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Class Information
Number: 438/636
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > Contacting multiple semiconductive regions (i.e., interconnects) > Multiple metal levels, separated by insulating layer (i.e., multiple level metallization) > Including use of antireflective layer
Description: Processes including the use of an antireflection layer.

Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
8658532 Method and material for forming a double exposure lithography pattern Feb. 25, 2014
8592302 Patterning method for fabrication of a semiconductor device Nov. 26, 2013
8580678 Method for fabricating semiconductor device with buried gates Nov. 12, 2013
8536049 Method for forming metal contacts Sep. 17, 2013
8530323 Capacitor and method for fabricating the same Sep. 10, 2013
8507346 Method of forming a semiconductor device having a cut-way hole to expose a portion of a hardmask layer Aug. 13, 2013
8491984 Structure resulting from chemical shrink process over BARC (bottom anti-reflective coating) Jul. 23, 2013
8470708 Double patterning strategy for contact hole and trench in photolithography Jun. 25, 2013
8450854 Interconnect structures with patternable low-k dielectrics and method of fabricating same May. 28, 2013
8445382 Side wall pore sealing for low-k dielectrics May. 21, 2013
8420947 Integrated circuit system with ultra-low k dielectric and method of manufacture thereof Apr. 16, 2013
8394714 Anti-reflective coatings for micro-fluid applications Mar. 12, 2013
8383511 Method for manufacturing mask Feb. 26, 2013
8367540 Interconnect structure including a modified photoresist as a permanent interconnect dielectric and method of fabricating same Feb. 5, 2013
8309457 Multilayer low reflectivity hard mask and process therefor Nov. 13, 2012
8298935 Dual damascene process Oct. 30, 2012
8288271 Method for reworking antireflective coating over semiconductor substrate Oct. 16, 2012
8263489 Process for the deposition of an anti-reflection film on a substrate Sep. 11, 2012
8258056 Method and material for forming a double exposure lithography pattern Sep. 4, 2012
8258456 Image sensor Sep. 4, 2012
8252614 Solid-state image sensor and imaging system Aug. 28, 2012
8252659 Method for producing interconnect structures for integrated circuits Aug. 28, 2012
8252694 Plasma etching method and storage medium Aug. 28, 2012
8241992 Method for air gap interconnect integration using photo-patternable low k material Aug. 14, 2012
8177990 Etching method, plasma processing system and storage medium May. 15, 2012
8110496 Method for performing chemical shrink process over BARC (bottom anti-reflective coating) Feb. 7, 2012
8048797 Multilayer low reflectivity hard mask and process therefor Nov. 1, 2011
8039382 Method for forming self-aligned metal silicide contacts Oct. 18, 2011
8039389 Semiconductor device having an organic anti-reflective coating (ARC) and method therefor Oct. 18, 2011
8030206 Coplanar solar cell metal contact annealing in plasma enhanced chemical vapor deposition Oct. 4, 2011
8017517 Dual damascene process Sep. 13, 2011
7985667 Method for patterning semiconductor device having magnetic tunneling junction structure Jul. 26, 2011
7985676 Method of making a contact in a semiconductor device Jul. 26, 2011
7951707 Etching method for semiconductor element May. 31, 2011
7947596 Semiconductor device and method of manufacturing the same May. 24, 2011
7943518 Semiconductor chip, semiconductor mounting module, mobile communication device, and process for producing semiconductor chip May. 17, 2011
7932172 Semiconductor chip and process for forming the same Apr. 26, 2011
7919408 Methods for fabricating fine line/space (FLS) routing in high density interconnect (HDI) substrates Apr. 5, 2011
7910477 Etch residue reduction by ash methodology Mar. 22, 2011
7902065 Multi-layered metal line having an improved diffusion barrier of a semiconductor device and method for forming the same Mar. 8, 2011
7897434 Methods of fabricating solar cell chips Mar. 1, 2011
7887875 Method to reduce photoresist poisoning Feb. 15, 2011
7868407 Substrate comprising a lower silicone resin film and an upper silicone resin film Jan. 11, 2011
7863184 System and method for reducing corrosion of an integrated circuit through its bond pads Jan. 4, 2011
7858515 Method for forming metal line in semiconductor device Dec. 28, 2010
7842606 Method of depositing thin film and method of manufacturing semiconductor using the same Nov. 30, 2010
7816260 Method for fabricating semiconductor device Oct. 19, 2010
7816069 Graded spin-on organic antireflective coating for photolithography Oct. 19, 2010
7803715 Lithographic patterning for sub-90nm with a multi-layered carbon-based hardmask Sep. 28, 2010
7790604 Krypton sputtering of thin tungsten layer for integrated circuits Sep. 7, 2010

1 2 3 4 5 6 7 8 9 10

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