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Class Information
Number: 438/634
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > Contacting multiple semiconductive regions (i.e., interconnects) > Multiple metal levels, separated by insulating layer (i.e., multiple level metallization) > Having planarization step > Utilizing etch-stop layer
Description: Processes wherein the planarization step is conducted utilizing an etch stop layer to limit the extent of a material removal operation.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11

Patent Number Title Of Patent Date Issued
8691686 Method of manufacturing semiconductor device, semiconductor device, and electronic apparatus Apr. 8, 2014
8691610 Semiconductor device and method for manufacturing the same Apr. 8, 2014
8685852 Method of forming metal line of semiconductor device Apr. 1, 2014
8673749 Semiconductor device manufacturing method Mar. 18, 2014
8664111 Method of patterning a semiconductor device with hard mask Mar. 4, 2014
8658531 Method of forming connection holes Feb. 25, 2014
8617981 Semiconductor device and manufacturing method thereof Dec. 31, 2013
8617979 Method for manufacturing semiconductor device and semiconductor device Dec. 31, 2013
8557612 Method for fabricating micro and nanostructures in a material Oct. 15, 2013
8557613 Methods for designing, fabricating, and predicting shape formations in a material Oct. 15, 2013
8497204 Method for reducing dielectric overetch when making contact to conductive features Jul. 30, 2013
8492194 Chemical mechanical polishing stop layer for fully amorphous phase change memory pore cell Jul. 23, 2013
8471353 Mesa photodiode and method for manufacturing the same Jun. 25, 2013
8461049 Method for fabricating semiconductor device Jun. 11, 2013
8455350 Integrated circuit system employing gate shield and/or ground shield Jun. 4, 2013
8445382 Side wall pore sealing for low-k dielectrics May. 21, 2013
8431480 Semiconductor device and manufacturing method thereof Apr. 30, 2013
8420947 Integrated circuit system with ultra-low k dielectric and method of manufacture thereof Apr. 16, 2013
8389358 Manufacturing method and structure of non-volatile memory Mar. 5, 2013
8330275 Interconnect structure for semiconductor devices Dec. 11, 2012
8304262 Wiggling control for pseudo-hardmask Nov. 6, 2012
8278206 Variable resistance memory device and methods of forming the same Oct. 2, 2012
8252680 Methods and architectures for bottomless interconnect vias Aug. 28, 2012
8236703 Methods for removing contaminants from aluminum-comprising bond pads and integrated circuits therefrom Aug. 7, 2012
8232195 Method for fabricating back end of the line structures with liner and seed materials Jul. 31, 2012
8226835 Ultra-thin film formation using gas cluster ion beam processing Jul. 24, 2012
8198190 Semiconductor device and method for patterning vertical contacts and metal lines in a common etch process Jun. 12, 2012
8193087 Process for improving copper line cap formation Jun. 5, 2012
8171627 Method of forming an electronic device May. 8, 2012
8143162 Interconnect structure having a silicide/germanide cap layer Mar. 27, 2012
8080473 Method for metallizing a pattern in a dielectric film Dec. 20, 2011
8053357 Prevention of post CMP defects in CU/FSG process Nov. 8, 2011
8053356 Interconnect structure for semiconductor devices Nov. 8, 2011
8048803 Method for forming contact plug in a semiconductor device Nov. 1, 2011
8008187 Method for reducing dielectric overetch using a dielectric etch stop at a planar surface Aug. 30, 2011
8004087 Semiconductor device with dual damascene wirings and method for manufacturing same Aug. 23, 2011
7981801 Chemical mechanical polishing (CMP) method for gate last process Jul. 19, 2011
7977237 Fabricating vias of different size of a semiconductor device by splitting the via patterning process Jul. 12, 2011
7947603 Chemical-mechanical polishing method May. 24, 2011
7947243 Boron nitride thin-film emitter and production method thereof, and electron emitting method using boron nitride thin-film emitter May. 24, 2011
7927964 Methods of forming electrically insulative materials, methods of forming low k dielectric regions, and methods of forming semiconductor constructions Apr. 19, 2011
7919404 Method of manufacturing semiconductor device including forming a t-shape gate electrode Apr. 5, 2011
7897499 Method for fabricating a semiconductor device with self-aligned contact Mar. 1, 2011
7884011 Semiconductor device and method of manufacture thereof Feb. 8, 2011
7867902 Methods of forming a contact structure Jan. 11, 2011
7855142 Methods of forming dual-damascene metal interconnect structures using multi-layer hard masks Dec. 21, 2010
7851354 Semiconductor memory device having local etch stopper and method of manufacturing the same Dec. 14, 2010
7834458 Interconnect structure for semiconductor devices Nov. 16, 2010
7808043 Semiconductor device and methods of fabricating the same including forming spacers and etch stop layers with stress properties Oct. 5, 2010
7790607 Method for reducing dielectric overetch using a dielectric etch stop at a planar surface Sep. 7, 2010

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