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Class Information
Number: 438/589
Name: Semiconductor device manufacturing: process > Coating with electrically or thermally conductive material > Insulated gate formation > Recessed into semiconductor substrate
Description: Processes wherein the insulated gate electrode is recessed below the main surface of the semiconductor substrate.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8709886 Compound semiconductor device and manufacturing method therefor Apr. 29, 2014
8709895 Manufacturing method power semiconductor device Apr. 29, 2014
8709899 Vertical gate LDMOS device Apr. 29, 2014
8710585 High voltage fast recovery trench diode Apr. 29, 2014
8703563 Source and body contact structure for trench-DMOS devices using polysilicon Apr. 22, 2014
8703566 Transistors comprising a SiC-containing channel Apr. 22, 2014
8703609 Through-substrate via for semiconductor device Apr. 22, 2014
8691680 Method for fabricating memory device with buried digit lines and buried word lines Apr. 8, 2014
8691650 MOSFET with recessed channel film and abrupt junctions Apr. 8, 2014
8691644 Method of forming a CMOS device with a stressed-channel NMOS transistor and a strained-channel PMOS transistor Apr. 8, 2014
8679926 Local charge and work function engineering on MOSFET Mar. 25, 2014
8674412 Contacts-first self-aligned carbon nanotube transistor with gate-all-around Mar. 18, 2014
8669141 Capped integrated device with protective cap, composite wafer incorporating integrated devices and process for bonding integrated devices with respective protective caps Mar. 11, 2014
8664064 Fin field effect transistor and method for forming the same Mar. 4, 2014
8664065 Method of forming an insulated gate field effect transistor device having a shield electrode structure Mar. 4, 2014
8658500 Single crystal U-MOS gates using microwave crystal regrowth Feb. 25, 2014
8652906 Method for manufacturing a semiconductor device and semiconductor device Feb. 18, 2014
8652910 Method for fabricating semiconductor device and device using same Feb. 18, 2014
8652904 Semiconductor device with gate trench Feb. 18, 2014
8652900 Trench MOSFET with ultra high cell density and manufacture thereof Feb. 18, 2014
8647950 Vertical gate LDMOS device Feb. 11, 2014
8647972 Multi-layer work function metal replacement gate Feb. 11, 2014
8642425 Method of making an insulated gate semiconductor device and structure Feb. 4, 2014
8642424 Replacement metal gate structure and methods of manufacture Feb. 4, 2014
8637367 Method for producing an insulation layer between two electrodes Jan. 28, 2014
8637368 Fabrication of MOS device with varying trench depth Jan. 28, 2014
8629019 Method of forming self aligned contacts for a power MOSFET Jan. 14, 2014
8624266 Silicon carbide substrate, semiconductor device, method of manufacturing silicon carbide substrate and method of manufacturing semiconductor device Jan. 7, 2014
8617953 Memory having a vertical access device Dec. 31, 2013
8618603 Nonvolatile semiconductor memory device and method for manufacturing same Dec. 31, 2013
8614127 Method of making a FinFET device Dec. 24, 2013
8598012 Method for fabricating semiconductor device with buried gates Dec. 3, 2013
8598026 Semiconductor device and method of manufacturing the same Dec. 3, 2013
8598653 FinFET having cross-hair cells Dec. 3, 2013
8592237 Method of manufacturing a thin film transistor including forming bus line patterns in a substrate and filling with metal Nov. 26, 2013
8592277 Method of forming low resistance gate for power MOSFET applications Nov. 26, 2013
8586435 Fabrication of MOSFET device with reduced breakdown voltage Nov. 19, 2013
8580667 Self aligned trench MOSFET with integrated diode Nov. 12, 2013
8574990 Method of manufacturing semiconductor device having metal gate Nov. 5, 2013
8575015 Lateral trench mosfet having a field plate Nov. 5, 2013
8563381 Method for manufacturing a power semiconductor device Oct. 22, 2013
8563413 Semiconductor device with buried gate and method for fabricating the same Oct. 22, 2013
8563987 Semiconductor device and method for fabricating the device Oct. 22, 2013
8551876 Manufacturing method for semiconductor device having metal gate Oct. 8, 2013
8552478 Corner transistor and method of fabricating the same Oct. 8, 2013
RE44532 Method for manufacturing a transistor of a semiconductor memory device Oct. 8, 2013
8541296 Method of manufacturing dummy gates in gate last process Sep. 24, 2013
8536038 Manufacturing method for metal gate using ion implantation Sep. 17, 2013
8530292 Method for manufacturing a strained channel MOS transistor Sep. 10, 2013
8530306 Method of forming a slit recess channel gate Sep. 10, 2013

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