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Class Information
Number: 438/623
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > Contacting multiple semiconductive regions (i.e., interconnects) > Multiple metal levels, separated by insulating layer (i.e., multiple level metallization) > Including organic insulating material between metal levels
Description: Processes wherein the intervening dielectric is at least partly composed of organic insulating material.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8679967 Apparatus and methods of forming memory lines and structures using double sidewall patterning for four times half pitch relief patterning Mar. 25, 2014
8673764 Method and system for making and cleaning semiconductor device Mar. 18, 2014
8658473 Ultrathin buried die module and method of manufacturing thereof Feb. 25, 2014
8652962 Etch damage and ESL free dual damascene metal interconnect Feb. 18, 2014
8637396 Dielectric barrier deposition using oxygen containing precursor Jan. 28, 2014
8629055 Manufacturing method of semiconductor device Jan. 14, 2014
8629556 Semiconductor device Jan. 14, 2014
8624402 Mock bump system for flip chip integrated circuits Jan. 7, 2014
8618534 Field-effect transistor with a dielectric layer having therein denatured albumen Dec. 31, 2013
8609531 Methods of selectively forming ruthenium liner layer Dec. 17, 2013
8603912 Power semiconductor component and method for the production thereof Dec. 10, 2013
8592980 Carbon nanotube-modified low-K materials Nov. 26, 2013
8592302 Patterning method for fabrication of a semiconductor device Nov. 26, 2013
8592303 Wiring structure and method for manufacturing the same Nov. 26, 2013
8581388 Multilayered wiring substrate Nov. 12, 2013
8569105 Passivating glue layer to improve amorphous carbon to metal adhesion Oct. 29, 2013
8569166 Methods of modifying interlayer adhesion Oct. 29, 2013
8551877 Sidewall and chamfer protection during hard mask removal for interconnect patterning Oct. 8, 2013
8541302 Electronic device including a trench with a facet and a conductive structure therein and a process of forming the same Sep. 24, 2013
8536067 Semiconductor device and method for manufacturing the same Sep. 17, 2013
8525163 Organic EL device, method for fabricating organic EL device, and organic EL illumination system Sep. 3, 2013
8513780 Semiconductor device having inter-level dielectric layer with hole-sealing and method for manufacturing the same Aug. 20, 2013
8497543 Semiconductor memory device and method for manufacturing same Jul. 30, 2013
8492266 Semiconductor device having insulating film with surface modification layer and method for manufacturing the same Jul. 23, 2013
8486824 Enhancing metal/low-K interconnect reliability using a protection layer Jul. 16, 2013
8481423 Methods to mitigate plasma damage in organosilicate dielectrics Jul. 9, 2013
8476741 Semiconductor device Jul. 2, 2013
8470706 Methods to mitigate plasma damage in organosilicate dielectrics Jun. 25, 2013
8465991 Carbon containing low-k dielectric constant recovery using UV treatment Jun. 18, 2013
8450216 Contact etch stop layers of a field effect transistor May. 28, 2013
8445377 Mechanically robust metal/low-k interconnects May. 21, 2013
8440579 Re-establishing surface characteristics of sensitive low-k dielectrics in microstructure device by using an in situ surface modification May. 14, 2013
8435883 Post passivation interconnection schemes on top of IC chips May. 7, 2013
8431488 Damascene process using cleaning solution Apr. 30, 2013
8420544 Method for fabricating interconnection structure with dry-cleaning process Apr. 16, 2013
8415248 Self-aligned dual damascene BEOL structures with patternable low-k material and methods of forming same Apr. 9, 2013
8399289 Programmable polyelectrolyte electrical switches Mar. 19, 2013
8389400 Method of manufacturing fine patterns of semiconductor device Mar. 5, 2013
8383507 Method for fabricating air gap interconnect structures Feb. 26, 2013
8362465 Organic EL light-emitting material and organic EL light-emitting element Jan. 29, 2013
8354346 Method for fabricating low-k dielectric and Cu interconnect Jan. 15, 2013
8334597 Semiconductor device having via connecting between interconnects Dec. 18, 2012
8334203 Interconnect structure and method of fabricating Dec. 18, 2012
8334202 Device fabricated using an electroplating process Dec. 18, 2012
8329552 Semiconductor device and method of manufacture Dec. 11, 2012
8330275 Interconnect structure for semiconductor devices Dec. 11, 2012
8318511 Integration manufacturing process for MEMS device Nov. 27, 2012
8315678 Systems, methods, and apparatus for multilayer superconducting printed circuit boards Nov. 20, 2012
8304766 Semiconductor chip with a bonding pad having contact and test areas Nov. 6, 2012
8293651 Method of forming thin film pattern for semiconductor device and apparatus for the same Oct. 23, 2012

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