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Class Information
Number: 438/671
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > And patterning of conductive layer > Utilizing multilayered mask
Description: Processes involving the use of a mask composed of plural layers.










Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8709943 Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region Apr. 29, 2014
8709947 Method for forming pattern Apr. 29, 2014
8703579 Method of manufacturing semiconductor device Apr. 22, 2014
8703612 Process for forming contact plugs Apr. 22, 2014
8658526 Methods for increased array feature density Feb. 25, 2014
8652965 Production method for thick film metal electrode and production method for thick film resist Feb. 18, 2014
8629052 Methods of forming semiconductor devices having narrow conductive line patterns Jan. 14, 2014
8603884 Methods of fabricating substrates Dec. 10, 2013
8598036 Method for forming fine pattern having variable width and method for manufacturing semiconductor device using the same Dec. 3, 2013
8586478 Method of making a semiconductor device Nov. 19, 2013
8580697 CVD flowable gap fill Nov. 12, 2013
8563410 End-cut first approach for critical dimension control Oct. 22, 2013
8563431 Method for manufacturing semiconductor device Oct. 22, 2013
8558385 Interconnection architecture for semiconductor device Oct. 15, 2013
8546258 Method of fabricating metal contact using double patterning technology and device formed thereby Oct. 1, 2013
8530352 Methods of patterning a material Sep. 10, 2013
8513114 Method for forming a dual damascene interconnect structure Aug. 20, 2013
8492249 Methods of forming catalytic nanopads Jul. 23, 2013
8486831 Semiconductor device manufacturing method Jul. 16, 2013
8481426 Method of forming pattern structure and method of fabricating semiconductor device using the same Jul. 9, 2013
8461044 Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region Jun. 11, 2013
8455312 Fabrication methods for T-gate and inverted L-gate structure for high frequency devices and circuits Jun. 4, 2013
8445379 Method of manufacturing semiconductor device May. 21, 2013
8431474 Three dimensional multilayer circuit Apr. 30, 2013
8420499 Concave-convex pattern forming method and magnetic tunnel junction element forming method Apr. 16, 2013
8399357 Method of manufacturing semiconductor device Mar. 19, 2013
8399359 Manufacturing method for dual damascene structure Mar. 19, 2013
8389405 Method for forming fine pattern having variable width and method for manufacturing semiconductor device using the same Mar. 5, 2013
8349630 Methods for manufacturing thin film transistor array substrate and display panel Jan. 8, 2013
8324094 Semiconductor device and manufacturing method thereof Dec. 4, 2012
8318520 Method of microminiaturizing a nano-structure Nov. 27, 2012
8309460 Methods of manufacturing semiconductor devices Nov. 13, 2012
8298931 Dual damascene with amorphous carbon for 3D deep via/trench application Oct. 30, 2012
8298928 Manufacturing method of a semiconductor device and method for creating a layout thereof Oct. 30, 2012
8288272 Semiconductor device and manufacturing method thereof Oct. 16, 2012
8288289 Method of fabricating semiconductor device Oct. 16, 2012
8283251 Method of manufacturing wafer level package Oct. 9, 2012
8273634 Methods of fabricating substrates Sep. 25, 2012
8241992 Method for air gap interconnect integration using photo-patternable low k material Aug. 14, 2012
8236697 Method for manufacturing semiconductor device Aug. 7, 2012
8222051 Manufacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server Jul. 17, 2012
8222140 Pitch division patterning techniques Jul. 17, 2012
8216939 Methods of forming openings Jul. 10, 2012
8203207 Electronic device packages and methods of formation Jun. 19, 2012
8193090 Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region Jun. 5, 2012
8183152 Method of fabricating semiconductor device May. 22, 2012
8164185 Semiconductor device, reticle used in fabricating method for the same and fabrication method thereof Apr. 24, 2012
8158476 Integrated circuit fabrication Apr. 17, 2012
8138059 Semiconductor device manufacturing method Mar. 20, 2012
8080443 Method of making pillars using photoresist spacer mask Dec. 20, 2011

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