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Class Information
Number: 438/660
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > Including heat treatment of conductive layer
Description: Processes wherein a thermal treatment is performed on the electrically conductive layer (e.g., for modifying the electrical properties thereof, etc.).
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7622329 |
Method for fabricating core substrate using paste bumps |
Nov. 24, 2009 |
| 7621044 |
Method of manufacturing a resilient contact |
Nov. 24, 2009 |
| 7601638 |
Interconnect metallization method having thermally treated copper plate film with reduced micro-voids |
Oct. 13, 2009 |
| 7601575 |
Integration of pre-S/D anneal selective nitride/oxide composite cap for improving transistor performance |
Oct. 13, 2009 |
| 7576005 |
Dense seed layer and method of formation |
Aug. 18, 2009 |
| 7572718 |
Semiconductor device and manufacturing method thereof |
Aug. 11, 2009 |
| 7569484 |
Plasma and electron beam etching device and method |
Aug. 4, 2009 |
| 7541207 |
Light emitting device and method of manufacturing the same |
Jun. 2, 2009 |
| 7538030 |
Semiconductor device and method of manufacturing same |
May. 26, 2009 |
| 7538031 |
Method of manufacturing a wiring substrate and an electronic instrument |
May. 26, 2009 |
| 7531447 |
Process for forming integrated circuit comprising copper lines |
May. 12, 2009 |
| 7528024 |
Dual work function metal gate integration in semiconductor devices |
May. 5, 2009 |
| 7527497 |
Heat treating apparatus, heat treating method, and storage medium |
May. 5, 2009 |
| 7507647 |
Method of manufacturing a high voltage semiconductor device including a deep well and a gate oxide layer simultaneously |
Mar. 24, 2009 |
| 7494923 |
Manufacturing method of wiring substrate and semiconductor device |
Feb. 24, 2009 |
| 7485560 |
Method for fabricating crystalline silicon thin films |
Feb. 3, 2009 |
| 7485575 |
Method of manufacturing semiconductor device |
Feb. 3, 2009 |
| 7479451 |
Display device manufacturing method preventing diffusion of an aluminum element into a polysilicon layer in a heating step |
Jan. 20, 2009 |
| 7468320 |
Reduced electromigration and stressed induced migration of copper wires by surface coating |
Dec. 23, 2008 |
| 7465977 |
Method for producing a packaged integrated circuit |
Dec. 16, 2008 |
| 7462942 |
Die pillar structures and a method of their formation |
Dec. 9, 2008 |
| 7439137 |
Method for manufacturing semiconductor device |
Oct. 21, 2008 |
| 7432173 |
Methods of fabricating silicon-on-insulator substrates having a laser-formed single crystalline film |
Oct. 7, 2008 |
| 7419907 |
Eliminating metal-rich silicides using an amorphous Ni alloy silicide structure |
Sep. 2, 2008 |
| 7405156 |
Method of forming wiring pattern |
Jul. 29, 2008 |
| 7375031 |
Technique for forming interconnect structures with reduced electro and stress migration and/or resistivity |
May. 20, 2008 |
| 7364968 |
Capacitor in semiconductor device and manufacturing method |
Apr. 29, 2008 |
| 7358175 |
Serial thermal processor arrangement |
Apr. 15, 2008 |
| 7354848 |
Poly-silicon-germanium gate stack and method for forming the same |
Apr. 8, 2008 |
| 7344979 |
High pressure treatment for improved grain growth and void reduction |
Mar. 18, 2008 |
| 7335596 |
Method for fabricating copper-based interconnections for semiconductor device |
Feb. 26, 2008 |
| 7326649 |
Parylene-based flexible multi-electrode arrays for neuronal stimulation and recording and methods for manufacturing the same |
Feb. 5, 2008 |
| 7323783 |
Electrode, method for producing same and semiconductor device using same |
Jan. 29, 2008 |
| 7316969 |
Method and apparatus for thermally treating substrates |
Jan. 8, 2008 |
| 7313931 |
Method and device for heat treatment |
Jan. 1, 2008 |
| 7312148 |
Copper barrier reflow process employing high speed optical annealing |
Dec. 25, 2007 |
| 7301129 |
Control circuit for semiconductor device having overheating protection function |
Nov. 27, 2007 |
| 7297626 |
Process for nickel silicide Ohmic contacts to n-SiC |
Nov. 20, 2007 |
| 7294570 |
Contact integration method |
Nov. 13, 2007 |
| 7288442 |
Method for manufacturing contact structures of wirings |
Oct. 30, 2007 |
| 7276438 |
Method of manufacturing wiring substrate |
Oct. 2, 2007 |
| 7271038 |
Methods of forming ruthenium film by changing process conditions during chemical vapor deposition and ruthenium films formed thereby |
Sep. 18, 2007 |
| 7268029 |
Method of fabricating CMOS transistor that prevents gate thinning |
Sep. 11, 2007 |
| 7262105 |
Semiconductor device with silicided source/drains |
Aug. 28, 2007 |
| 7259094 |
Apparatus and method for heat treating thin film |
Aug. 21, 2007 |
| 7256122 |
Method of fabricating semiconductor device |
Aug. 14, 2007 |
| 7256123 |
Method of forming an interface for a semiconductor device |
Aug. 14, 2007 |
| 7256125 |
Method of manufacturing a semiconductor device |
Aug. 14, 2007 |
| 7238613 |
Diffusion-enhanced crystallization of amorphous materials to improve surface roughness |
Jul. 3, 2007 |
| 7238617 |
Method for fabricating semiconductor device to minimize terminal effect in ECP process |
Jul. 3, 2007 |
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