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Class Information
Number: 438/660
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > Including heat treatment of conductive layer
Description: Processes wherein a thermal treatment is performed on the electrically conductive layer (e.g., for modifying the electrical properties thereof, etc.).

Sub-classes under this class:

Class Number Class Name Patents
438/663 Rapid thermal anneal 312
438/661 Subsequent fusing conductive layer 157

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18

Patent Number Title Of Patent Date Issued
8704087 Solderable polymer thick film conductive electrode composition for use in thin-film photovoltaic cells and other applications Apr. 22, 2014
8691685 Prevention and control of intermetallic alloy inclusions that form during reflow of Pb free, Sn rich, solders in contacts in microelectronic packaging in integrated circuit contact structures Apr. 8, 2014
8679964 Prevention and control of intermetallic alloy inclusions Mar. 25, 2014
8679974 Method for fabricating interconnecting lines inside via holes of semiconductor device Mar. 25, 2014
8664116 Heat treatment method for growing silicide Mar. 4, 2014
8658535 Optimized annular copper TSV Feb. 25, 2014
8647959 Metal-insulator-metal capacitor alloying process Feb. 11, 2014
8647918 Formation of graphene on a surface Feb. 11, 2014
8647980 Method of forming wiring and method of manufacturing semiconductor substrates Feb. 11, 2014
8642458 Method of fabricating nonvolatile memory device Feb. 4, 2014
8629000 Thin film transistor, method for manufacturing the same, and semiconductor device Jan. 14, 2014
8623752 Ohmic electrode for SiC semiconductor, method of manufacturing ohmic electrode for SiC semiconductor, semiconductor device, and method of manufacturing semiconductor device Jan. 7, 2014
8603910 Method of processing a contact pad Dec. 10, 2013
8598593 Chip comprising an integrated circuit, fabrication method and method for locally rendering a carbonic layer conductive Dec. 3, 2013
8598042 Device manufacturing and cleaning method Dec. 3, 2013
8586133 Method for strengthening adhesion between dielectric layers formed adjacent to metal layers Nov. 19, 2013
8575014 Semiconductor device fabricated using a metal microstructure control process Nov. 5, 2013
8569647 Heat treatment apparatus Oct. 29, 2013
8557698 Method for producing a micromechanical and/or nanomechanical device with anti-bonding stops Oct. 15, 2013
8551880 Ammonia-based plasma treatment for metal fill in narrow features Oct. 8, 2013
8536053 Method for restricting lateral encroachment of metal silicide into channel region Sep. 17, 2013
8513117 Process to remove Ni and Pt residues for NiPtSi applications Aug. 20, 2013
8513118 Method for producing compound semiconductor light-emitting device Aug. 20, 2013
8501531 Method of forming graphene on a surface Aug. 6, 2013
8497142 Methods of forming conductive layer patterns using gas phase cleaning process and methods of manufacturing semiconductor devices Jul. 30, 2013
8497157 Method of manufacturing a semiconductor device and method of manufacturing a semiconductor package including the same Jul. 30, 2013
8497420 Thick-film pastes containing lead- and tellurium-oxides, and their use in the manufacture of semiconductor devices Jul. 30, 2013
8492202 Semiconductor device and method of manufacturing the same Jul. 23, 2013
8486826 Process of forming a grid electrode on the front-side of a silicon wafer Jul. 16, 2013
8486827 Device of filling metal in through-via-hole of semiconductor wafer and method using the same Jul. 16, 2013
8476154 Method of making a charge trapping non-volatile semiconductor memory device Jul. 2, 2013
8476161 Method for forming Cu electrical interconnection film Jul. 2, 2013
8466058 Process to remove Ni and Pt residues for NiPtSi applications using chlorine gas Jun. 18, 2013
8450209 p+ Polysilicon material on aluminum for non-volatile memory device and method May. 28, 2013
8440997 Nanowire photodetector and image sensor with internal gain May. 14, 2013
8435813 Light emitting device and method of manufacturing the same May. 7, 2013
8415241 Method of manufacturing silicon carbide semiconductor device Apr. 9, 2013
8409953 Method of manufacturing a semiconductor device Apr. 2, 2013
8372750 Method and system for improved nickel silicide Feb. 12, 2013
8367547 Method for creating a metal crystalline region, in particular in an integrated circuit Feb. 5, 2013
8367561 Method in depositing metal oxide materials Feb. 5, 2013
8361900 Barrier layer for copper interconnect Jan. 29, 2013
8357607 Method for fabricating nitride-based semiconductor device having electrode on m-plane Jan. 22, 2013
8350344 Semiconductor device and method of fabricating the same Jan. 8, 2013
8349743 Method for fabricating light emitting device Jan. 8, 2013
8349731 Methods for forming copper diffusion barriers for semiconductor interconnect structures Jan. 8, 2013
8338291 Producing transistor including multiple reentrant profiles Dec. 25, 2012
8334199 Method for fabricating nitride-based semiconductor device having electrode on m-plane Dec. 18, 2012
8329556 Localized annealing during semiconductor device fabrication Dec. 11, 2012
8318594 Method for fabricating nitride-based semiconductor device having electrode on m-plane Nov. 27, 2012

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18

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