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Class Information
Number: 438/672
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > And patterning of conductive layer > Plug formation (i.e., in viahole)
Description: Processes wherein the patterning step results in the remaining conductive material being recessed below the top surface of the substrate.










Patents under this class:
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Patent Number Title Of Patent Date Issued
7199051 Method for fabricating semiconductor device capable of preventing damages to conductive structure Apr. 3, 2007
7199047 Bi-layer etch stop process for defect reduction and via stress migration improvement Apr. 3, 2007
7199043 Method of forming copper wiring in semiconductor device Apr. 3, 2007
7195966 Methods of fabricating semiconductor devices including polysilicon resistors and related devices Mar. 27, 2007
7192865 Semiconductor device and process for producing the same Mar. 20, 2007
7192864 Method of forming interconnection lines for semiconductor device Mar. 20, 2007
7189642 Methods of fabricating interconnects including depositing a first material in the interconnect with a thickness of angstroms and a low temperature for semiconductor components Mar. 13, 2007
7186647 Method for fabricating semiconductor device having landing plug contact structure Mar. 6, 2007
7183206 Fabrication of semiconductor devices Feb. 27, 2007
7179740 Integrated circuit with improved interconnect structure and process for making same Feb. 20, 2007
7179732 Interconnection structure and fabrication method thereof Feb. 20, 2007
7176118 Circuit constructions Feb. 13, 2007
7173305 Self-aligned contact for silicon-on-insulator devices Feb. 6, 2007
7172966 Method for fabricating metallic interconnects on electronic components Feb. 6, 2007
7172962 Method of manufacturing a semiconductor device Feb. 6, 2007
7169698 Sacrificial inorganic polymer intermetal dielectric damascene wire and via liner Jan. 30, 2007
7163883 Edge seal for a semiconductor device Jan. 16, 2007
7153771 Method for forming metal contact in semiconductor device Dec. 26, 2006
7153727 Semiconductor device and method of manufacturing the same Dec. 26, 2006
7151025 Method of manufacturing a semiconductor device with self-aligned contacts Dec. 19, 2006
7144808 Integration flow to prevent delamination from copper Dec. 5, 2006
7144805 Method of submicron metallization using electrochemical deposition of recesses including a first deposition at a first current density and a second deposition at an increased current density Dec. 5, 2006
7141495 Methods and forming structures, structures and apparatuses for forming structures Nov. 28, 2006
7135406 Method for damascene formation using plug materials having varied etching rates Nov. 14, 2006
7129160 Method for simultaneously removing multiple conductive materials from microelectronic substrates Oct. 31, 2006
7125795 Fabrication method for microstructures with high aspect ratios Oct. 24, 2006
7122471 Method for preventing voids in metal interconnects Oct. 17, 2006
7122467 Method for fabricating semiconductor device Oct. 17, 2006
7122425 Methods of forming semiconductor constructions Oct. 17, 2006
7119015 Method for forming polysilicon plug of semiconductor device Oct. 10, 2006
7119013 Method for fabricating semiconductor device with fine patterns Oct. 10, 2006
7119000 Method of manufacturing semiconductor device Oct. 10, 2006
7118957 Semiconductor integrated circuit including a DRAM and an analog circuit Oct. 10, 2006
7115506 Method of making a contact structure Oct. 3, 2006
7115433 Contact structure of wiring and a method for manufacturing the same Oct. 3, 2006
7109126 Method of manufacturing a semiconductor integrated circuit device Sep. 19, 2006
7109080 Method of forming capacitor over bitline contact Sep. 19, 2006
7105438 Manufacturing method of a semiconductor device with a metal gate electrode and a structure thereof Sep. 12, 2006
7101785 Formation of a contact in a device, and the device including the contact Sep. 5, 2006
7101788 Semiconductor devices and methods of manufacturing such semiconductor devices Sep. 5, 2006
7094672 Method for forming self-aligned contact in semiconductor device Aug. 22, 2006
7094687 Reduced dry etching lag Aug. 22, 2006
7091087 Optimized flash memory cell Aug. 15, 2006
7091088 UV-blocking etch stop layer for reducing UV-induced charging of charge storage layer in memory devices in BEOL processing Aug. 15, 2006
7091131 Method of forming integrated circuit structures in silicone ladder polymer Aug. 15, 2006
7087524 Method of forming copper wiring in semiconductor device Aug. 8, 2006
7084503 Semiconductor device and fabricating method thereof Aug. 1, 2006
7078247 Early detection of contact liner integrity by chemical reaction Jul. 18, 2006
7070687 Apparatus and method of surface treatment for electrolytic and electroless plating of metals in integrated circuit manufacturing Jul. 4, 2006
7071055 Method of forming a contact structure including a vertical barrier structure and two barrier layers Jul. 4, 2006

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