Integrated circuit packaging system including a non-leaded package May. 24, 2011
7935623 Semiconductor device and method for fabricating the same May. 3, 2011
7855146 Photo-focus modulation method for forming transistor gates and related transistor devices Dec. 21, 2010
7829458 Method of forming a wiring structure in a semiconductor device Nov. 9, 2010
7820456 Semiconductor device and manufacturing method thereof Oct. 26, 2010
7811931 Semiconductor device having a modified dielectric film Oct. 12, 2010
7754562 Semiconductor device comprising capacitor and method of fabricating the same Jul. 13, 2010
7749904 Method of forming a dual damascene structure Jul. 6, 2010
7737533 Low voltage transient voltage suppressor with tapered recess extending into substrate of device allowing for reduced breakdown voltage Jun. 15, 2010
7709367 Method for fabricating storage node contact in semiconductor device May. 4, 2010
7704874 Method for fabricating a frontside through-wafer via in a processed wafer and related structure Apr. 27, 2010
7704877 Method of manufacturing semiconductor device and control system Apr. 27, 2010

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