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Class Information
Number: 438/596
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > Insulated gate formation > Having sidewall structure > Portion of sidewall structure is conductive
Description: Processes wherein a least a portion of the material features formed along the electrode sidewalls is electrically conductive.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618866 |
Structure and method to form multilayer embedded stressors |
Nov. 17, 2009 |
| 7601592 |
Method for forming multi-gate non-volatile memory devices using a damascene process |
Oct. 13, 2009 |
| 7602001 |
Capacitorless one transistor DRAM cell, integrated circuitry comprising an array of capacitorless one transistor DRAM cells, and method of forming lines of capacitorless one transistor DRAM ce |
Oct. 13, 2009 |
| 7586355 |
Low skew clock distribution tree |
Sep. 8, 2009 |
| 7582548 |
Semiconductor device and manufacturing method thereof |
Sep. 1, 2009 |
| 7582550 |
Semiconductor memory device and manufacturing method thereof |
Sep. 1, 2009 |
| 7579243 |
Split gate memory cell method |
Aug. 25, 2009 |
| 7572719 |
Semiconductor device and manufacturing method thereof |
Aug. 11, 2009 |
| 7569436 |
Manufacturing method of semiconductor device |
Aug. 4, 2009 |
| 7566644 |
Method for forming gate electrode of semiconductor device |
Jul. 28, 2009 |
| 7560320 |
Nonvolatile semiconductor memory and a fabrication method for the same |
Jul. 14, 2009 |
| 7547606 |
Semiconductor device and method of manufacturing the same |
Jun. 16, 2009 |
| 7541216 |
Method of aligning deposited nanotubes onto an etched feature using a spacer |
Jun. 2, 2009 |
| 7541241 |
Method for fabricating memory cell |
Jun. 2, 2009 |
| 7521314 |
Method for selective removal of a layer |
Apr. 21, 2009 |
| 7504330 |
Method of forming an insulative film |
Mar. 17, 2009 |
| 7498248 |
Methods of compensating for an alignment error during fabrication of structures on semiconductor substrates |
Mar. 3, 2009 |
| 7498640 |
Self-aligned silicide process for silicon sidewall source and drain contacts and structure formed thereby |
Mar. 3, 2009 |
| 7485527 |
Nonvolatile semiconductor storage device and its manufacturing method |
Feb. 3, 2009 |
| 7476607 |
Semiconductor electrode, production process thereof and photovoltaic cell using semiconductor electrode |
Jan. 13, 2009 |
| 7445999 |
Fabricating method of a flash memory cell |
Nov. 4, 2008 |
| 7435673 |
Methods of forming integrated circuit devices having metal interconnect structures therein |
Oct. 14, 2008 |
| 7429527 |
Method of manufacturing self-aligned contact openings |
Sep. 30, 2008 |
| 7419870 |
Method of manufacturing a flash memory device |
Sep. 2, 2008 |
| 7371669 |
Method of forming a gate of a semiconductor device |
May. 13, 2008 |
| 7368347 |
Dual bit flash memory devices and methods for fabricating the same |
May. 6, 2008 |
| 7348266 |
Method and apparatus for a metallic dry-filling process |
Mar. 25, 2008 |
| 7329595 |
Deposition of carbon-containing layers using vitreous carbon source |
Feb. 12, 2008 |
| 7320913 |
Methods of forming split-gate non-volatile memory devices |
Jan. 22, 2008 |
| 7320914 |
System and method for gate formation in a semiconductor device |
Jan. 22, 2008 |
| 7312499 |
Semiconductor storage device and manufacturing method therefor, semiconductor device, portable electronic equipment and IC card |
Dec. 25, 2007 |
| 7312129 |
Method for producing two gates controlling the same channel |
Dec. 25, 2007 |
| 7306992 |
Flash memory device and method of fabricating the same |
Dec. 11, 2007 |
| 7300843 |
Method of fabricating flash memory device |
Nov. 27, 2007 |
| 7297595 |
Non-volatile memory device and fabricating method thereof |
Nov. 20, 2007 |
| 7276433 |
Methods of forming integrated circuitry, methods of forming memory circuitry, and methods of forming field effect transistors |
Oct. 2, 2007 |
| 7273783 |
Methods for reducing void formation in semiconductor devices |
Sep. 25, 2007 |
| 7271052 |
Long retention time single transistor vertical memory gain cell |
Sep. 18, 2007 |
| 7268042 |
Nonvolatile semiconductor memory and making method thereof |
Sep. 11, 2007 |
| 7262089 |
Methods of forming semiconductor structures |
Aug. 28, 2007 |
| 7259098 |
Methods for fabricating semiconductor devices |
Aug. 21, 2007 |
| 7238601 |
Semiconductor device having conductive spacers in sidewall regions and method for forming |
Jul. 3, 2007 |
| 7217624 |
Non-volatile memory device with conductive sidewall spacer and method for fabricating the same |
May. 15, 2007 |
| 7214585 |
Methods of fabricating integrated circuits with openings that allow electrical contact to conductive features having self-aligned edges |
May. 8, 2007 |
| 7186633 |
Method and structure for tungsten gate metal surface treatment while preventing oxidation |
Mar. 6, 2007 |
| 7176084 |
Self-aligned conductive spacer process for sidewall control gate of high-speed random access memory |
Feb. 13, 2007 |
| 7176086 |
Interconnecting conductive layers of memory devices |
Feb. 13, 2007 |
| 7169678 |
Method of forming a semiconductor device using a silicide etching mask |
Jan. 30, 2007 |
| 7166513 |
Manufacturing method a flash memory cell array |
Jan. 23, 2007 |
| 7153741 |
Use of selective epitaxial silicon growth in formation of floating gates |
Dec. 26, 2006 |
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