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Class Information
Number: 438/662
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > Including heat treatment of conductive layer > Subsequent fusing conductive layer > Utilizing laser
Description: Processes wherein the melting of the conductive layer is affected through the application of coherent radiant energy thereupon.










Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8679972 Method of depositing a diffusion barrier for copper interconnect applications Mar. 25, 2014
8642458 Method of fabricating nonvolatile memory device Feb. 4, 2014
8536054 Laser polishing of a solar cell substrate Sep. 17, 2013
8497450 On-the fly laser beam path dithering for enhancing throughput Jul. 30, 2013
8461011 Method for fabricating a back contact solar cell Jun. 11, 2013
8446924 Laser annealing method and apparatus May. 21, 2013
8426964 Micro bump and method for forming the same Apr. 23, 2013
8361873 Method of manufacturing an SOI substrate and method of manufacturing a semiconductor device Jan. 29, 2013
8357598 Method for manufacturing antenna and method for manufacturing semiconductor device Jan. 22, 2013
8329556 Localized annealing during semiconductor device fabrication Dec. 11, 2012
8298905 Method for forming functional element using metal-to-insulator transition material, functional element formed by method, method for producing functional device, and functional device produced Oct. 30, 2012
8173473 Laser system for processing solar wafers in a carrier May. 8, 2012
8170072 Laser annealing method and apparatus May. 1, 2012
8158513 Integrated circuit system employing backside energy source for electrical contact formation Apr. 17, 2012
8138085 Laser annealing for 3-D chip integration Mar. 20, 2012
8008171 Method of fabricating polycrystalline semiconductor Aug. 30, 2011
8003499 Laser irradiating device, laser irradiating method and manufacturing method of semiconductor device Aug. 23, 2011
7994030 Method for manufacturing antenna and method for manufacturing semiconductor device Aug. 9, 2011
7985665 Method of forming polycrystalline silicon thin film and method of manufacturing thin film transistor using the method Jul. 26, 2011
7947599 Laser annealing for 3-D chip integration May. 24, 2011
7943533 Method for surface modification May. 17, 2011
7935941 Semiconductor structure processing using multiple laser beam spots spaced on-axis on non-adjacent structures May. 3, 2011
7897513 Method for forming a metal silicide Mar. 1, 2011
7838397 Process and system for laser annealing and laser-annealed semiconductor film Nov. 23, 2010
7796845 Circuit board and method for manufacturing the same Sep. 14, 2010
7759177 Manufacturing method of semiconductor device Jul. 20, 2010
7737036 Integrated circuit fabrication process with minimal post-laser annealing dopant deactivation Jun. 15, 2010
7732349 Manufacturing method of insulating film and semiconductor device Jun. 8, 2010
7727853 Processing method, manufacturing method of semiconductor device, and processing apparatus Jun. 1, 2010
7727846 Method of manufacturing an SOI substrate and method of manufacturing a semiconductor device Jun. 1, 2010
7709398 Process and apparatus for depositing semiconductor layers using two process gases, one of which is preconditioned May. 4, 2010
7709379 Electrical device comprising conductors made of carbonized plastic, and method and apparatus for the production thereof May. 4, 2010
7709378 Method and apparatus for processing thin metal layers May. 4, 2010
7704856 Semiconductor device, wiring substrate forming method, and substrate processing apparatus Apr. 27, 2010
7696086 Fabricating method of an interconnect structure Apr. 13, 2010
7687328 Method of making a polycrystalline thin film, a mask pattern used in the same and a method of making a flat panel display device using the same Mar. 30, 2010
7682970 Maskless nanofabrication of electronic components Mar. 23, 2010
7655513 Method of manufacturing a semiconductor device Feb. 2, 2010
7601575 Integration of pre-S/D anneal selective nitride/oxide composite cap for improving transistor performance Oct. 13, 2009
7579622 Fabrication of MEMS devices with spin-on glass Aug. 25, 2009
7554055 Method for making ohmic contact to silicon structures with low thermal loads Jun. 30, 2009
7510985 Method to manufacture high-precision RFID straps and RFID antennas using a laser Mar. 31, 2009
7494923 Manufacturing method of wiring substrate and semiconductor device Feb. 24, 2009
7485576 Method of forming conductive pattern, thin film transistor, and method of manufacturing the same Feb. 3, 2009
7442644 Method for manufacturing nitride semiconductor wafer or nitride semiconductor device; nitride semiconductor wafer or nitride semiconductor device made by the same; and laser irradiating appara Oct. 28, 2008
7358151 Microelectromechanical system microphone fabrication including signal processing circuitry on common substrate Apr. 15, 2008
7338843 Method for producing an electronic component, especially a memory chip Mar. 4, 2008
7319052 Alloying method, and wiring forming method, display device forming method, and image display unit fabricating method Jan. 15, 2008
7294589 Laser irradiation apparatus Nov. 13, 2007
7291523 Method of manufacturing a semiconductor device Nov. 6, 2007

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