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Class Information
Number: 438/657
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > Plural layered electrode or conductor > Having electrically conductive polysilicon component
Description: Processes wherein one of the diverse conductive layers is polycrystalline silicon.

Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8486835 Czochralski growth of randomly oriented polysilicon and use of randomly oriented polysilicon dummy wafers Jul. 16, 2013
8471367 Semiconductor device and method for manufacturing semiconductor device Jun. 25, 2013
8456010 Semiconductor device Jun. 4, 2013
8409989 Structure and method to fabricate a body contact Apr. 2, 2013
8350344 Semiconductor device and method of fabricating the same Jan. 8, 2013
8324099 Method of fabricating a landing plug in a semiconductor device Dec. 4, 2012
8318556 Method and system for continuous line-type landing polysilicon contact (LPC) structures Nov. 27, 2012
8298939 Method for forming conductive contact Oct. 30, 2012
8143158 Method and device of preventing delamination of semiconductor layers Mar. 27, 2012
8076729 Semiconductor device having a dual gate electrode and methods of making the same Dec. 13, 2011
8039382 Method for forming self-aligned metal silicide contacts Oct. 18, 2011
8003529 Method of fabrication an integrated circuit Aug. 23, 2011
7989330 Dry etching method Aug. 2, 2011
7943501 Systems and methods of forming tantalum silicide layers May. 17, 2011
7935629 Semiconductor scheme for reduced circuit area in a simplified process May. 3, 2011
7923368 Junction formation on wafer substrates using group IV nanoparticles Apr. 12, 2011
7790611 Method for FEOL and BEOL wiring Sep. 7, 2010
7754605 Ultrashallow semiconductor contact by outdiffusion from a solid source Jul. 13, 2010
7737031 Insitu formation of inverse floating gate poly structures Jun. 15, 2010
7723233 Semiconductor device and method of fabricating a semiconductor device May. 25, 2010
7709372 Semiconductor device and method for manufacturing the same May. 4, 2010
7701058 Undoped polysilicon metal silicide wiring Apr. 20, 2010
7652335 Reversely tapered contact structure compatible with dual stress liner process Jan. 26, 2010
7622383 Methods of forming conductive polysilicon thin films via atomic layer deposition and methods of manufacturing semiconductor devices including such polysilicon thin films Nov. 24, 2009
7611943 Transistors, integrated circuits, systems, and processes of manufacture with improved work function modulation Nov. 3, 2009
7611989 Polysilicon dummy wafers and process used therewith Nov. 3, 2009
7605033 Low resistance peripheral local interconnect contacts with selective wet strip of titanium Oct. 20, 2009
7592240 Method for forming a gate structure through an amorphous silicon layer and applications thereof Sep. 22, 2009
7579231 Semiconductor device and method of manufacturing the same Aug. 25, 2009
7573132 Wiring structure of a semiconductor device and method of forming the same Aug. 11, 2009
7563708 Method for manufacturing semiconductor device Jul. 21, 2009
7524757 Method for manufacturing multi-level transistor comprising forming selective epitaxial growth layer Apr. 28, 2009
7476613 Method of forming an electrical contact in a semiconductor device using an improved self-aligned contact (SAC) process Jan. 13, 2009
7432198 Semiconductor devices and methods of forming interconnection lines therein Oct. 7, 2008
7425496 Method for delineating a conducting element disposed on an insulating layer, device and transistor thus obtained Sep. 16, 2008
7384877 Technique for reducing silicide defects by reducing deleterious effects of particle bombardment prior to silicidation Jun. 10, 2008
7371681 Method of manufacturing a semiconductor device May. 13, 2008
7332420 Method for manufacturing semiconductor device Feb. 19, 2008
7282423 Method of forming fet with T-shaped gate Oct. 16, 2007
7256123 Method of forming an interface for a semiconductor device Aug. 14, 2007
7214602 Method of forming a conductive structure May. 8, 2007
7199043 Method of forming copper wiring in semiconductor device Apr. 3, 2007
7186607 Charge-trapping memory device and method for production Mar. 6, 2007
7169696 Method for making a system for selecting one wire from a plurality of wires Jan. 30, 2007
7091091 Nonvolatile memory fabrication methods in which a dielectric layer underlying a floating gate layer is spaced from an edge of an isolation trench and/or an edge of the floating gate layer Aug. 15, 2006
7052944 Thin-film transistor and method of manufacture thereof May. 30, 2006
7041558 Floating gate memory device and method of manufacturing the same May. 9, 2006
7029999 Method for fabricating transistor with polymetal gate electrode Apr. 18, 2006
7029937 Semiconductor device and method of manufacturing the same, circuit board, and electronic instrument Apr. 18, 2006
6995081 Systems and methods for forming tantalum silicide layers Feb. 7, 2006

1 2 3 4 5 6 7

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