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Class Information
Number: 438/597
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > To form ohmic contact to semiconductive material
Description: Processes for depositing electrically conductive material which forms an indirect or direct ohmic contact to a semiconductive region.

Sub-classes under this class:

Class Number Class Name Patents
438/658 Altering composition of conductor 323
438/688 Aluminum or aluminum alloy conductor 686
438/669 And patterning of conductive layer 891
438/611 Beam lead formation 227
438/610 Conductive macromolecular conductor (including metal powder filled composition) 120
438/618 Contacting multiple semiconductive regions (i.e., interconnects) 1,794
438/687 Copper of copper alloy conductor 1,801
438/684 Electrically conductive polysilicon 227
438/678 Electroless deposition of conductive layer 641
438/679 Evaporative coating of conductive layer 154
438/612 Forming solder contact or bonding pad 2,021
438/660 Including heat treatment of conductive layer 881
438/686 Noble group metal (i.e., silver (ag), gold (au), platinum (pt), palladium (pd), rhodium (rh), ruthenium (ru), iridium (ir), osmium (os), or alloy thereof) 472
438/608 Oxidic conductor (e.g., indium tin oxide, etc.) 186
438/652 Plural layered electrode or conductor 724
438/685 Refractory group metal (i.e., titanium (ti), zirconium (zr), hafnium (hf), vanadium (v), niobium (nb), tantalum (ta), chromium (cr), molybdenum (mo), tungsten (w), or alloy thereof) 943
438/674 Selective deposition of conductive layer 535
438/598 Selectively interconnecting (e.g., customization, wafer scale integration, etc.) 446
438/682 Silicide 868
438/666 Specified configuration of electrode or contact 928
438/602 To compound semiconductor 195
438/680 Utilizing chemical vapor deposition (i.e., cvd) 1,188
438/665 Utilizing textured surface 203
438/607 With epitaxial conductor formation 195

Patents under this class:

Patent Number Title Of Patent Date Issued
8691690 Contact formation method incorporating preventative etch step reducing interlayer dielectric material flake defects Apr. 8, 2014
8669190 Method for manufacturing semiconductor device and semiconductor wafer Mar. 11, 2014
8664105 Mitigation of silicide formation on wafer bevel Mar. 4, 2014
8664104 Method of producing a device with transistors strained by means of an external layer Mar. 4, 2014
8643098 Method for fabricating semiconductor device with side contact Feb. 4, 2014
8642464 Method of manufacturing semiconductor device Feb. 4, 2014
8637339 Diode energy converter for chemical kinetic electron energy transfer Jan. 28, 2014
8633109 Soft error rate (SER) reduction in advanced silicon processes Jan. 21, 2014
8633101 Semiconductor device and manufacturing method of semiconductor device Jan. 21, 2014
8623764 Composition and methods for forming metal films on semiconductor substrates using supercritical solvents Jan. 7, 2014
8623752 Ohmic electrode for SiC semiconductor, method of manufacturing ohmic electrode for SiC semiconductor, semiconductor device, and method of manufacturing semiconductor device Jan. 7, 2014
8623714 Spacer protection and electrical connection for array device Jan. 7, 2014
8617975 Semiconductor processing methods Dec. 31, 2013
8614131 Self-aligned static random access memory (SRAM) on metal gate Dec. 24, 2013
8603908 Mitigation of silicide formation on wafer bevel Dec. 10, 2013
8598010 Methods of forming variable-resistance memory devices and devices formed thereby Dec. 3, 2013
8592954 Semiconductor element and method of manufacturing the semiconductor element Nov. 26, 2013
8592303 Wiring structure and method for manufacturing the same Nov. 26, 2013
8592297 Wafer and method of processing wafer Nov. 26, 2013
8580668 Method of forming ohmic contact layer and method of fabricating light emitting device having ohmic contact layer Nov. 12, 2013
8575627 Semiconductor light emitting element having barriers which prevent forward current in a semiconductor film thereof Nov. 5, 2013
8569171 Mask-based silicidation for FEOL defectivity reduction and yield boost Oct. 29, 2013
8569119 Method for producing semiconductor device and display device Oct. 29, 2013
8563379 Semiconductor device and production method thereof Oct. 22, 2013
8557621 Method for manufacturing thin film transistor array panel Oct. 15, 2013
8552558 Conductive compositions and processes for use in the manufacture of semiconductor devices Oct. 8, 2013
8551888 Method of forming patterns for semiconductor device Oct. 8, 2013
8551867 Mesa edge shielding trench Schottky rectifier and method of manufacture thereof Oct. 8, 2013
8541887 Layered chip package and method of manufacturing same Sep. 24, 2013
8536042 Method of forming a topside contact to a backside terminal of a semiconductor device Sep. 17, 2013
8518816 Method for making electrical interconnections with carbon nanotubes Aug. 27, 2013
8507375 Alignment tolerant semiconductor contact and method Aug. 13, 2013
8501623 Method of forming a semiconductor device having a metal silicide and alloy layers as electrode Aug. 6, 2013
8497202 Interconnect structures and methods of manufacturing of interconnect structures Jul. 30, 2013
8492170 UV assisted silylation for recovery and pore sealing of damaged low K films Jul. 23, 2013
8486821 Method and apparatus for variable conductance Jul. 16, 2013
8486820 Semiconductor device manufacturing method Jul. 16, 2013
8486306 Nickel ink and conductor film formed of nickel ink Jul. 16, 2013
8481396 Memory cell that includes a carbon-based reversible resistance switching element compatible with a steering element, and methods of forming the same Jul. 9, 2013
8476170 Method of forming pattern, method of manufacturing semiconductor device, and method of manufacturing template Jul. 2, 2013
8476154 Method of making a charge trapping non-volatile semiconductor memory device Jul. 2, 2013
8476135 Integrated circuit packaging system with vertical interconnects and method of manufacture thereof Jul. 2, 2013
8470685 Integration of self-aligned trenches in-between metal lines Jun. 25, 2013
8455354 Layouts of POLY cut openings overlapping active regions Jun. 4, 2013
8455327 Trench capacitor with spacer-less fabrication process Jun. 4, 2013
8450796 Power semiconductor device May. 28, 2013
8450200 Method for stacked contact with low aspect ratio May. 28, 2013
8435905 Manufacturing method of semiconductor device, and substrate processing apparatus May. 7, 2013
8435892 Method of manufacturing semiconductor device comprising the step of doping semiconductor film through contact hole May. 7, 2013
8435876 Method of manufacturing semiconductor device May. 7, 2013

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