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Class Information
Number: 438/607
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material > With epitaxial conductor formation
Description: Processes involving the formation of an epitaxial conductive layer in ohmic electrical contact to a semiconductor region.

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8691688 Method of manufacturing semiconductor structure Apr. 8, 2014
8673784 Method for producing silicon epitaxial wafer Mar. 18, 2014
8617976 Source/drain re-growth for manufacturing III-V based transistors Dec. 31, 2013
8609518 Re-growing source/drain regions from un-relaxed silicon layer Dec. 17, 2013
8536001 Method for forming semiconductor device Sep. 17, 2013
8481416 Semiconductor devices having contact plugs with stress buffer spacers and methods of fabricating the same Jul. 9, 2013
8431476 Method to prevent surface decomposition of III-V compound semiconductors Apr. 30, 2013
8415180 Method for fabricating wafer product and method for fabricating gallium nitride based semiconductor optical device Apr. 9, 2013
8415772 Method to prevent surface decomposition of III-V compound semiconductors Apr. 9, 2013
8394712 Cavity-free interface between extension regions and embedded silicon-carbon alloy source/drain regions Mar. 12, 2013
8361896 Signal transmission for high speed interconnections Jan. 29, 2013
8361859 Stressed transistor with improved metastability Jan. 29, 2013
8293577 Semiconductor package and method of manufacturing the same Oct. 23, 2012
8273650 Method of fabricating thin film interface for internal light reflection and impurities isolation Sep. 25, 2012
8273649 Method to prevent surface decomposition of III-V compound semiconductors Sep. 25, 2012
8242555 FIN field effect transistor Aug. 14, 2012
8236691 Method of high aspect ratio plug fill Aug. 7, 2012
8232191 Semiconductor device manufacturing method Jul. 31, 2012
8227327 Method for epitaxial growth Jul. 24, 2012
8207033 Methods of fabricating different thickness silicon-germanium layers on semiconductor integrated circuit devices and semiconductor integrated circuit devices fabricated thereby Jun. 26, 2012
8202795 Method of fabricating a semiconductor device having a plug Jun. 19, 2012
8173535 Wafer structure to reduce dark current May. 8, 2012
8159041 Semiconductor device and manufacturing method thereof Apr. 17, 2012
8124518 Semiconductor heterostructure nanowire devices Feb. 28, 2012
8035129 Integrated circuitry Oct. 11, 2011
7998851 Semiconductor devices having contact plugs with stress buffer spacers and methods of fabricating the same Aug. 16, 2011
7985641 Semiconductor device with strained transistors and its manufacture Jul. 26, 2011
7964491 Method of forming metal wiring of nonvolatile memory device Jun. 21, 2011
7960236 Phosphorus containing Si epitaxial layers in N-type source/drain junctions Jun. 14, 2011
7960254 Manufacturing method for epitaxial wafer Jun. 14, 2011
7915152 III-V nitride substrate boule and method of making and using the same Mar. 29, 2011
7811908 Method of storing GaN substrate, stored substrate, and semiconductor device and method of its manufacture Oct. 12, 2010
7807538 Method of forming a silicide layer while applying a compressive or tensile strain to impurity layers Oct. 5, 2010
7803684 Method of fabricating semiconductor device having a junction extended by a selective epitaxial growth (SEG) layer Sep. 28, 2010
7790593 Method for tuning epitaxial growth by interfacial doping and structure including same Sep. 7, 2010
7781314 Nitride semiconductor device manufacturing method Aug. 24, 2010
7768036 Integrated circuitry Aug. 3, 2010
7728407 Semiconductor device and method of cutting electrical fuse Jun. 1, 2010
7691711 Method for fabricating silicon carbide vertical MOSFET devices Apr. 6, 2010
7678631 Formation of strain-inducing films Mar. 16, 2010
7674669 FIN field effect transistor Mar. 9, 2010
7628896 Coated article with transparent conductive oxide film doped to adjust Fermi level, and method of making same Dec. 8, 2009
7623935 Method for electrochemically fabricating three-dimensional structures including pseudo-rasterization of data Nov. 24, 2009
7608515 Diffusion layer for stressed semiconductor devices Oct. 27, 2009
7605070 Semiconductor device having contact plug formed in double structure by using epitaxial stack and metal layer and method for fabricating the same Oct. 20, 2009
7585757 Semiconductor device and method of manufacturing the same Sep. 8, 2009
7579249 Methods for fabricating DRAM semiconductor devices including silicon epitaxial and metal silicide layers Aug. 25, 2009
7537980 Method of manufacturing a stacked semiconductor device May. 26, 2009
7528424 Integrated circuitry May. 5, 2009
7524751 Method for forming contact hole in semiconductor device Apr. 28, 2009

1 2 3 4

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