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Class Information
Number: 438/672
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > And patterning of conductive layer > Plug formation (i.e., in viahole)
Description: Processes wherein the patterning step results in the remaining conductive material being recessed below the top surface of the substrate.










Patents under this class:
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Patent Number Title Of Patent Date Issued
6962874 Method for fabricating semiconductor device Nov. 8, 2005
6962875 Variable contact method and structure Nov. 8, 2005
6960520 Method for forming metal lines in a semiconductor device Nov. 1, 2005
6958291 Interconnect with composite barrier layers and method for fabricating the same Oct. 25, 2005
6958547 Interconnect structures containing conductive electrolessly deposited etch stop layers, liner layers, and via plugs Oct. 25, 2005
6955948 Method of manufacturing a component built-in module Oct. 18, 2005
6953744 Methods of fabricating integrated circuit devices providing improved short prevention Oct. 11, 2005
6949007 System and method for multi-stage process control in film removal Sep. 27, 2005
6949464 Contact/via force fill techniques Sep. 27, 2005
6946336 Method of making a nanoscale electronic device Sep. 20, 2005
6946390 Photolithographic production of trenches in a substrate Sep. 20, 2005
6943106 Methods of fabricating interconnects for semiconductor components including plating solder-wetting material and solder filling Sep. 13, 2005
6943109 Method of manufacturing a semiconductor element Sep. 13, 2005
6930019 Method for forming MOS transistor Aug. 16, 2005
6930043 Method for forming DRAM cell bit line and bit line contact structure Aug. 16, 2005
6927082 Method of evaluating the quality of a contact plug fill Aug. 9, 2005
6927141 Process for forming fast recovery diode with a single large area P/N junction Aug. 9, 2005
6924227 Slurry for chemical mechanical polishing and method of manufacturing semiconductor device Aug. 2, 2005
6919265 Semiconductor device with elongated interconnecting member and fabrication method thereof Jul. 19, 2005
6916734 Contact-forming method Jul. 12, 2005
6916737 Methods of manufacturing a semiconductor device Jul. 12, 2005
6916745 Structure and method for forming a trench MOSFET having self-aligned features Jul. 12, 2005
6913995 Method of forming a barrier metal in a semiconductor device Jul. 5, 2005
6911372 Method of fabricating storage capacitor in semiconductor memory device, and storage capacitor structure Jun. 28, 2005
6908826 Semiconductor device and method of fabricating the same Jun. 21, 2005
6908853 Method of fabricating a semiconductor device having reduced contact resistance Jun. 21, 2005
6908856 Method for producing electrical through hole interconnects and devices made thereof Jun. 21, 2005
6908860 Method for manufacturing semiconductor device and apparatus for manufacturing thereof Jun. 21, 2005
6908862 HDP-CVD dep/etch/dep process for improved deposition into high aspect ratio features Jun. 21, 2005
6903009 Methods for fabricating a contact for an integrated circuit Jun. 7, 2005
6903024 Method of manufacturing storage nodes of a semiconductor memory device using a two-step etching process Jun. 7, 2005
6900124 Patterning for elliptical Vss contact on flash memory May. 31, 2005
6897125 Methods of forming backside connections on a wafer stack May. 24, 2005
6897145 Method for fabricating semiconductor device by forming damascene interconnections May. 24, 2005
6893959 Method to form selective cap layers on metal features with narrow spaces May. 17, 2005
6893960 Method for manufacturing a semiconductor device May. 17, 2005
6890846 Method for manufacturing semiconductor integrated circuit device May. 10, 2005
6890852 Semiconductor device and manufacturing method of the same May. 10, 2005
6891244 Plug structure having low contact resistance and method of manufacturing May. 10, 2005
6887788 Method of manufacturing semiconductor device May. 3, 2005
6887790 Method of forming dummy copper plug to improve low k structure mechanical strength and plug fill uniformity May. 3, 2005
6887802 Method of manufacturing semiconductor device and semiconductor device May. 3, 2005
6884715 Method for forming a self-aligned contact with a silicide or damascene conductor and the structure formed thereby Apr. 26, 2005
6884724 Method for dishing reduction and feature passivation in polishing processes Apr. 26, 2005
6881666 Method of fabricating semiconductor device Apr. 19, 2005
6878608 Method of manufacture of silicon based package Apr. 12, 2005
6875689 Method of patterning lines in semiconductor devices Apr. 5, 2005
6875690 Semiconductor device having self-aligned contact plug and method for fabricating the same Apr. 5, 2005
6873052 Porous, film, wiring structure, and method of forming the same Mar. 29, 2005
6869810 Manufacturing method of semiconductor device Mar. 22, 2005

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