Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Browse by Category: Main > Engineering
Class Information
Number: 438/583
Name: Semiconductor device manufacturing: process > Forming schottky junction (i.e., semiconductor-conductor rectifying junction contact) > Using refractory group metal (i.e., titanium (ti), zirconium (zr), hafnium (hf), vanadium (v), niobium (nb), tantalum (ta), chromium (cr), molybdenum (mo), tungsten (w), or alloy thereof) > Silicide
Description: Processes for forming a contact using the chemical combination of silicon (Si) with one of the refractory group elements (i.e., titanium (Ti), zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), tantalum (Ta), chromium (Cr), molybdenum (Mo), tungsten (W), or alloy thereof).










Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8709885 Schottky diode and method of manufacture Apr. 29, 2014
8658483 Method of fabricating an integrated circuit device having backside bevel protection Feb. 25, 2014
8647971 Method of manufacturing junction barrier schottky diode with dual silicides Feb. 11, 2014
8569837 MOS devices having elevated source/drain regions Oct. 29, 2013
8551874 MOSFET gate and source/drain contact metallization Oct. 8, 2013
8529776 High lateral to vertical ratio etch process for device manufacturing Sep. 10, 2013
8517769 Methods of forming copper-based conductive structures on an integrated circuit device Aug. 27, 2013
8513765 Formation method and structure for a well-controlled metallic source/drain semiconductor device Aug. 20, 2013
8476154 Method of making a charge trapping non-volatile semiconductor memory device Jul. 2, 2013
8466051 Method for fabricating Schottky device Jun. 18, 2013
8460996 Semiconductor devices with different dielectric thicknesses Jun. 11, 2013
8450196 Production of an integrated circuit including electrical contact on SiC May. 28, 2013
8431453 Plasma doping to reduce dielectric loss during removal of dummy layers in a gate structure Apr. 30, 2013
8367508 Self-aligned contacts for field effect transistor devices Feb. 5, 2013
8361851 Method for manufacturing an NMOS with improved carrier mobility Jan. 29, 2013
8349718 Self-aligned silicide formation on source/drain through contact via Jan. 8, 2013
8350290 Light-receiving device and manufacturing method for a light-receiving device Jan. 8, 2013
8343864 DRAM with schottky barrier FET and MIM trench capacitor Jan. 1, 2013
8338242 Backside bevel protection Dec. 25, 2012
8338906 Schottky device Dec. 25, 2012
8304841 Metal gate transistor, integrated circuits, systems, and fabrication methods thereof Nov. 6, 2012
8283244 Method for forming one transistor DRAM cell structure Oct. 9, 2012
8247319 Method to enable the process and enlarge the process window for silicide, germanide or germanosilicide formation in structures with extremely small dimensions Aug. 21, 2012
8202799 Methods of manufacturing metal-silicide features Jun. 19, 2012
8143655 Trench schottky barrier diode with differential oxide thickness Mar. 27, 2012
8110489 Process for forming cobalt-containing materials Feb. 7, 2012
8105946 Method of forming conductive lines of semiconductor memory device Jan. 31, 2012
8101511 Method of manufacturing a junction barrier Schottky diode with dual silicides Jan. 24, 2012
8084342 Method of manufacturing a CMOS device with zero soft error rate Dec. 27, 2011
8071482 Manufacturing method of a silicon carbide semiconductor device Dec. 6, 2011
8043912 Manufacturing method of a semiconductor device having polycide wiring layer Oct. 25, 2011
8012863 Transistors with gate stacks having metal electrodes Sep. 6, 2011
8008177 Method for fabricating semiconductor device using a nickel salicide process Aug. 30, 2011
7989892 Gate structure, and semiconductor device having a gate structure Aug. 2, 2011
7985668 Method for forming a metal silicide having a lower potential for containing material defects Jul. 26, 2011
7923362 Method for manufacturing a metal-semiconductor contact in semiconductor components Apr. 12, 2011
7902055 Method of manufacturing a dual metal Schottky diode Mar. 8, 2011
7879705 Semiconductor devices and manufacturing method thereof Feb. 1, 2011
7851307 Method of forming complex oxide nanodots for a charge trap Dec. 14, 2010
7833873 Method and structure to reduce contact resistance on thin silicon-on-insulator device Nov. 16, 2010
7781316 Methods of manufacturing metal-silicide features Aug. 24, 2010
7759202 Method for forming semiconductor device with gates of different materials Jul. 20, 2010
7745317 Semiconductor device and method of manufacturing the same Jun. 29, 2010
7732313 FUSI integration method using SOG as a sacrificial planarization layer Jun. 8, 2010
7732312 FUSI integration method using SOG as a sacrificial planarization layer Jun. 8, 2010
7682914 Fully salicided (FUCA) MOSFET structure Mar. 23, 2010
7645692 Semiconductor device and method of manufacturing the same Jan. 12, 2010
7632743 Method of manufacturing flash memory device Dec. 15, 2009
7632744 Semiconductor integrated circuit device and process for manufacturing the same Dec. 15, 2009
7625800 Method of fabricating MOS transistor Dec. 1, 2009

1 2 3 4










 
 
  Recently Added Patents
Transfer of digital data through an isolation
Electronic document reading devices
Device for determining the absolute angular position of the steering wheel of an electric power-assisted steering column of a motor vehicle using weighted dynamic parameters of the vehicle
Lubricant composition and antioxident composition
Multiple-frequency inversion method and control apparatus for internal combustion engine driven generator
System and method for controlling a wireless device
Engineered enzymes with methionine-gamma-lyase enzymes and pharmacological preparations thereof
  Randomly Featured Patents
Light-emitting device with improved reliability
Chair with a built-in sun-protective device
Optical signal processor and optical signal processing method for processing optical signals in optical communications systems
Method and apparatus of prefetching streams of varying prefetch depth
Method of detecting array of liquid crystal display and apparatus thereof
Combined seat and backrest unit
Exposure device
Shock absorbing type steering column assembly
Mounting arrangement for computers
Brackets for constructing temporary or moveable shelving