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Class Information
Number: 438/595
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > Insulated gate formation > Having sidewall structure
Description: Processes wherein the insulated gate electrode has material features formed along the electrode sidewall.










Sub-classes under this class:

Class Number Class Name Patents
438/596 Portion of sidewall structure is conductive 338


Patents under this class:

Patent Number Title Of Patent Date Issued
8703596 Semiconductor device and method of manufacturing semiconductor device Apr. 22, 2014
8703557 Methods of removing dummy fin structures when forming finFET devices Apr. 22, 2014
8680602 Semiconductor device and method of manufacturing the same Mar. 25, 2014
8679926 Local charge and work function engineering on MOSFET Mar. 25, 2014
8673759 Dry etch polysilicon removal for replacement gates Mar. 18, 2014
8669170 Methods of reducing gate leakage Mar. 11, 2014
8664103 Metal gate stack formation for replacement gate technology Mar. 4, 2014
8664102 Dual sidewall spacer for seam protection of a patterned structure Mar. 4, 2014
8664065 Method of forming an insulated gate field effect transistor device having a shield electrode structure Mar. 4, 2014
8658496 Etch stop layer for memory cell reliability improvement Feb. 25, 2014
8652902 Floating gate semiconductor memory device and method for producing such a device Feb. 18, 2014
8647952 Encapsulation of closely spaced gate electrode structures Feb. 11, 2014
8642468 NMOS metal gate materials, manufacturing methods, and equipment using CVD and ALD processes with metal based precursors Feb. 4, 2014
8642459 Method for forming a semiconductor device with an isolation region on a gate electrode Feb. 4, 2014
8629048 Methods of forming a pattern on a substrate Jan. 14, 2014
8623730 Method for fabricating silicon-on-insulator transistor with self-aligned borderless source/drain contacts Jan. 7, 2014
8614475 Void free interlayer dielectric Dec. 24, 2013
8609497 Method of dual EPI process for semiconductor device Dec. 17, 2013
8598028 Gate height loss improvement for a transistor Dec. 3, 2013
8580625 Metal oxide semiconductor transistor and method of manufacturing the same Nov. 12, 2013
8574978 Method for forming semiconductor device Nov. 5, 2013
8569182 Methods of fabricating three-dimensional semiconductor device Oct. 29, 2013
8569171 Mask-based silicidation for FEOL defectivity reduction and yield boost Oct. 29, 2013
8563379 Semiconductor device and production method thereof Oct. 22, 2013
8563370 Method for fabricating surrounding-gate silicon nanowire transistor with air sidewalls Oct. 22, 2013
8557696 Split gate flash cell and method for making the same Oct. 15, 2013
8552478 Corner transistor and method of fabricating the same Oct. 8, 2013
8551873 Method for manufacturing semiconductor device Oct. 8, 2013
8551842 Method of manufacturing semiconductor device Oct. 8, 2013
8546252 Metal gate FET having reduced threshold voltage roll-off Oct. 1, 2013
8541308 Polishing method and method for forming a gate Sep. 24, 2013
8536014 Self aligned silicide device fabrication Sep. 17, 2013
8524592 Methods of forming semiconductor devices with self-aligned contacts and low-k spacers and the resulting devices Sep. 3, 2013
8524591 Maintaining integrity of a high-K gate stack by passivation using an oxygen plasma Sep. 3, 2013
8519487 Semiconductor device Aug. 27, 2013
8518780 Fabrication methods of integrated semiconductor structure Aug. 27, 2013
8502325 Metal high-K transistor having silicon sidewalls for reduced parasitic capacitance Aug. 6, 2013
8497198 Semiconductor process Jul. 30, 2013
8492847 Semiconductor device having insulating film with increased tensile stress and manufacturing method thereof Jul. 23, 2013
8492236 Step-like spacer profile Jul. 23, 2013
8492230 Semiconductor device and method of manufacturing the same Jul. 23, 2013
8491799 Method for forming magnetic tunnel junction cell Jul. 23, 2013
8487397 Method for forming self-aligned contact Jul. 16, 2013
8486781 Method of manufacturing flash memory device Jul. 16, 2013
8481412 Method of and apparatus for active energy assist baking Jul. 9, 2013
8481392 Methods of fabricating semiconductor device using high-K layer for spacer etch stop and related devices Jul. 9, 2013
8466493 Self-aligned III-V field effect transistor (FET), integrated circuit (IC) chip with self-aligned III-V FETS and method of manufacture Jun. 18, 2013
8466053 Method of manufacturing semiconductor device, and semiconductor device Jun. 18, 2013
8461049 Method for fabricating semiconductor device Jun. 11, 2013
8450813 Fin transistor structure and method of fabricating the same May. 28, 2013











 
 
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