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Class Information
Number: 438/652
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > Plural layered electrode or conductor
Description: Processes for making an ohmic contact to a semiconductor region involving the formation of multiple conductive layers of differing composition or electrical characteristics.


Sub-classes under this class:

Class Number Class Name Patents
438/653 At least one layer forms a diffusion barrier 1,075
438/654 Having adhesion promoting layer 338
438/657 Having electrically conductive polysilicon component 304
438/656 Having refractory group metal (i.e., titanium (ti), zirconium (zr), hafnium (hf), vanadium (v), niobium (nb), tantalum (ta), chromium (cr), molybdenum (mo), tungsten (w), or alloy thereof) 884
438/655 Silicide 935


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11

Patent Number Title Of Patent Date Issued
7615474 Method for manufacturing semiconductor device with reduced damage to metal wiring layer Nov. 10, 2009
7605079 Manufacturing method for phase change RAM with electrode layer process Oct. 20, 2009
7605460 Method and apparatus for a power distribution system Oct. 20, 2009
7575994 Semiconductor device and manufacturing method of the same Aug. 18, 2009
7576005 Dense seed layer and method of formation Aug. 18, 2009
7576706 Image display device including two display panels and method of manufacturing the same Aug. 18, 2009
7566975 Semiconductor device and method for manufacturing the same Jul. 28, 2009
7560381 Technique for metal deposition by electroless plating using an activation scheme including a substrate heating process Jul. 14, 2009
7553750 Method for fabricating electrical conductive structure of circuit board Jun. 30, 2009
7553754 Electronic device, method of manufacture of the same, and sputtering target Jun. 30, 2009
7550380 Electroless plating of metal caps for chalcogenide-based memory devices Jun. 23, 2009
7550328 Method for production of thin-film semiconductor device Jun. 23, 2009
7547623 Methods of forming lead free solder bumps Jun. 16, 2009
7541278 Interconnect substrate, semiconductor device, methods of manufacturing the same, circuit board, and electronic equipment Jun. 2, 2009
7520049 Method for manufacturing a planar resistance heating element Apr. 21, 2009
7517785 Electronic interconnects and methods of making same Apr. 14, 2009
7514355 Multilayer interconnection structure and method for forming the same Apr. 7, 2009
7514354 Methods for forming damascene wiring structures having line and plug conductors formed from different materials Apr. 7, 2009
7507660 Deposition processes for tungsten-containing barrier layers Mar. 24, 2009
7504287 Methods for fabricating an integrated circuit Mar. 17, 2009
7501334 Semiconductor devices having a pocket line and methods of fabricating the same Mar. 10, 2009
7501328 Methods for electrochemically fabricating structures using adhered masks, incorporating dielectric sheets, and/or seed layers that are partially removed via planarization Mar. 10, 2009
7494924 Method for forming reinforced interconnects on a substrate Feb. 24, 2009
7479451 Display device manufacturing method preventing diffusion of an aluminum element into a polysilicon layer in a heating step Jan. 20, 2009
7479394 MgO/NiFe MTJ for high performance MRAM application Jan. 20, 2009
7473643 Dendrite growth control circuit Jan. 6, 2009
7470619 Interconnect with high aspect ratio plugged vias Dec. 30, 2008
7468316 Low fabrication cost, fine pitch and high reliability solder bump Dec. 23, 2008
7468319 Method for preventing a metal corrosion in a semiconductor device Dec. 23, 2008
7468320 Reduced electromigration and stressed induced migration of copper wires by surface coating Dec. 23, 2008
7462942 Die pillar structures and a method of their formation Dec. 9, 2008
7462523 Semiconductor memory device and method for manufacturing the same Dec. 9, 2008
7456092 Self-releasing spring structures and methods Nov. 25, 2008
7446006 Semiconductor fabrication process including silicide stringer removal processing Nov. 4, 2008
7443019 Semiconductor device with conductor tracks between semiconductor chip and circuit carrier and method for producing the same Oct. 28, 2008
7435680 Method of manufacturing a circuit substrate and method of manufacturing an electronic parts packaging structure Oct. 14, 2008
7436067 Methods for forming conductive structures and structures regarding same Oct. 14, 2008
7435672 Metal-germanium physical vapor deposition for semiconductor device defect reduction Oct. 14, 2008
7427543 Method to improve drive current by increasing the effective area of an electrode Sep. 23, 2008
7416975 Method of forming contact layers on substrates Aug. 26, 2008
7413974 Copper-metallized integrated circuits having electroless thick copper bond pads Aug. 19, 2008
7413975 Interconnect substrate, semiconductor device, methods of manufacturing the same, circuit board, and electronic equipment Aug. 19, 2008
7411298 Source/drain electrodes, thin-film transistor substrates, manufacture methods thereof, and display devices Aug. 12, 2008
7407838 Method of manufacturing a semiconductor method of manufacturing a thin-film transistor and thin-film transistor Aug. 5, 2008
7407883 Electronic package with improved current carrying capability and method of forming the same Aug. 5, 2008
7402944 Organic light emitting display device and method of fabricating the same Jul. 22, 2008
7399706 Manufacturing method of semiconductor device Jul. 15, 2008
7396750 Method and structure for contacting two adjacent GMR memory bit Jul. 8, 2008
7396763 Semiconductor package using flexible film and method of manufacturing the same Jul. 8, 2008
7375014 Methods of electrochemically treating semiconductor substrates May. 20, 2008

1 2 3 4 5 6 7 8 9 10 11


 
 
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