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Class Information
Number: 438/669
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > And patterning of conductive layer
Description: Processes including the selective removal of portions of the conductive layer formed upon the semiconductor substrate.










Sub-classes under this class:

Class Number Class Name Patents
438/672 Plug formation (i.e., in viahole) 1,548
438/673 Tapered etching 232
438/670 Utilizing lift-off 221
438/671 Utilizing multilayered mask 322


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18

Patent Number Title Of Patent Date Issued
8703570 Methods of fabricating substrates Apr. 22, 2014
8703608 Control of local environment for polysilicon conductors in integrated circuits Apr. 22, 2014
8704343 Borderless interconnect line structure self-aligned to upper and lower level contact vias Apr. 22, 2014
8704284 Semiconductor device having bit line expanding islands Apr. 22, 2014
8703611 Method for manufacturing a semiconductor structure Apr. 22, 2014
8692284 Interposer and manufacturing method thereof Apr. 8, 2014
8686392 Semiconductor device Apr. 1, 2014
8664111 Method of patterning a semiconductor device with hard mask Mar. 4, 2014
8658526 Methods for increased array feature density Feb. 25, 2014
8652900 Trench MOSFET with ultra high cell density and manufacture thereof Feb. 18, 2014
8652964 Method and apparatus for the formation of an electronic device Feb. 18, 2014
8637399 Etching composition, method of forming a metal pattern and method of manufacturing a display substrate Jan. 28, 2014
8629052 Methods of forming semiconductor devices having narrow conductive line patterns Jan. 14, 2014
8609539 Embedded semiconductor device substrate and production method thereof Dec. 17, 2013
8603884 Methods of fabricating substrates Dec. 10, 2013
8598035 Semiconductor dice with backside trenches filled with elastic material for improved attachment, packages using the same, and methods of making the same Dec. 3, 2013
8586469 Metal layer end-cut flow Nov. 19, 2013
8575022 Top corner rounding of damascene wire for insulator crack suppression Nov. 5, 2013
8569185 Method of fabricating gate electrode using a treated hard mask Oct. 29, 2013
8569168 Dual-metal self-aligned wires and vias Oct. 29, 2013
8546227 Contact for high-K metal gate device Oct. 1, 2013
8546253 Self-aligned polymer passivation/aluminum pad Oct. 1, 2013
8546255 Method for forming vias in a semiconductor substrate and a semiconductor device having the semiconductor substrate Oct. 1, 2013
8541306 Semiconductor device and method of double photolithography process for forming patterns of the semiconductor device Sep. 24, 2013
8536048 Method of manufacturing electronic component Sep. 17, 2013
8530352 Methods of patterning a material Sep. 10, 2013
8518824 Self aligning via patterning Aug. 27, 2013
8507778 Self-assembled polyhedra Aug. 13, 2013
8500952 Plasma confinement rings having reduced polymer deposition characteristics Aug. 6, 2013
8497186 Semiconductor devices and methods for forming patterned radiation blocking on a semiconductor device Jul. 30, 2013
8492249 Methods of forming catalytic nanopads Jul. 23, 2013
8492278 Method of forming a plurality of spaced features Jul. 23, 2013
8486831 Semiconductor device manufacturing method Jul. 16, 2013
8470617 Composition including material, methods of depositing material, articles including same and systems for depositing material Jun. 25, 2013
8470710 Methods of forming a metal pattern Jun. 25, 2013
8466007 Power semiconductor module and fabrication method Jun. 18, 2013
8450207 Method of fabricating a cell contact and a digit line for a semiconductor device May. 28, 2013
8431482 Integrated circuits and methods for processing integrated circuits with embedded features Apr. 30, 2013
8431446 Via formation for cross-point memory Apr. 30, 2013
8431485 Manufacturing method for a buried circuit structure Apr. 30, 2013
8415217 Patterning a gate stack of a non-volatile memory (NVM) with formation of a capacitor Apr. 9, 2013
8415212 Method of enhancing photoresist adhesion to rare earth oxides Apr. 9, 2013
8415249 Method of manufacturing semiconductor device Apr. 9, 2013
8409938 Method for fabricating semiconductor device Apr. 2, 2013
8409937 Producing transistor including multi-layer reentrant profile Apr. 2, 2013
8404586 Manufacturing method for semiconductor device Mar. 26, 2013
8399356 Manufacturing method of semiconductor device Mar. 19, 2013
8389394 Method of making semiconductor package having redistribution layer Mar. 5, 2013
8389406 Method of manufacturing semiconductor device Mar. 5, 2013
8389407 Methods of patterning materials Mar. 5, 2013

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